SG10201404158RA - Air cooled faraday shield and methods for using the same - Google Patents

Air cooled faraday shield and methods for using the same

Info

Publication number
SG10201404158RA
SG10201404158RA SG10201404158RA SG10201404158RA SG10201404158RA SG 10201404158R A SG10201404158R A SG 10201404158RA SG 10201404158R A SG10201404158R A SG 10201404158RA SG 10201404158R A SG10201404158R A SG 10201404158RA SG 10201404158R A SG10201404158R A SG 10201404158RA
Authority
SG
Singapore
Prior art keywords
methods
same
air cooled
faraday shield
cooled faraday
Prior art date
Application number
SG10201404158RA
Inventor
Saravanapriyan Sriraman
John Drewery
John Mcchesney
Alex Paterson
Original Assignee
Lam Res Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Res Corp filed Critical Lam Res Corp
Publication of SG10201404158RA publication Critical patent/SG10201404158RA/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H01J37/32522—Temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32623—Mechanical discharge control means
    • H01J37/32651—Shields, e.g. dark space shields, Faraday shields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • H01J37/32963—End-point detection

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Plasma Technology (AREA)
  • Health & Medical Sciences (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
SG10201404158RA 2013-07-17 2014-07-17 Air cooled faraday shield and methods for using the same SG10201404158RA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201361847407P 2013-07-17 2013-07-17
US13/974,324 US9885493B2 (en) 2013-07-17 2013-08-23 Air cooled faraday shield and methods for using the same

Publications (1)

Publication Number Publication Date
SG10201404158RA true SG10201404158RA (en) 2015-02-27

Family

ID=52342614

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201404158RA SG10201404158RA (en) 2013-07-17 2014-07-17 Air cooled faraday shield and methods for using the same

Country Status (4)

Country Link
US (3) US9885493B2 (en)
KR (1) KR102306397B1 (en)
SG (1) SG10201404158RA (en)
TW (1) TWI640728B (en)

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KR102204118B1 (en) * 2017-02-20 2021-01-19 베이징 이타운 세미컨덕터 테크놀로지 컴퍼니 리미티드 Temperature control using a temperature control element coupled to the Faraday shield
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US11670490B2 (en) * 2017-09-29 2023-06-06 Taiwan Semiconductor Manufacturing Co., Ltd. Integrated circuit fabrication system with adjustable gas injector
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CN110660707B (en) * 2018-06-29 2022-06-14 台湾积体电路制造股份有限公司 Plasma generation system and temperature adjustment method
KR20220134680A (en) * 2020-01-31 2022-10-05 램 리써치 코포레이션 Plenum Assemblies for Cooling Transformer Coupled Plasma Windows
KR102540773B1 (en) * 2021-01-19 2023-06-12 피에스케이 주식회사 Faraday shield and apparatus for treating substrate
WO2022173695A1 (en) * 2021-02-10 2022-08-18 Lam Research Corporation Hybrid liquid/air cooling system for tcp windows

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Also Published As

Publication number Publication date
US11692732B2 (en) 2023-07-04
TWI640728B (en) 2018-11-11
KR102306397B1 (en) 2021-09-29
US10690374B2 (en) 2020-06-23
KR20150009941A (en) 2015-01-27
TW201516350A (en) 2015-05-01
US20180156489A1 (en) 2018-06-07
US9885493B2 (en) 2018-02-06
US20150020969A1 (en) 2015-01-22
US20200318852A1 (en) 2020-10-08

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