SE332665B - - Google Patents

Info

Publication number
SE332665B
SE332665B SE13237/66A SE1323766A SE332665B SE 332665 B SE332665 B SE 332665B SE 13237/66 A SE13237/66 A SE 13237/66A SE 1323766 A SE1323766 A SE 1323766A SE 332665 B SE332665 B SE 332665B
Authority
SE
Sweden
Application number
SE13237/66A
Inventor
K Kreiselmaier
D Marek
J Tassel
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of SE332665B publication Critical patent/SE332665B/xx

Links

Classifications

    • H10W74/43—
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/10—Glass or silica
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • H10W20/40—

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physical Vapour Deposition (AREA)
  • Hall/Mr Elements (AREA)
SE13237/66A 1965-10-01 1966-09-30 SE332665B (cg-RX-API-DMAC10.html)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US49233965A 1965-10-01 1965-10-01

Publications (1)

Publication Number Publication Date
SE332665B true SE332665B (cg-RX-API-DMAC10.html) 1971-02-15

Family

ID=23955878

Family Applications (1)

Application Number Title Priority Date Filing Date
SE13237/66A SE332665B (cg-RX-API-DMAC10.html) 1965-10-01 1966-09-30

Country Status (6)

Country Link
US (1) USB492339I5 (cg-RX-API-DMAC10.html)
CH (1) CH464303A (cg-RX-API-DMAC10.html)
DE (1) DE1590750B1 (cg-RX-API-DMAC10.html)
GB (1) GB1146754A (cg-RX-API-DMAC10.html)
NL (1) NL6613837A (cg-RX-API-DMAC10.html)
SE (1) SE332665B (cg-RX-API-DMAC10.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8624637D0 (en) * 1986-10-14 1986-11-19 Emi Plc Thorn Electrical device

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB315354A (en) * 1928-07-12 1930-09-18 Telefunken Gmbh Improvements in or relating to electric insulating material
DE596124C (de) * 1930-01-16 1934-04-27 Telefunken Gmbh Elektrischer Apparat, bei welchem die sich erhitzenden Teile in ein hauptsaechlich aus Quarz bestehendes Isoliermaterial eingebettet sind
GB393562A (en) * 1930-09-01 1933-06-08 Gen Electric Improvements in and relating to methods of fusing high dielectrics
NL273920A (cg-RX-API-DMAC10.html) * 1961-01-25

Also Published As

Publication number Publication date
GB1146754A (en) 1969-03-26
CH464303A (de) 1968-10-31
NL6613837A (cg-RX-API-DMAC10.html) 1967-04-03
DE1590750B1 (de) 1971-04-22
USB492339I5 (cg-RX-API-DMAC10.html)

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