SE0201917L - Sätt att framställa formverktyg för ett reliefmönster i nanoskala, formverktyg och lagringsmedium - Google Patents

Sätt att framställa formverktyg för ett reliefmönster i nanoskala, formverktyg och lagringsmedium

Info

Publication number
SE0201917L
SE0201917L SE0201917A SE0201917A SE0201917L SE 0201917 L SE0201917 L SE 0201917L SE 0201917 A SE0201917 A SE 0201917A SE 0201917 A SE0201917 A SE 0201917A SE 0201917 L SE0201917 L SE 0201917L
Authority
SE
Sweden
Prior art keywords
molding tools
storage medium
nanoscale
methods
relief pattern
Prior art date
Application number
SE0201917A
Other languages
English (en)
Swedish (sv)
Other versions
SE523095C2 (sv
SE0201917D0 (sv
Inventor
Torbjoern Ling
Lars Montelius
Matthias Keil
Marc Beck
Original Assignee
Obducat Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Obducat Ab filed Critical Obducat Ab
Priority to SE0201917A priority Critical patent/SE523095C2/sv
Publication of SE0201917D0 publication Critical patent/SE0201917D0/xx
Priority to AT03733741T priority patent/ATE346752T1/de
Priority to PCT/SE2003/001004 priority patent/WO2004000567A1/en
Priority to AU2003239022A priority patent/AU2003239022A1/en
Priority to JP2004515304A priority patent/JP3892460B2/ja
Priority to US10/518,475 priority patent/US7687007B2/en
Priority to DE60310070T priority patent/DE60310070T2/de
Priority to CNB038141213A priority patent/CN100341712C/zh
Priority to EP03733741A priority patent/EP1513688B1/en
Publication of SE0201917L publication Critical patent/SE0201917L/xx
Publication of SE523095C2 publication Critical patent/SE523095C2/sv

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/56—Coatings, e.g. enameled or galvanised; Releasing, lubricating or separating agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/42—Moulds or cores; Details thereof or accessories therefor characterised by the shape of the moulding surface, e.g. ribs or grooves
    • B29C33/424—Moulding surfaces provided with means for marking or patterning

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Mechanical Engineering (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
SE0201917A 2002-06-20 2002-06-20 Sätt att framställa formverktyg för ett reliefmönster i nanoskala, formverktyg och lagringsmedium SE523095C2 (sv)

Priority Applications (9)

Application Number Priority Date Filing Date Title
SE0201917A SE523095C2 (sv) 2002-06-20 2002-06-20 Sätt att framställa formverktyg för ett reliefmönster i nanoskala, formverktyg och lagringsmedium
EP03733741A EP1513688B1 (en) 2002-06-20 2003-06-16 Mold tool method of manufacturing a mold tool and storage medium formed by use of the mold tool
JP2004515304A JP3892460B2 (ja) 2002-06-20 2003-06-16 成形工具を製造するための方法およびその成形工具を用いて形成された記憶媒体
PCT/SE2003/001004 WO2004000567A1 (en) 2002-06-20 2003-06-16 Mold tool method of manufacturing a mold tool and storage medium formed by use of the mold tool
AU2003239022A AU2003239022A1 (en) 2002-06-20 2003-06-16 Mold tool method of manufacturing a mold tool and storage medium formed by use of the mold tool
AT03733741T ATE346752T1 (de) 2002-06-20 2003-06-16 Formwerkzeug, verfahren zur herstellung eines formwerkzeugs und durch verwendung des formwerkzeugs gebildetes speichermedium
US10/518,475 US7687007B2 (en) 2002-06-20 2003-06-16 Mold for nano imprinting
DE60310070T DE60310070T2 (de) 2002-06-20 2003-06-16 Formwerkzeug, verfahren zur herstellung eines formwerkzeugs und durch verwendung des formwerkzeugs gebildetes speichermedium
CNB038141213A CN100341712C (zh) 2002-06-20 2003-06-16 模型工具制造方法及模型工具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE0201917A SE523095C2 (sv) 2002-06-20 2002-06-20 Sätt att framställa formverktyg för ett reliefmönster i nanoskala, formverktyg och lagringsmedium

Publications (3)

Publication Number Publication Date
SE0201917D0 SE0201917D0 (sv) 2002-06-20
SE0201917L true SE0201917L (sv) 2003-12-21
SE523095C2 SE523095C2 (sv) 2004-03-30

Family

ID=20288275

Family Applications (1)

Application Number Title Priority Date Filing Date
SE0201917A SE523095C2 (sv) 2002-06-20 2002-06-20 Sätt att framställa formverktyg för ett reliefmönster i nanoskala, formverktyg och lagringsmedium

Country Status (1)

Country Link
SE (1) SE523095C2 (xx)

Also Published As

Publication number Publication date
SE523095C2 (sv) 2004-03-30
SE0201917D0 (sv) 2002-06-20

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Legal Events

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