RU98121155A - METHOD FOR PRODUCING RESISTORS IN IP - Google Patents
METHOD FOR PRODUCING RESISTORS IN IPInfo
- Publication number
- RU98121155A RU98121155A RU98121155/28A RU98121155A RU98121155A RU 98121155 A RU98121155 A RU 98121155A RU 98121155/28 A RU98121155/28 A RU 98121155/28A RU 98121155 A RU98121155 A RU 98121155A RU 98121155 A RU98121155 A RU 98121155A
- Authority
- RU
- Russia
- Prior art keywords
- resistors
- amorphous silicon
- layer
- temperature
- silicon layer
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title claims 2
- 229910021417 amorphous silicon Inorganic materials 0.000 claims 4
- 230000015572 biosynthetic process Effects 0.000 claims 2
- 238000005755 formation reaction Methods 0.000 claims 2
- 238000000137 annealing Methods 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
RU98121155A RU2170474C2 (en) | 1998-11-23 | 1998-11-23 | Method for producing resistors in integrated circuits |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
RU98121155A RU2170474C2 (en) | 1998-11-23 | 1998-11-23 | Method for producing resistors in integrated circuits |
Publications (2)
Publication Number | Publication Date |
---|---|
RU98121155A true RU98121155A (en) | 2000-08-27 |
RU2170474C2 RU2170474C2 (en) | 2001-07-10 |
Family
ID=20212607
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
RU98121155A RU2170474C2 (en) | 1998-11-23 | 1998-11-23 | Method for producing resistors in integrated circuits |
Country Status (1)
Country | Link |
---|---|
RU (1) | RU2170474C2 (en) |
-
1998
- 1998-11-23 RU RU98121155A patent/RU2170474C2/en active
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