SG10201500908PA - Apparatus for recycling sulfuric acid- hydrogen peroxide solution - Google Patents

Apparatus for recycling sulfuric acid- hydrogen peroxide solution

Info

Publication number
SG10201500908PA
SG10201500908PA SG10201500908PA SG10201500908PA SG10201500908PA SG 10201500908P A SG10201500908P A SG 10201500908PA SG 10201500908P A SG10201500908P A SG 10201500908PA SG 10201500908P A SG10201500908P A SG 10201500908PA SG 10201500908P A SG10201500908P A SG 10201500908PA
Authority
SG
Singapore
Prior art keywords
sulfuric acid
hydrogen peroxide
peroxide solution
recycling sulfuric
recycling
Prior art date
Application number
SG10201500908PA
Other languages
English (en)
Inventor
Shih-Pao Chien
Original Assignee
Trusval Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Trusval Technology Co Ltd filed Critical Trusval Technology Co Ltd
Publication of SG10201500908PA publication Critical patent/SG10201500908PA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
SG10201500908PA 2014-02-27 2015-02-05 Apparatus for recycling sulfuric acid- hydrogen peroxide solution SG10201500908PA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW103203460U TWM488496U (zh) 2014-02-27 2014-02-27 硫酸－過氧化氫溶液回收處理裝置

Publications (1)

Publication Number Publication Date
SG10201500908PA true SG10201500908PA (en) 2015-09-29

Family

ID=52109390

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201500908PA SG10201500908PA (en) 2014-02-27 2015-02-05 Apparatus for recycling sulfuric acid- hydrogen peroxide solution

Country Status (3)

Country Link
KR (1) KR200481448Y1 (ko)
SG (1) SG10201500908PA (ko)
TW (1) TWM488496U (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI697459B (zh) * 2019-02-12 2020-07-01 義鎧科技股份有限公司 節能濃縮系統
CN118084258A (zh) * 2024-04-03 2024-05-28 高频(北京)科技股份有限公司 一种半导体硫酸废液、tmah废液的综合处理系统及方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3635026B2 (ja) * 2000-06-14 2005-03-30 株式会社サンテックシステム 硫酸リサイクル装置
KR100812545B1 (ko) * 2006-10-23 2008-03-13 주식회사 케이씨텍 반도체 웨이퍼 세정장치 및 그 세정장치의 세정 약액공급방법
JP5954530B2 (ja) * 2012-03-30 2016-07-20 栗田工業株式会社 硫酸廃液処理装置および硫酸廃液処理方法

Also Published As

Publication number Publication date
KR20150003325U (ko) 2015-09-04
TWM488496U (zh) 2014-10-21
KR200481448Y1 (ko) 2016-10-06

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