SE311766B - - Google Patents
Info
- Publication number
- SE311766B SE311766B SE335866A SE335866A SE311766B SE 311766 B SE311766 B SE 311766B SE 335866 A SE335866 A SE 335866A SE 335866 A SE335866 A SE 335866A SE 311766 B SE311766 B SE 311766B
- Authority
- SE
- Sweden
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/08—Catadioptric systems
- G02B17/0804—Catadioptric systems using two curved mirrors
- G02B17/0808—Catadioptric systems using two curved mirrors on-axis systems with at least one of the mirrors having a central aperture
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/008—Systems specially adapted to form image relays or chained systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/08—Catadioptric systems
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Lenses (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL6503242A NL6503242A (ko) | 1965-03-15 | 1965-03-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SE311766B true SE311766B (ko) | 1969-06-23 |
Family
ID=19792657
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SE335866A SE311766B (ko) | 1965-03-15 | 1966-03-14 |
Country Status (5)
| Country | Link |
|---|---|
| CH (1) | CH436765A (ko) |
| DE (1) | DE1275304B (ko) |
| GB (1) | GB1095078A (ko) |
| NL (1) | NL6503242A (ko) |
| SE (1) | SE311766B (ko) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2148017B (en) * | 1981-05-15 | 1986-04-09 | Gen Signal Corp | Apparatus for projecting a series of images onto dies of a semiconductor wafer |
| US4391494A (en) * | 1981-05-15 | 1983-07-05 | General Signal Corporation | Apparatus for projecting a series of images onto dies of a semiconductor wafer |
| US5298939A (en) * | 1991-11-04 | 1994-03-29 | Swanson Paul A | Method and apparatus for transfer of a reticle pattern onto a substrate by scanning |
| US5883703A (en) * | 1996-02-08 | 1999-03-16 | Megapanel Corporation | Methods and apparatus for detecting and compensating for focus errors in a photolithography tool |
| FI20095065A0 (fi) * | 2009-01-26 | 2009-01-26 | Wallac Oy | Yhdistetty linssi ja heijastin sekä sitä käyttävä optinen laite |
-
1965
- 1965-03-15 NL NL6503242A patent/NL6503242A/xx unknown
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1966
- 1966-03-09 CH CH339066A patent/CH436765A/de unknown
- 1966-03-09 GB GB1042566A patent/GB1095078A/en not_active Expired
- 1966-03-14 SE SE335866A patent/SE311766B/xx unknown
- 1966-03-15 DE DEN28212A patent/DE1275304B/de active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| DE1275304B (de) | 1968-08-14 |
| CH436765A (de) | 1967-05-31 |
| NL6503242A (ko) | 1966-09-16 |
| GB1095078A (en) | 1967-12-13 |