SE409529B - Sett for migrering av en smelta av metallrikt halvledarmaterial genom en massiv kropp av halvledarmaterialet - Google Patents

Sett for migrering av en smelta av metallrikt halvledarmaterial genom en massiv kropp av halvledarmaterialet

Info

Publication number
SE409529B
SE409529B SE7614705A SE7614705A SE409529B SE 409529 B SE409529 B SE 409529B SE 7614705 A SE7614705 A SE 7614705A SE 7614705 A SE7614705 A SE 7614705A SE 409529 B SE409529 B SE 409529B
Authority
SE
Sweden
Prior art keywords
semiconductor material
migration
kit
melt
metal
Prior art date
Application number
SE7614705A
Other languages
English (en)
Other versions
SE7614705L (sv
Inventor
H E Cline
T R Anthony
M F Chang
Original Assignee
Gen Electric
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gen Electric filed Critical Gen Electric
Publication of SE7614705L publication Critical patent/SE7614705L/sv
Publication of SE409529B publication Critical patent/SE409529B/sv

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/24Alloying of impurity materials, e.g. doping materials, electrode materials, with a semiconductor body
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/02Zone-melting with a solvent, e.g. travelling solvent process
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/34Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies not provided for in groups H01L21/0405, H01L21/0445, H01L21/06, H01L21/16 and H01L21/18 with or without impurities, e.g. doping materials
    • H01L21/40Alloying of impurity materials, e.g. doping materials, electrode materials, with a semiconductor body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76Making of isolation regions between components
    • H01L21/761PN junctions
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/04Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes
    • H01L29/045Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes by their particular orientation of crystalline planes

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Element Separation (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
SE7614705A 1975-12-31 1976-12-29 Sett for migrering av en smelta av metallrikt halvledarmaterial genom en massiv kropp av halvledarmaterialet SE409529B (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/645,672 US4006040A (en) 1975-12-31 1975-12-31 Semiconductor device manufacture

Publications (2)

Publication Number Publication Date
SE7614705L SE7614705L (sv) 1977-07-02
SE409529B true SE409529B (sv) 1979-08-20

Family

ID=24589989

Family Applications (1)

Application Number Title Priority Date Filing Date
SE7614705A SE409529B (sv) 1975-12-31 1976-12-29 Sett for migrering av en smelta av metallrikt halvledarmaterial genom en massiv kropp av halvledarmaterialet

Country Status (7)

Country Link
US (1) US4006040A (sv)
JP (1) JPS5285463A (sv)
DE (1) DE2659303A1 (sv)
FR (1) FR2337423A1 (sv)
GB (1) GB1569777A (sv)
NL (1) NL7614594A (sv)
SE (1) SE409529B (sv)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3998661A (en) * 1975-12-31 1976-12-21 General Electric Company Uniform migration of an annular shaped molten zone through a solid body
US4159916A (en) * 1978-09-13 1979-07-03 General Electric Company Thermal migration of fine lined cross-hatched patterns
US4159213A (en) * 1978-09-13 1979-06-26 General Electric Company Straight, uniform thermalmigration of fine lines
US4160679A (en) * 1978-09-13 1979-07-10 General Electric Company Migration of fine liquid wires by thermal gradient zone melting through doped surfaces
US4170491A (en) * 1978-12-07 1979-10-09 General Electric Company Near-surface thermal gradient enhancement with opaque coatings
US4190467A (en) * 1978-12-15 1980-02-26 Western Electric Co., Inc. Semiconductor device production
US4224594A (en) * 1978-12-22 1980-09-23 General Electric Company Deep diode magnetoresistor
US4466173A (en) * 1981-11-23 1984-08-21 General Electric Company Methods for fabricating vertical channel buried grid field controlled devices including field effect transistors and field controlled thyristors utilizing etch and refill techniques
US5316795A (en) * 1990-05-24 1994-05-31 Houston Advanced Research Center Halogen-assisted chemical vapor deposition of diamond
US5071677A (en) * 1990-05-24 1991-12-10 Houston Advanced Research Center Halogen-assisted chemical vapor deposition of diamond
US5378317A (en) * 1990-10-09 1995-01-03 Chlorine Engineers Corp., Ltd. Method for removing organic film

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2813048A (en) * 1954-06-24 1957-11-12 Bell Telephone Labor Inc Temperature gradient zone-melting
US3910801A (en) * 1973-10-30 1975-10-07 Gen Electric High velocity thermal migration method of making deep diodes
US3899361A (en) * 1973-10-30 1975-08-12 Gen Electric Stabilized droplet method of making deep diodes having uniform electrical properties
US3956023A (en) * 1973-10-30 1976-05-11 General Electric Company Process for making a deep power diode by thermal migration of dopant
US3898106A (en) * 1973-10-30 1975-08-05 Gen Electric High velocity thermomigration method of making deep diodes
US3904442A (en) * 1973-10-30 1975-09-09 Gen Electric Method of making isolation grids in bodies of semiconductor material
US3902925A (en) * 1973-10-30 1975-09-02 Gen Electric Deep diode device and method
US3897277A (en) * 1973-10-30 1975-07-29 Gen Electric High aspect ratio P-N junctions by the thermal gradient zone melting technique
US3899362A (en) * 1973-10-30 1975-08-12 Gen Electric Thermomigration of metal-rich liquid wires through semiconductor materials
US3901736A (en) * 1973-10-30 1975-08-26 Gen Electric Method of making deep diode devices
US3936319A (en) * 1973-10-30 1976-02-03 General Electric Company Solar cell

Also Published As

Publication number Publication date
NL7614594A (nl) 1977-07-04
GB1569777A (en) 1980-06-18
JPS5285463A (en) 1977-07-15
FR2337423A1 (fr) 1977-07-29
US4006040A (en) 1977-02-01
SE7614705L (sv) 1977-07-02
DE2659303A1 (de) 1977-07-14

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