SE9901293D0 - Förfarande för kalibrering av utrustning för detektering av föroreningar i transparent material - Google Patents

Förfarande för kalibrering av utrustning för detektering av föroreningar i transparent material

Info

Publication number
SE9901293D0
SE9901293D0 SE9901293A SE9901293A SE9901293D0 SE 9901293 D0 SE9901293 D0 SE 9901293D0 SE 9901293 A SE9901293 A SE 9901293A SE 9901293 A SE9901293 A SE 9901293A SE 9901293 D0 SE9901293 D0 SE 9901293D0
Authority
SE
Sweden
Prior art keywords
equipment
transparent material
sizes
detecting
determined
Prior art date
Application number
SE9901293A
Other languages
English (en)
Other versions
SE9901293L (sv
SE514088C2 (sv
Inventor
Goeran Aasemyr
Original Assignee
Photonic Systems Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Photonic Systems Ab filed Critical Photonic Systems Ab
Priority to SE9901293A priority Critical patent/SE514088C2/sv
Publication of SE9901293D0 publication Critical patent/SE9901293D0/sv
Priority to EP00923047A priority patent/EP1177427A1/en
Priority to PCT/SE2000/000683 priority patent/WO2000062044A1/en
Priority to US09/958,780 priority patent/US6646736B1/en
Publication of SE9901293L publication Critical patent/SE9901293L/sv
Publication of SE514088C2 publication Critical patent/SE514088C2/sv

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/93—Detection standards; Calibrating baseline adjustment, drift correction

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
SE9901293A 1999-04-12 1999-04-12 Förfarande för kalibrering av utrustning för detektering av föroreningar i transparent material SE514088C2 (sv)

Priority Applications (4)

Application Number Priority Date Filing Date Title
SE9901293A SE514088C2 (sv) 1999-04-12 1999-04-12 Förfarande för kalibrering av utrustning för detektering av föroreningar i transparent material
EP00923047A EP1177427A1 (en) 1999-04-12 2000-04-10 A method for calibrating equipment for detecting impurities in transparent material
PCT/SE2000/000683 WO2000062044A1 (en) 1999-04-12 2000-04-10 A method for calibrating equipment for detecting impurities in transparent material
US09/958,780 US6646736B1 (en) 1999-04-12 2000-04-10 Method for calibrating equipment for detecting impurities in transparent material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9901293A SE514088C2 (sv) 1999-04-12 1999-04-12 Förfarande för kalibrering av utrustning för detektering av föroreningar i transparent material

Publications (3)

Publication Number Publication Date
SE9901293D0 true SE9901293D0 (sv) 1999-04-12
SE9901293L SE9901293L (sv) 2000-10-13
SE514088C2 SE514088C2 (sv) 2000-12-18

Family

ID=20415180

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9901293A SE514088C2 (sv) 1999-04-12 1999-04-12 Förfarande för kalibrering av utrustning för detektering av föroreningar i transparent material

Country Status (4)

Country Link
US (1) US6646736B1 (sv)
EP (1) EP1177427A1 (sv)
SE (1) SE514088C2 (sv)
WO (1) WO2000062044A1 (sv)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8682170B2 (en) 2011-05-20 2014-03-25 The Trustees Of Princeton University System and method for broadband RF interference cancellation
US8693810B2 (en) 2008-11-05 2014-04-08 The Trustees Of Princeton University Optical counter-phase system and method of RF interference cancellation

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5416594A (en) * 1993-07-20 1995-05-16 Tencor Instruments Surface scanner with thin film gauge
US5691812A (en) 1996-03-22 1997-11-25 Ade Optical Systems Corporation Calibration standard for calibrating a defect inspection system and a method of forming same
US5773951A (en) * 1996-03-25 1998-06-30 Digital Test Corporation Wafer prober having sub-micron alignment accuracy
US5966677A (en) * 1997-02-28 1999-10-12 Fiekowsky; Peter J. High accuracy particle dimension measurement system
US5875027A (en) 1997-03-28 1999-02-23 Hitachi Electronics Engineering Co. Sensitivity calibration disk for surface defect tester

Also Published As

Publication number Publication date
SE9901293L (sv) 2000-10-13
US6646736B1 (en) 2003-11-11
WO2000062044A1 (en) 2000-10-19
SE514088C2 (sv) 2000-12-18
EP1177427A1 (en) 2002-02-06

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Legal Events

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