SE306077B - - Google Patents

Info

Publication number
SE306077B
SE306077B SE1129761A SE1129761A SE306077B SE 306077 B SE306077 B SE 306077B SE 1129761 A SE1129761 A SE 1129761A SE 1129761 A SE1129761 A SE 1129761A SE 306077 B SE306077 B SE 306077B
Authority
SE
Sweden
Application number
SE1129761A
Inventor
E Sirtl
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DES71249A external-priority patent/DE1147567B/en
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of SE306077B publication Critical patent/SE306077B/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02518Deposited layers
    • H01L21/02521Materials
    • H01L21/02524Group 14 semiconducting materials
    • H01L21/02532Silicon, silicon germanium, germanium
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02518Deposited layers
    • H01L21/0257Doping during depositing
    • H01L21/02573Conductivity type
    • H01L21/02579P-type
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02612Formation types
    • H01L21/02617Deposition types
    • H01L21/0262Reduction or decomposition of gaseous compounds, e.g. CVD
SE1129761A 1960-11-14 1961-11-13 SE306077B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES71249A DE1147567B (en) 1960-01-15 1960-11-14 Process for obtaining, in particular, single-crystal, semiconducting silicon

Publications (1)

Publication Number Publication Date
SE306077B true SE306077B (en) 1968-11-18

Family

ID=7502338

Family Applications (1)

Application Number Title Priority Date Filing Date
SE1129761A SE306077B (en) 1960-11-14 1961-11-13

Country Status (3)

Country Link
BE (1) BE610281A (en)
CH (1) CH464864A (en)
SE (1) SE306077B (en)

Also Published As

Publication number Publication date
BE610281A (en) 1962-03-01
CH464864A (en) 1968-11-15

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