SE8800869L - Membranstruktur samt saett att framstaella densamma - Google Patents

Membranstruktur samt saett att framstaella densamma

Info

Publication number
SE8800869L
SE8800869L SE8800869A SE8800869A SE8800869L SE 8800869 L SE8800869 L SE 8800869L SE 8800869 A SE8800869 A SE 8800869A SE 8800869 A SE8800869 A SE 8800869A SE 8800869 L SE8800869 L SE 8800869L
Authority
SE
Sweden
Prior art keywords
membranes
perforations
membrane
spacing
spacing layer
Prior art date
Application number
SE8800869A
Other languages
English (en)
Other versions
SE463654B (sv
SE8800869D0 (sv
Inventor
Nils Goeran Stemme
Original Assignee
Nils Goeran Stemme
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nils Goeran Stemme filed Critical Nils Goeran Stemme
Priority to SE8800869A priority Critical patent/SE463654B/sv
Publication of SE8800869D0 publication Critical patent/SE8800869D0/sv
Priority to PCT/SE1989/000124 priority patent/WO1989008489A1/en
Priority to AU32981/89A priority patent/AU3298189A/en
Publication of SE8800869L publication Critical patent/SE8800869L/sv
Publication of SE463654B publication Critical patent/SE463654B/sv

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039—Inorganic membrane manufacture
    • B01D67/0053—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes
    • B01D67/006—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods
    • B01D67/0062—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods by micromachining techniques, e.g. using masking and etching steps, photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/12—Composite membranes; Ultra-thin membranes
    • B01D69/1216—Three or more layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B01D71/0213—Silicon
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/20—Masks or mask blanks for imaging by charged particle beam [CPB] radiation, e.g. by electron beam; Preparation thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
SE8800869A 1988-03-11 1988-03-11 Membranstruktur samt saett att framstaella densamma SE463654B (sv)

Priority Applications (3)

Application Number Priority Date Filing Date Title
SE8800869A SE463654B (sv) 1988-03-11 1988-03-11 Membranstruktur samt saett att framstaella densamma
PCT/SE1989/000124 WO1989008489A1 (en) 1988-03-11 1989-03-13 Membrane structure and method for the manufacture thereof
AU32981/89A AU3298189A (en) 1988-03-11 1989-03-13 Membrane structure and method for the manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE8800869A SE463654B (sv) 1988-03-11 1988-03-11 Membranstruktur samt saett att framstaella densamma

Publications (3)

Publication Number Publication Date
SE8800869D0 SE8800869D0 (sv) 1988-03-11
SE8800869L true SE8800869L (sv) 1989-09-12
SE463654B SE463654B (sv) 1991-01-07

Family

ID=20371649

Family Applications (1)

Application Number Title Priority Date Filing Date
SE8800869A SE463654B (sv) 1988-03-11 1988-03-11 Membranstruktur samt saett att framstaella densamma

Country Status (3)

Country Link
AU (1) AU3298189A (sv)
SE (1) SE463654B (sv)
WO (1) WO1989008489A1 (sv)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4140922C1 (sv) * 1991-12-12 1993-07-29 Danfoss A/S, Nordborg, Dk
US5798042A (en) * 1994-03-07 1998-08-25 Regents Of The University Of California Microfabricated filter with specially constructed channel walls, and containment well and capsule constructed with such filters
US5651900A (en) * 1994-03-07 1997-07-29 The Regents Of The University Of California Microfabricated particle filter
US5770076A (en) * 1994-03-07 1998-06-23 The Regents Of The University Of California Micromachined capsules having porous membranes and bulk supports
DE19521275A1 (de) 1995-06-10 1996-12-12 Leybold Ag Gasdurchlaß mit selektiv wirkender Durchtrittsfläche sowie Verfahren zur Herstellung der Durchtrittsfläche
US5938923A (en) * 1997-04-15 1999-08-17 The Regents Of The University Of California Microfabricated filter and capsule using a substrate sandwich
FR2845513B1 (fr) * 2002-10-03 2006-08-11 Commissariat Energie Atomique Dispositif d'enregistrement de donnees comportant un support de memoire en forme de membrane
FR2868411B1 (fr) * 2004-04-01 2006-06-16 Commissariat Energie Atomique Membrane souple comportant des entailles

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB840615A (en) * 1957-10-18 1960-07-06 Multi Metal Wire Cloth Company Filtering septum and method of making it
US3900629A (en) * 1973-09-14 1975-08-19 Bendix Corp Porous laminate and method of manufacture
US4510436A (en) * 1982-07-15 1985-04-09 Southwest Medical Products, Incorporated Dielectric measuring systems

Also Published As

Publication number Publication date
SE463654B (sv) 1991-01-07
SE8800869D0 (sv) 1988-03-11
AU3298189A (en) 1989-10-05
WO1989008489A1 (en) 1989-09-21

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