SE349874B - - Google Patents

Info

Publication number
SE349874B
SE349874B SE918569A SE918569A SE349874B SE 349874 B SE349874 B SE 349874B SE 918569 A SE918569 A SE 918569A SE 918569 A SE918569 A SE 918569A SE 349874 B SE349874 B SE 349874B
Authority
SE
Sweden
Application number
SE918569A
Inventor
M Sullivan
R Kervin
W Sinclair
Original Assignee
Western Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co filed Critical Western Electric Co
Publication of SE349874B publication Critical patent/SE349874B/xx

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54Absorbers, e.g. of opaque materials

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
SE918569A 1968-07-03 1969-06-27 SE349874B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US74220368A 1968-07-03 1968-07-03

Publications (1)

Publication Number Publication Date
SE349874B true SE349874B (en) 1972-10-09

Family

ID=24983884

Family Applications (1)

Application Number Title Priority Date Filing Date
SE918569A SE349874B (en) 1968-07-03 1969-06-27

Country Status (7)

Country Link
JP (1) JPS4919902B1 (en)
BE (1) BE735518A (en)
DE (1) DE1933034B2 (en)
FR (1) FR2012223A1 (en)
GB (1) GB1277037A (en)
NL (1) NL144090B (en)
SE (1) SE349874B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3815978A (en) * 1972-06-20 1974-06-11 Ibm Durable see-through photoresist mask

Also Published As

Publication number Publication date
FR2012223A1 (en) 1970-03-13
DE1933034A1 (en) 1970-02-05
BE735518A (en) 1969-12-16
DE1933034B2 (en) 1971-06-24
JPS4919902B1 (en) 1974-05-21
NL6909925A (en) 1970-01-06
NL144090B (en) 1974-11-15
GB1277037A (en) 1972-06-07

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