SE8800869L - MEMBRANE STRUCTURE AND WERE MADE TO MANUFACTURE THEM - Google Patents

MEMBRANE STRUCTURE AND WERE MADE TO MANUFACTURE THEM

Info

Publication number
SE8800869L
SE8800869L SE8800869A SE8800869A SE8800869L SE 8800869 L SE8800869 L SE 8800869L SE 8800869 A SE8800869 A SE 8800869A SE 8800869 A SE8800869 A SE 8800869A SE 8800869 L SE8800869 L SE 8800869L
Authority
SE
Sweden
Prior art keywords
membranes
perforations
membrane
spacing
spacing layer
Prior art date
Application number
SE8800869A
Other languages
Swedish (sv)
Other versions
SE8800869D0 (en
SE463654B (en
Inventor
Nils Goeran Stemme
Original Assignee
Nils Goeran Stemme
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nils Goeran Stemme filed Critical Nils Goeran Stemme
Priority to SE8800869A priority Critical patent/SE463654B/en
Publication of SE8800869D0 publication Critical patent/SE8800869D0/en
Priority to PCT/SE1989/000124 priority patent/WO1989008489A1/en
Priority to AU32981/89A priority patent/AU3298189A/en
Publication of SE8800869L publication Critical patent/SE8800869L/en
Publication of SE463654B publication Critical patent/SE463654B/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/12—Composite membranes; Ultra-thin membranes
    • B01D69/1216—Three or more layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039—Inorganic membrane manufacture
    • B01D67/0053—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes
    • B01D67/006—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods
    • B01D67/0062—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods by micromachining techniques, e.g. using masking and etching steps, photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/12—Composite membranes; Ultra-thin membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B01D71/0213—Silicon
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/20—Masks or mask blanks for imaging by charged particle beam [CPB] radiation, e.g. by electron beam; Preparation thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)

Abstract

The invention relates to a method of making a membrane structure having two parallel membranes (1, 2), both of which are provided with a multiplicity of perforations (3, 4), the perforations (3) in a first one of said membranes being disposed opposite to unperforated parts (5) of the second membrane (2), and a multiplicity of separate spacing means (6) arranged between said membranes (1, 2) and serving to maintain said membranes mutually spaced apart. A continuous spacing layer (8) of a material (or materials) other than that of the membranes (1, 2) and of a predetermined thickness corresponding to the said spacing, is provided between the membranes. The spacing layer (8) is successively removed via the perforations (3, 4) of at least one of said membranes, such that there are formed in the spacing layer of the finished structure exposed passages (7) between the perforations (3) in the first membrane (1) and the perforations (4) in the second membrane (2), and such that the remainder of the said spacing layer (8) forms the said spacing means (6). The invention also comprises a membrane structure made in accordance with this method.
SE8800869A 1988-03-11 1988-03-11 MEMBRANE STRUCTURE AS WELL AS MANUFACTURING THEM SE463654B (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
SE8800869A SE463654B (en) 1988-03-11 1988-03-11 MEMBRANE STRUCTURE AS WELL AS MANUFACTURING THEM
PCT/SE1989/000124 WO1989008489A1 (en) 1988-03-11 1989-03-13 Membrane structure and method for the manufacture thereof
AU32981/89A AU3298189A (en) 1988-03-11 1989-03-13 Membrane structure and method for the manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE8800869A SE463654B (en) 1988-03-11 1988-03-11 MEMBRANE STRUCTURE AS WELL AS MANUFACTURING THEM

Publications (3)

Publication Number Publication Date
SE8800869D0 SE8800869D0 (en) 1988-03-11
SE8800869L true SE8800869L (en) 1989-09-12
SE463654B SE463654B (en) 1991-01-07

Family

ID=20371649

Family Applications (1)

Application Number Title Priority Date Filing Date
SE8800869A SE463654B (en) 1988-03-11 1988-03-11 MEMBRANE STRUCTURE AS WELL AS MANUFACTURING THEM

Country Status (3)

Country Link
AU (1) AU3298189A (en)
SE (1) SE463654B (en)
WO (1) WO1989008489A1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4140922C1 (en) * 1991-12-12 1993-07-29 Danfoss A/S, Nordborg, Dk
US5770076A (en) * 1994-03-07 1998-06-23 The Regents Of The University Of California Micromachined capsules having porous membranes and bulk supports
US5798042A (en) * 1994-03-07 1998-08-25 Regents Of The University Of California Microfabricated filter with specially constructed channel walls, and containment well and capsule constructed with such filters
US5651900A (en) * 1994-03-07 1997-07-29 The Regents Of The University Of California Microfabricated particle filter
DE19521275A1 (en) 1995-06-10 1996-12-12 Leybold Ag Gas passage with a selectively acting passage area and method for producing the passage area
US5938923A (en) * 1997-04-15 1999-08-17 The Regents Of The University Of California Microfabricated filter and capsule using a substrate sandwich
FR2845513B1 (en) * 2002-10-03 2006-08-11 Commissariat Energie Atomique DATA RECORDING DEVICE HAVING MEMBRANE MEMORY MEMORY MEDIUM
FR2868411B1 (en) * 2004-04-01 2006-06-16 Commissariat Energie Atomique FLEXIBLE MEMBRANE COMPRISING DETAILS

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB840615A (en) * 1957-10-18 1960-07-06 Multi Metal Wire Cloth Company Filtering septum and method of making it
US3900629A (en) * 1973-09-14 1975-08-19 Bendix Corp Porous laminate and method of manufacture
US4510436A (en) * 1982-07-15 1985-04-09 Southwest Medical Products, Incorporated Dielectric measuring systems

Also Published As

Publication number Publication date
AU3298189A (en) 1989-10-05
WO1989008489A1 (en) 1989-09-21
SE8800869D0 (en) 1988-03-11
SE463654B (en) 1991-01-07

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