SE362987B - - Google Patents
Info
- Publication number
- SE362987B SE362987B SE14536/69A SE1453669A SE362987B SE 362987 B SE362987 B SE 362987B SE 14536/69 A SE14536/69 A SE 14536/69A SE 1453669 A SE1453669 A SE 1453669A SE 362987 B SE362987 B SE 362987B
- Authority
- SE
- Sweden
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D3/00—Control of position or direction
- G05D3/12—Control of position or direction using feedback
- G05D3/20—Control of position or direction using feedback using a digital comparing device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
- H01J37/3045—Object or beam position registration
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
- H10P72/53—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment using optical controlling means
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR171342 | 1968-10-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SE362987B true SE362987B (https=) | 1973-12-27 |
Family
ID=8656116
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SE14536/69A SE362987B (https=) | 1968-10-25 | 1969-10-23 |
Country Status (4)
| Country | Link |
|---|---|
| DE (1) | DE1953712C3 (https=) |
| FR (1) | FR1587573A (https=) |
| GB (1) | GB1275577A (https=) |
| SE (1) | SE362987B (https=) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL8204450A (nl) * | 1982-11-17 | 1984-06-18 | Philips Nv | Verplaatsingsinrichting, in het bijzonder voor het stralingslithografisch behandelen van een substraat. |
| JPS59129633A (ja) * | 1983-01-08 | 1984-07-26 | Canon Inc | ステージ装置 |
| US5140242A (en) * | 1990-04-30 | 1992-08-18 | International Business Machines Corporation | Servo guided stage system |
| DE59309256D1 (de) * | 1992-11-16 | 1999-02-11 | Winterhalter Gastronom Gmbh | Geschirrspülmaschine |
| US7298495B2 (en) | 2005-06-23 | 2007-11-20 | Lewis George C | System and method for positioning an object through use of a rotating laser metrology system |
| CN107665827B (zh) * | 2016-07-29 | 2020-01-24 | 上海微电子装备（集团）股份有限公司 | 芯片键合装置和方法 |
-
1968
- 1968-10-25 FR FR171342A patent/FR1587573A/fr not_active Expired
-
1969
- 1969-10-17 GB GB51226/69A patent/GB1275577A/en not_active Expired
- 1969-10-23 SE SE14536/69A patent/SE362987B/xx unknown
- 1969-10-24 DE DE1953712A patent/DE1953712C3/de not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB1275577A (en) | 1972-05-24 |
| DE1953712B2 (de) | 1979-09-06 |
| FR1587573A (https=) | 1970-03-20 |
| DE1953712A1 (de) | 1970-06-18 |
| DE1953712C3 (de) | 1980-06-26 |