SE9902081D0 - Low power sensor - Google Patents

Low power sensor

Info

Publication number
SE9902081D0
SE9902081D0 SE9902081A SE9902081A SE9902081D0 SE 9902081 D0 SE9902081 D0 SE 9902081D0 SE 9902081 A SE9902081 A SE 9902081A SE 9902081 A SE9902081 A SE 9902081A SE 9902081 D0 SE9902081 D0 SE 9902081D0
Authority
SE
Sweden
Prior art keywords
gas
low power
low thermal
membrane
silicon
Prior art date
Application number
SE9902081A
Other languages
English (en)
Other versions
SE9902081L (sv
SE524102C2 (sv
Inventor
Danick Briand
Bart Van Der Schoot
N-F De Rooij
Hans Sundgren
Ingmemar Lundstroem
Original Assignee
Nordic Sensor Technologies Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nordic Sensor Technologies Ab filed Critical Nordic Sensor Technologies Ab
Priority to SE9902081A priority Critical patent/SE524102C2/sv
Publication of SE9902081D0 publication Critical patent/SE9902081D0/sv
Priority to JP2001501874A priority patent/JP2003501657A/ja
Priority to PCT/SE2000/001134 priority patent/WO2000075649A1/en
Priority to AU54354/00A priority patent/AU5435400A/en
Priority to EP00939231A priority patent/EP1190242A1/en
Publication of SE9902081L publication Critical patent/SE9902081L/sv
Priority to NO20015916A priority patent/NO20015916L/no
Publication of SE524102C2 publication Critical patent/SE524102C2/sv

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4141—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS specially adapted for gases

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Molecular Biology (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
SE9902081A 1999-06-04 1999-06-04 Mikro-hotplate-anordning med integrerad gaskänslig fälteffektsensor SE524102C2 (sv)

Priority Applications (6)

Application Number Priority Date Filing Date Title
SE9902081A SE524102C2 (sv) 1999-06-04 1999-06-04 Mikro-hotplate-anordning med integrerad gaskänslig fälteffektsensor
JP2001501874A JP2003501657A (ja) 1999-06-04 2000-05-31 低消費電力センサ
PCT/SE2000/001134 WO2000075649A1 (en) 1999-06-04 2000-05-31 Low-power sensor
AU54354/00A AU5435400A (en) 1999-06-04 2000-05-31 Low-power sensor
EP00939231A EP1190242A1 (en) 1999-06-04 2000-05-31 Low-power sensor
NO20015916A NO20015916L (no) 1999-06-04 2001-12-04 Lavströms sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9902081A SE524102C2 (sv) 1999-06-04 1999-06-04 Mikro-hotplate-anordning med integrerad gaskänslig fälteffektsensor

Publications (3)

Publication Number Publication Date
SE9902081D0 true SE9902081D0 (sv) 1999-06-04
SE9902081L SE9902081L (sv) 2000-12-05
SE524102C2 SE524102C2 (sv) 2004-06-29

Family

ID=20415910

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9902081A SE524102C2 (sv) 1999-06-04 1999-06-04 Mikro-hotplate-anordning med integrerad gaskänslig fälteffektsensor

Country Status (6)

Country Link
EP (1) EP1190242A1 (sv)
JP (1) JP2003501657A (sv)
AU (1) AU5435400A (sv)
NO (1) NO20015916L (sv)
SE (1) SE524102C2 (sv)
WO (1) WO2000075649A1 (sv)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE514042C2 (sv) 1998-05-08 2000-12-18 Nordic Sensor Technologies Ab Sensoranordning
SE523918C2 (sv) 1999-01-25 2004-06-01 Appliedsensor Sweden Ab Förfarande för framställning av integrerade sensorgrupper på ett gemensamt substrat samt en mask för användning vid förfarandet
GB0110967D0 (en) * 2001-05-04 2001-06-27 Univ Paisley The Optically energised & Interrogated gas sensors
DE10219726A1 (de) * 2002-05-02 2003-11-27 Eads Deutschland Gmbh Verfahren zur Herstellung eines brückenartigen Halbleiter-Gassensors, sowie Halbleiter-Gassensor mit Brückenstruktur
DE102004017750B4 (de) * 2004-04-06 2006-03-16 Flechsig, Gerd-Uwe, Dr. rer. nat. Analyse-Array mit heizbaren Elektroden
EP1736768A1 (en) 2005-06-22 2006-12-27 Appliedsensor Sweden AB Device and method for gas sensing
DE102005033226A1 (de) * 2005-07-15 2007-01-25 Siemens Ag Verfahren zur gleichzeitigen Detektion mehrerer unterschiedlicher Luftbelastungen
US20100176463A1 (en) * 2007-07-19 2010-07-15 Renesas Technology Corp. Semiconductor device and manufacturing method of the same
JP5507524B2 (ja) * 2011-11-07 2014-05-28 株式会社日立製作所 可燃性ガスセンサ
CN104105960B (zh) * 2011-12-23 2018-01-12 赛诺菲-安万特德国有限公司 用于药剂的包装物的传感器装置
CN104541161B (zh) 2012-07-16 2017-03-29 Sgx传感器公司 微热板器件及包括此类微热板器件的传感器
DE102015104419A1 (de) 2014-04-02 2015-10-08 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Fluidsensor und Verfahren zur Untersuchung eines Fluids
US20170067841A1 (en) * 2015-09-09 2017-03-09 Invensense, Inc. Gas sensor platform and the method of making the same
GB2542801A (en) * 2015-09-30 2017-04-05 Cambridge Cmos Sensors Ltd Micro gas sensor with a gas permeable region
US10383967B2 (en) 2016-11-30 2019-08-20 Invensense, Inc. Substance sensing with tracers

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5464966A (en) * 1992-10-26 1995-11-07 The United States Of America As Represented By The Secretary Of Commerce Micro-hotplate devices and methods for their fabrication
US5356756A (en) * 1992-10-26 1994-10-18 The United States Of America As Represented By The Secretary Of Commerce Application of microsubstrates for materials processing

Also Published As

Publication number Publication date
SE9902081L (sv) 2000-12-05
AU5435400A (en) 2000-12-28
SE524102C2 (sv) 2004-06-29
EP1190242A1 (en) 2002-03-27
NO20015916L (no) 2002-02-01
WO2000075649A1 (en) 2000-12-14
NO20015916D0 (no) 2001-12-04
JP2003501657A (ja) 2003-01-14

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Legal Events

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