SE0103006D0 - Homogenization of a spatially coherent radiation beam and reading / writing of a pattern on a workpiece - Google Patents
Homogenization of a spatially coherent radiation beam and reading / writing of a pattern on a workpieceInfo
- Publication number
- SE0103006D0 SE0103006D0 SE0103006A SE0103006A SE0103006D0 SE 0103006 D0 SE0103006 D0 SE 0103006D0 SE 0103006 A SE0103006 A SE 0103006A SE 0103006 A SE0103006 A SE 0103006A SE 0103006 D0 SE0103006 D0 SE 0103006D0
- Authority
- SE
- Sweden
- Prior art keywords
- radiation beam
- spatially coherent
- homogenization
- workpiece
- writing
- Prior art date
Links
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The present invention relates to a device for homogenizing the spatial intensity distribution of a spatially coherent radiation beam (11). The device includes a grating (13) arranged in the propagation path of said spatially coherent radiation beam for diffracting said coherent beam and thus decreasing the coherence length of a diffracted radiation beam in a direction orthogonal to the propagation direction of the radiation beam relative to the width of the radiation beam in said orthogonal direction; and a radiation splitting and directing arrangement (15, 17, 19) arranged in the propagation path of said diffracted radiation beam for splitting said diffracted radiation beam into spatially separated portions and for superimposing said spatially separated portions to thereby form a radiation beam having a homogenized spatial intensity distribution.
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE0103006A SE0103006D0 (en) | 2001-09-10 | 2001-09-10 | Homogenization of a spatially coherent radiation beam and reading / writing of a pattern on a workpiece |
JP2003527781A JP2005503018A (en) | 2001-09-10 | 2002-09-09 | Spatial coherent beam equalization and pattern printing and inspection on the workpiece |
EP02768252A EP1425783A1 (en) | 2001-09-10 | 2002-09-09 | Homogenization of a spatially coherent radiation beam and printing and inspection, respectively, of a pattern on a workpiece |
PCT/SE2002/001607 WO2003023833A1 (en) | 2001-09-10 | 2002-09-09 | Homogenization of a spatially coherent radiation beam and printing and inspection, respectively, of a pattern on a workpiece |
US10/238,177 US6819490B2 (en) | 2001-09-10 | 2002-09-10 | Homogenization of a spatially coherent radiation beam and printing and inspection, respectively, of a pattern on a workpiece |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE0103006A SE0103006D0 (en) | 2001-09-10 | 2001-09-10 | Homogenization of a spatially coherent radiation beam and reading / writing of a pattern on a workpiece |
Publications (1)
Publication Number | Publication Date |
---|---|
SE0103006D0 true SE0103006D0 (en) | 2001-09-10 |
Family
ID=20285284
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE0103006A SE0103006D0 (en) | 2001-09-10 | 2001-09-10 | Homogenization of a spatially coherent radiation beam and reading / writing of a pattern on a workpiece |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP1425783A1 (en) |
JP (1) | JP2005503018A (en) |
SE (1) | SE0103006D0 (en) |
WO (1) | WO2003023833A1 (en) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4541010B2 (en) * | 2004-03-25 | 2010-09-08 | 財団法人国際科学振興財団 | Pattern exposure apparatus and two-dimensional optical image generation apparatus |
EP1828845A2 (en) | 2004-12-01 | 2007-09-05 | Carl Zeiss SMT AG | Projection exposure system, beam delivery system and method of generating a beam of light |
US20070127005A1 (en) * | 2005-12-02 | 2007-06-07 | Asml Holding N.V. | Illumination system |
DE102006035068A1 (en) * | 2006-07-28 | 2008-01-31 | Carl Zeiss Sms Gmbh | Coherence reducer for e.g. microscope illumination, has lenses arranged in array, where normals of reference and array levels lie in level that intersects array level in array straight line |
US8451427B2 (en) | 2007-09-14 | 2013-05-28 | Nikon Corporation | Illumination optical system, exposure apparatus, optical element and manufacturing method thereof, and device manufacturing method |
JP5267029B2 (en) | 2007-10-12 | 2013-08-21 | 株式会社ニコン | Illumination optical apparatus, exposure apparatus, and device manufacturing method |
CN101681123B (en) | 2007-10-16 | 2013-06-12 | 株式会社尼康 | Illumination optical system, exposure apparatus, and device manufacturing method |
US8379187B2 (en) | 2007-10-24 | 2013-02-19 | Nikon Corporation | Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method |
US9116346B2 (en) | 2007-11-06 | 2015-08-25 | Nikon Corporation | Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method |
DE102008054582A1 (en) * | 2007-12-21 | 2009-07-09 | Carl Zeiss Smt Ag | Microlithographic projection exposure machine |
WO2009145048A1 (en) | 2008-05-28 | 2009-12-03 | 株式会社ニコン | Inspection device and inspecting method for spatial light modulator, illuminating optical system, method for adjusting the illuminating optical system, exposure device, and device manufacturing method |
US8823921B2 (en) * | 2011-08-19 | 2014-09-02 | Ultratech, Inc. | Programmable illuminator for a photolithography system |
US11333897B2 (en) * | 2019-03-12 | 2022-05-17 | Coherent Lasersystems Gmbh & Co. Kg | Apparatus for forming a homogeneous intensity distribution with bright or dark edges |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6072631A (en) * | 1998-07-09 | 2000-06-06 | 3M Innovative Properties Company | Diffractive homogenizer with compensation for spatial coherence |
JP4345127B2 (en) * | 1999-03-18 | 2009-10-14 | ソニー株式会社 | Lighting device and lighting method |
JP2001148345A (en) * | 1999-09-10 | 2001-05-29 | Nikon Corp | Illuminating optical system, method and apparatus for exposing by using the system |
-
2001
- 2001-09-10 SE SE0103006A patent/SE0103006D0/en unknown
-
2002
- 2002-09-09 EP EP02768252A patent/EP1425783A1/en not_active Ceased
- 2002-09-09 JP JP2003527781A patent/JP2005503018A/en active Pending
- 2002-09-09 WO PCT/SE2002/001607 patent/WO2003023833A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
EP1425783A1 (en) | 2004-06-09 |
WO2003023833A1 (en) | 2003-03-20 |
JP2005503018A (en) | 2005-01-27 |
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