SE317235B - - Google Patents
Info
- Publication number
- SE317235B SE317235B SE11018/65A SE1101865A SE317235B SE 317235 B SE317235 B SE 317235B SE 11018/65 A SE11018/65 A SE 11018/65A SE 1101865 A SE1101865 A SE 1101865A SE 317235 B SE317235 B SE 317235B
- Authority
- SE
- Sweden
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AT736264A AT258664B (en) | 1964-08-25 | 1964-08-25 | Device for producing and / or breaking down layers by means of electrical gas discharges |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SE317235B true SE317235B (en) | 1969-11-10 |
Family
ID=3595287
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SE11018/65A SE317235B (en) | 1964-08-25 | 1965-08-24 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US3736246A (en) |
| AT (1) | AT258664B (en) |
| DE (1) | DE1515297C3 (en) |
| GB (1) | GB1125444A (en) |
| NL (1) | NL6511079A (en) |
| SE (1) | SE317235B (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3894926A (en) * | 1973-02-09 | 1975-07-15 | Lee Jau Yien | In-out transporter for an enclosed chamber |
| US3956093A (en) * | 1974-12-16 | 1976-05-11 | Airco, Inc. | Planar magnetron sputtering method and apparatus |
| FR2371524A1 (en) * | 1976-11-18 | 1978-06-16 | Alsthom Atlantique | PROCESS FOR DEPOSITING A THIN LAYER BY DECOMPOSITION OF A GAS IN A PLASMA |
| US4265991A (en) | 1977-12-22 | 1981-05-05 | Canon Kabushiki Kaisha | Electrophotographic photosensitive member and process for production thereof |
| US4151064A (en) * | 1977-12-27 | 1979-04-24 | Coulter Stork U.S.A., Inc. | Apparatus for sputtering cylinders |
| DE3331707A1 (en) * | 1983-09-02 | 1985-03-21 | Leybold-Heraeus GmbH, 5000 Köln | METHOD AND DEVICE FOR REACTIVELY SPRAYING CONNECTIONS FROM METALS AND SEMICONDUCTORS |
| DE3347036C2 (en) * | 1983-12-24 | 1986-04-24 | Fr. Kammerer GmbH, 7530 Pforzheim | Process for coating substrates with metals |
-
1964
- 1964-08-25 AT AT736264A patent/AT258664B/en active
-
1965
- 1965-01-09 DE DE1515297A patent/DE1515297C3/en not_active Expired
- 1965-08-24 SE SE11018/65A patent/SE317235B/xx unknown
- 1965-08-25 NL NL6511079A patent/NL6511079A/xx unknown
- 1965-08-25 GB GB36586/65A patent/GB1125444A/en not_active Expired
-
1971
- 1971-11-04 US US00195792A patent/US3736246A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| DE1515297A1 (en) | 1969-06-12 |
| NL6511079A (en) | 1966-02-28 |
| US3736246A (en) | 1973-05-29 |
| DE1515297B2 (en) | 1978-12-07 |
| GB1125444A (en) | 1968-08-28 |
| DE1515297C3 (en) | 1979-08-02 |
| AT258664B (en) | 1967-12-11 |