SE413556B - Sett for analys av ett elektronbestralat prov medelst utsenda sekunderelektroner samt anordning for genomforande av settet - Google Patents

Sett for analys av ett elektronbestralat prov medelst utsenda sekunderelektroner samt anordning for genomforande av settet

Info

Publication number
SE413556B
SE413556B SE7514717A SE7514717A SE413556B SE 413556 B SE413556 B SE 413556B SE 7514717 A SE7514717 A SE 7514717A SE 7514717 A SE7514717 A SE 7514717A SE 413556 B SE413556 B SE 413556B
Authority
SE
Sweden
Prior art keywords
kit
sended
analyze
implementation
secondary electrons
Prior art date
Application number
SE7514717A
Other languages
English (en)
Swedish (sv)
Other versions
SE7514717L (sv
Inventor
Gressus C Le
D Massignon
R Sopizet
Original Assignee
Commissariat Energie Atomique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from FR7500050A external-priority patent/FR2296847A1/fr
Priority claimed from FR7516206A external-priority patent/FR2312031A2/fr
Application filed by Commissariat Energie Atomique filed Critical Commissariat Energie Atomique
Publication of SE7514717L publication Critical patent/SE7514717L/xx
Publication of SE413556B publication Critical patent/SE413556B/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
SE7514717A 1975-01-02 1975-12-29 Sett for analys av ett elektronbestralat prov medelst utsenda sekunderelektroner samt anordning for genomforande av settet SE413556B (sv)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR7500050A FR2296847A1 (fr) 1975-01-02 1975-01-02 Procede et dispositif d'analyse elementaire et chimique d'un echantillon par analyse spectrale des energies des electrons secondaires
FR7516206A FR2312031A2 (fr) 1975-05-23 1975-05-23 Procede et dispositif d'analyse elementaire et chimique d'un echantillon par analyse spectrale des energies des electrons secondaires

Publications (2)

Publication Number Publication Date
SE7514717L SE7514717L (sv) 1976-07-05
SE413556B true SE413556B (sv) 1980-06-02

Family

ID=26218671

Family Applications (1)

Application Number Title Priority Date Filing Date
SE7514717A SE413556B (sv) 1975-01-02 1975-12-29 Sett for analys av ett elektronbestralat prov medelst utsenda sekunderelektroner samt anordning for genomforande av settet

Country Status (10)

Country Link
US (1) US4034220A (en, 2012)
JP (1) JPS557179B2 (en, 2012)
CA (1) CA1048163A (en, 2012)
CH (1) CH592306A5 (en, 2012)
DE (1) DE2546053A1 (en, 2012)
ES (1) ES444049A1 (en, 2012)
GB (1) GB1530277A (en, 2012)
IL (1) IL48721A (en, 2012)
NL (1) NL7515242A (en, 2012)
SE (1) SE413556B (en, 2012)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5226284A (en) * 1975-08-22 1977-02-26 Jeol Ltd Auger electron spectroscopic apparatus
US4559450A (en) * 1982-08-06 1985-12-17 Unisearch Limited Quantitative compositional analyser for use with scanning electron microscopes
US4492866A (en) * 1983-05-02 1985-01-08 The United States Of America As Represented By The Secretary Of The Navy Method for predicting the performance of cathode materials
NL8600685A (nl) * 1986-03-18 1987-10-16 Philips Nv Apparaat voor energie selectieve afbeelding.
JPH01162129U (en, 2012) * 1988-04-27 1989-11-10
NL8902727A (nl) * 1989-11-06 1991-06-03 Philips Nv Objecthouder voor ondersteuning van een object in een geladen deeltjesbundelsysteem.
JPH04264243A (ja) * 1991-02-20 1992-09-21 Jeol Ltd オージェ像計測におけるピークエネルギーシフト補正法
RU2124716C1 (ru) * 1997-06-25 1999-01-10 Научно-исследовательский физико-химический институт им.Л.Я.Карпова Способ анализа твердых тел
US6635869B2 (en) * 2001-02-26 2003-10-21 Fei Company Step function determination of Auger peak intensity
US8283631B2 (en) * 2008-05-08 2012-10-09 Kla-Tencor Corporation In-situ differential spectroscopy
EP2544814A4 (en) * 2010-03-12 2014-07-23 Société De Commercialisation Des Produits De La Rech Appliquée Socpra Sciences Santé Et Humaines S E METHOD FOR PRODUCING ENERGYLIC SECONDARY ELECTRONS FOR APPLICATIONS IN BIOLOGICAL SCIENCES, RADIANT CHEMISTRY AND POLYMERES AND PHYSICS OF RADIOTH THERAPY
CN104035125A (zh) * 2014-06-12 2014-09-10 电子科技大学 一种带电粒子与边界互作用的概率性模拟方法
US11508551B2 (en) * 2018-12-14 2022-11-22 Kla Corporation Detection and correction of system responses in real-time

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3535516A (en) * 1966-10-17 1970-10-20 Hitachi Ltd Electron microscope employing a modulated scanning beam and a phase sensitive detector to improve the signal to noise ratio
US3461306A (en) * 1967-04-27 1969-08-12 Gen Electric Electron probe microanalyzer for measuring the differential energy response of auger electrons
GB1286454A (en) * 1968-08-24 1972-08-23 Cambridge Scientific Instr Ltd Surface potential analysis by electron beams
JPS4929882A (en, 2012) * 1972-07-14 1974-03-16

Also Published As

Publication number Publication date
JPS557179B2 (en, 2012) 1980-02-22
CA1048163A (en) 1979-02-06
NL7515242A (nl) 1976-07-06
DE2546053A1 (de) 1976-07-08
IL48721A0 (en) 1976-02-29
CH592306A5 (en, 2012) 1977-10-31
SE7514717L (sv) 1976-07-05
JPS5189790A (en, 2012) 1976-08-06
US4034220A (en) 1977-07-05
IL48721A (en) 1979-05-31
GB1530277A (en) 1978-10-25
ES444049A1 (es) 1977-11-16

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