SG10201400525UA - Method of inline manufacturing a solar cell panel - Google Patents

Method of inline manufacturing a solar cell panel

Info

Publication number
SG10201400525UA
SG10201400525UA SG10201400525UA SG10201400525UA SG10201400525UA SG 10201400525U A SG10201400525U A SG 10201400525UA SG 10201400525U A SG10201400525U A SG 10201400525UA SG 10201400525U A SG10201400525U A SG 10201400525UA SG 10201400525U A SG10201400525U A SG 10201400525UA
Authority
SG
Singapore
Prior art keywords
solar cell
cell panel
inline manufacturing
inline
manufacturing
Prior art date
Application number
SG10201400525UA
Inventor
Stephan Voser
Oliver Rattunde
Martin Dubs
Gerald Feistritzer
Volker Wuestenhagen
Gerhard Dovids
Original Assignee
Oc Oerlikon Balzers Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oc Oerlikon Balzers Ag filed Critical Oc Oerlikon Balzers Ag
Publication of SG10201400525UA publication Critical patent/SG10201400525UA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
    • H01L21/67173—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers in-line arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67196—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the transfer chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67201—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the load-lock chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/042—PV modules or arrays of single PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Electromagnetism (AREA)
  • Photovoltaic Devices (AREA)
  • Chemical Vapour Deposition (AREA)
SG10201400525UA 2009-03-18 2010-03-15 Method of inline manufacturing a solar cell panel SG10201400525UA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US16108409P 2009-03-18 2009-03-18
US16393909P 2009-03-27 2009-03-27

Publications (1)

Publication Number Publication Date
SG10201400525UA true SG10201400525UA (en) 2014-05-29

Family

ID=42740049

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201400525UA SG10201400525UA (en) 2009-03-18 2010-03-15 Method of inline manufacturing a solar cell panel

Country Status (7)

Country Link
US (1) US9214589B2 (en)
EP (2) EP2409339B1 (en)
KR (2) KR101632646B1 (en)
CN (1) CN102388467B (en)
SG (1) SG10201400525UA (en)
TW (1) TWI501408B (en)
WO (1) WO2010106012A2 (en)

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CN102881763A (en) * 2011-07-11 2013-01-16 刘莹 Equipment for manufacturing back electrode of crystalline silicon solar cell by laser sintering
DE102011084644A1 (en) * 2011-10-17 2013-04-18 Osram Gmbh METHOD FOR PRODUCING A PHOTOVOLTAIC ELEMENT WITH A SILICON DIOXIDE LAYER
KR20160104750A (en) * 2012-08-07 2016-09-05 요코하마 고무 가부시키가이샤 Pneumatic tire
US10518582B2 (en) * 2012-10-10 2019-12-31 The Yokohama Rubber Co., Ltd. Pneumatic tire
KR20160087390A (en) 2013-11-14 2016-07-21 에바텍 어드벤스드 테크놀로지스 아크티엔게젤샤프트 Apparatus and process for annealing of anti-fingerprint coatings
CN106549065A (en) * 2016-10-24 2017-03-29 苏州阿特斯阳光电力科技有限公司 A kind of antiradar reflectivity film layer structure
WO2019020391A1 (en) 2017-07-27 2019-01-31 Evatec Ag Permeation-barrier
US10998209B2 (en) 2019-05-31 2021-05-04 Applied Materials, Inc. Substrate processing platforms including multiple processing chambers
US11749542B2 (en) 2020-07-27 2023-09-05 Applied Materials, Inc. Apparatus, system, and method for non-contact temperature monitoring of substrate supports
US11817331B2 (en) 2020-07-27 2023-11-14 Applied Materials, Inc. Substrate holder replacement with protective disk during pasting process
US11600507B2 (en) 2020-09-09 2023-03-07 Applied Materials, Inc. Pedestal assembly for a substrate processing chamber
US11610799B2 (en) 2020-09-18 2023-03-21 Applied Materials, Inc. Electrostatic chuck having a heating and chucking capabilities
US11674227B2 (en) 2021-02-03 2023-06-13 Applied Materials, Inc. Symmetric pump down mini-volume with laminar flow cavity gas injection for high and low pressure
KR102514021B1 (en) 2021-03-18 2023-03-24 고려대학교 산학협력단 Transparent radiative cooling device
KR102596161B1 (en) 2021-09-13 2023-10-31 고려대학교 산학협력단 Transparent radiative cooling device
DE102022116340A1 (en) 2022-06-30 2024-01-04 VON ARDENNE Asset GmbH & Co. KG Process and solar cell

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TW276353B (en) * 1993-07-15 1996-05-21 Hitachi Seisakusyo Kk
AU7644600A (en) * 1999-10-13 2001-04-23 Centrotherm Elektrische Anlagen Gmbh And Co. Method and device for producing solar cells
US6423565B1 (en) * 2000-05-30 2002-07-23 Kurt L. Barth Apparatus and processes for the massproduction of photovotaic modules
US20090004850A1 (en) * 2001-07-25 2009-01-01 Seshadri Ganguli Process for forming cobalt and cobalt silicide materials in tungsten contact applications
WO2005106966A1 (en) * 2004-04-30 2005-11-10 Unisearch Limited Artificial amorphous semiconductors and applications to solar cells
JP4545147B2 (en) * 2004-05-17 2010-09-15 株式会社日立国際電気 Substrate processing apparatus and semiconductor device manufacturing method
WO2006057319A1 (en) * 2004-11-24 2006-06-01 Hitachi Kokusai Electric Inc. Substrate processing equipment
US8078311B2 (en) * 2004-12-06 2011-12-13 Tokyo Electron Limited Substrate processing apparatus and substrate transfer method adopted in substrate processing apparatus
US7361585B2 (en) * 2004-12-23 2008-04-22 Advantech Global, Ltd System for and method of planarizing the contact region of a via by use of a continuous inline vacuum deposition
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JP2009533876A (en) * 2006-04-11 2009-09-17 アプライド マテリアルズ インコーポレイテッド System configuration and method for forming solar cell panels
US20070254112A1 (en) * 2006-04-26 2007-11-01 Applied Materials, Inc. Apparatus and method for high utilization of process chambers of a cluster system through staggered plasma cleaning
KR100818044B1 (en) 2006-05-04 2008-03-31 위순임 Substrate pedestal and substrate transfer equipment and substrate processing system and method using the same
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Also Published As

Publication number Publication date
KR101632646B1 (en) 2016-07-01
EP3249699A1 (en) 2017-11-29
KR20110138243A (en) 2011-12-26
TWI501408B (en) 2015-09-21
KR20160075821A (en) 2016-06-29
US20120009730A1 (en) 2012-01-12
EP2409339B1 (en) 2017-09-06
WO2010106012A3 (en) 2011-06-03
EP2409339A2 (en) 2012-01-25
CN102388467A (en) 2012-03-21
TW201114042A (en) 2011-04-16
EP3249699B1 (en) 2020-04-15
KR101717409B1 (en) 2017-03-16
WO2010106012A2 (en) 2010-09-23
CN102388467B (en) 2015-05-13
US9214589B2 (en) 2015-12-15

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