SE326354B - - Google Patents
Info
- Publication number
- SE326354B SE326354B SE16874/65A SE1687465A SE326354B SE 326354 B SE326354 B SE 326354B SE 16874/65 A SE16874/65 A SE 16874/65A SE 1687465 A SE1687465 A SE 1687465A SE 326354 B SE326354 B SE 326354B
- Authority
- SE
- Sweden
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N15/08—Investigating permeability, pore-volume, or surface area of porous materials
- G01N15/088—Investigating volume, surface area, size or distribution of pores; Porosimetry
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US422677A US3330752A (en) | 1964-12-31 | 1964-12-31 | Method and apparatus for cathode sputtering including suppressing temperature rise adjacent the anode using a localized magnetic field |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SE326354B true SE326354B (en) | 1970-07-20 |
Family
ID=23675890
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SE16874/65A SE326354B (en) | 1964-12-31 | 1965-12-29 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3330752A (en) |
| FR (1) | FR1459625A (en) |
| GB (2) | GB1111910A (en) |
| NL (1) | NL6516538A (en) |
| SE (1) | SE326354B (en) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3467057A (en) * | 1966-07-27 | 1969-09-16 | Hitachi Ltd | Electron beam evaporator |
| US3889019A (en) * | 1969-03-13 | 1975-06-10 | United Aircraft Corp | Vapor randomization in vacuum deposition of coatings |
| US4013539A (en) * | 1973-01-12 | 1977-03-22 | Coulter Information Systems, Inc. | Thin film deposition apparatus |
| US3977955A (en) * | 1974-05-10 | 1976-08-31 | Bell Telephone Laboratories, Incorporated | Method for cathodic sputtering including suppressing temperature rise |
| US4025410A (en) * | 1975-08-25 | 1977-05-24 | Western Electric Company, Inc. | Sputtering apparatus and methods using a magnetic field |
| CA1159012A (en) * | 1980-05-02 | 1983-12-20 | Seitaro Matsuo | Plasma deposition apparatus |
| DE3030374C2 (en) * | 1980-08-11 | 1983-11-10 | Harro Prof. Dr. 5900 Siegen Lentz | Mercury porosimeter |
| NL8202092A (en) * | 1982-05-21 | 1983-12-16 | Philips Nv | MICROWAVE CATHODES SPUTTER SYSTEM. |
| CH668565A5 (en) * | 1986-06-23 | 1989-01-13 | Balzers Hochvakuum | METHOD AND ARRANGEMENT FOR SPRAYING A MATERIAL AT HIGH FREQUENCY. |
| US4778561A (en) * | 1987-10-30 | 1988-10-18 | Veeco Instruments, Inc. | Electron cyclotron resonance plasma source |
| JP2673807B2 (en) * | 1987-10-30 | 1997-11-05 | パイオニア株式会社 | Method for manufacturing magneto-optical recording medium |
| DE4022708A1 (en) * | 1990-07-17 | 1992-04-02 | Balzers Hochvakuum | ETCHING OR COATING PLANTS |
| DE4042417C2 (en) * | 1990-07-17 | 1993-11-25 | Balzers Hochvakuum | Etching or coating system and method for igniting or intermittent operation |
| RU2527656C2 (en) * | 2012-07-25 | 2014-09-10 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Тамбовский государственный технический университет" ФГБО ВПО ТГТУ | Method of measuring porosity of particles of bulk materials |
| CN109470618B (en) * | 2018-11-19 | 2021-12-17 | 莆田市荔城区任西贸易有限公司 | Adopt magnetic force to convert concrete impermeability appearance of negative pressure actuation into |
| CN110987759A (en) * | 2019-12-11 | 2020-04-10 | 东南大学 | Device and method for testing porosity of porous material by using gas |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2754259A (en) * | 1952-11-29 | 1956-07-10 | Sprague Electric Co | Process and apparatus for growing single crystals |
| US3077444A (en) * | 1956-06-13 | 1963-02-12 | Siegfried R Hoh | Laminated magnetic materials and methods |
| US3117065A (en) * | 1959-09-02 | 1964-01-07 | Magnetic Film And Tape Company | Method and apparatus for making magnetic recording tape |
| US3133874A (en) * | 1960-12-05 | 1964-05-19 | Robert W Morris | Production of thin film metallic patterns |
| US3170810A (en) * | 1962-05-24 | 1965-02-23 | Western Electric Co | Methods of and apparatus for forming substances on preselected areas of substrates |
-
1964
- 1964-12-31 US US422677A patent/US3330752A/en not_active Expired - Lifetime
-
1965
- 1965-12-15 FR FR42302A patent/FR1459625A/en not_active Expired
- 1965-12-20 GB GB53862/65A patent/GB1111910A/en not_active Expired
- 1965-12-20 NL NL6516538A patent/NL6516538A/xx unknown
- 1965-12-29 SE SE16874/65A patent/SE326354B/xx unknown
-
1967
- 1967-03-20 GB GB12862/67A patent/GB1111410A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| NL6516538A (en) | 1966-07-04 |
| GB1111910A (en) | 1968-05-01 |
| GB1111410A (en) | 1968-04-24 |
| FR1459625A (en) | 1966-11-18 |
| US3330752A (en) | 1967-07-11 |