RU98102125A - METHOD FOR PRODUCING TIN OXIDE COATING ON GLASS - Google Patents

METHOD FOR PRODUCING TIN OXIDE COATING ON GLASS

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Publication number
RU98102125A
RU98102125A RU98102125/02A RU98102125A RU98102125A RU 98102125 A RU98102125 A RU 98102125A RU 98102125/02 A RU98102125/02 A RU 98102125/02A RU 98102125 A RU98102125 A RU 98102125A RU 98102125 A RU98102125 A RU 98102125A
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RU
Russia
Prior art keywords
glass substrate
tin oxide
reagents
mixture
hot glass
Prior art date
Application number
RU98102125/02A
Other languages
Russian (ru)
Other versions
RU2194089C2 (en
Inventor
Саубейрэнд Мишел
Хэллайвелл Антони
Original Assignee
Либби-Оуэнс-Форд Ко.
Пилкингтон Плс
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Priority claimed from US08/642,921 external-priority patent/US5698262A/en
Application filed by Либби-Оуэнс-Форд Ко., Пилкингтон Плс filed Critical Либби-Оуэнс-Форд Ко.
Publication of RU98102125A publication Critical patent/RU98102125A/en
Application granted granted Critical
Publication of RU2194089C2 publication Critical patent/RU2194089C2/en

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Claims (19)

1. Способ химического осаждения из паровой фазы для нанесения покрытия из оксида олова, легированного фтором, на поверхность горячей стеклянной подложки, предусматривающий а) получение горячей стеклянной подложки, на поверхность которой необходимо нанести легированное фтором оловооксидное покрытие, б) приготовление однородной смеси испаренных реагентов, содержащей оловоорганическое соединение, фторид водорода, кислород и воду, и в) подачу смеси испаренных реагентов к поверхности горячей стеклянной подложки; причем в этой однородной смеси испаренных реагентов протекает реакция с осаждением на поверхности горячей стеклянной подложки легированного фтором оловооксидного покрытия.1. A method of chemical vapor deposition for coating fluorine doped tin oxide on a surface of a hot glass substrate, comprising a) producing a hot glass substrate on the surface of which a fluorine doped tin oxide coating must be applied, b) preparing a uniform mixture of evaporated reagents, containing an organotin compound, hydrogen fluoride, oxygen and water, and c) supplying a mixture of vaporized reactants to the surface of a hot glass substrate; moreover, in this homogeneous mixture of evaporated reagents, a reaction proceeds with the deposition of a tin oxide coating doped with fluorine on the surface of a hot glass substrate. 2. Способ по п. 1, где стекло выбирают из группы, включающей натриево-кальциевое силикатное стекло, щелочно-кальциевое силикатное стекло, боросиликатное стекло, алюмосиликатное стекло, фосфатное стекло, кварцевое стекло и их сочетания. 2. The method of claim 1, wherein the glass is selected from the group consisting of sodium-calcium silicate glass, alkaline-calcium silicate glass, borosilicate glass, aluminosilicate glass, phosphate glass, silica glass, and combinations thereof. 3. Способ по п. 1, где стекло представляет собой натриево-кальциевое силикатное стекло. 3. The method according to p. 1, where the glass is a sodium-calcium silicate glass. 4. Способ по п. 1, где оловоорганическое соединение выбирают из группы, включающей диметилоловодихлорид, диэтилоловодихлорид, дибутилоловодиацетат, тетраметилолово, метилоловотрихлорид, триэтилоловохлорид, триметилоловохлорид, этилоловотрихлорид, пропилоловотрихлорид, изопропилоловотрихлорид, втор-бутилоловотрихлорид, трет-бутилоловотрихлорид, фенилоловотрихлорид, карбэтоксиэтилоловотрихлорид и их сочетания. 4. A method according to Claim. 1 wherein the organotin compound is selected from the group consisting of dimethyltin dichloride, dietilolovodihlorid, dibutyltin diacetate, tetramethyl tin, metilolovotrihlorid, trietilolovohlorid, trimethyltin chloride, etilolovotrihlorid, propilolovotrihlorid, izopropilolovotrihlorid, sec-butilolovotrihlorid, tert-butilolovotrihlorid, fenilolovotrihlorid, and combinations thereof karbetoksietilolovotrihlorid . 5. Способ по п. 1, где оловоорганическое соединение представляет собой диметилоловодихлорид. 5. The method of claim 1, wherein the organotin compound is dimethyltin dichloride. 6. Способ по п. 1, где стеклянную подложку обрабатывают при температуре от примерно 750 до примерно 1500° F. 6. The method of claim 1, wherein the glass substrate is treated at a temperature of from about 750 to about 1,500 ° F. 7. Способ по п. 1, где однородная испаренная смесь реагентов дополнительно включает одно или несколько соединений, выбранных из группы, включающей гелий, азот, аргон и оксид трехвалентного азота. 7. The method according to p. 1, where the homogeneous vaporized mixture of reagents further includes one or more compounds selected from the group comprising helium, nitrogen, argon and trivalent nitric oxide. 8. Способ по п. 1, далее включающий осаждение на поверхность горячей стеклянной подложки слоя материала, который действует как натрийдиффузионный барьер, таким образом, что этот материал находится между этими поверхностью стеклянной подложки и легированным фтором оловооксидным покрытием. 8. The method according to claim 1, further comprising depositing on the surface of the hot glass substrate a layer of material that acts as a sodium diffusion barrier, so that this material is between the surface of the glass substrate and the fluorine-doped tin oxide coating. 9. Способ по п. 8, где перед нанесением легированного фтором оловооксидного покрытия на поверхность горячей стеклянной подложки наносят слой диоксида кремния. 9. The method according to p. 8, where before applying the fluorine-doped tin oxide coating on the surface of the hot glass substrate, a layer of silicon dioxide is applied. 10. Способ по п. 9, где слой диоксида кремния наносят на поверхность горячей стеклянной подложки по методу химического осаждения из паровой фазы. 10. The method according to p. 9, where the layer of silicon dioxide is applied to the surface of a hot glass substrate by the method of chemical vapor deposition. 11. Способ по п. 9, где перед нанесением слоя диоксида кремния на поверхность горячей стеклянной подложки наносят слой оксида олова. 11. The method according to p. 9, where before applying a layer of silicon dioxide on the surface of a hot glass substrate, a layer of tin oxide is applied. 12. Способ по п. 1, где газообразная смесь реагентов включает от примерно 0,2 до примерно 2 мол.% фторида водорода. 12. The method according to p. 1, where the gaseous mixture of reagents includes from about 0.2 to about 2 mol.% Hydrogen fluoride. 13. Способ по п. 2, где газообразная смесь реагентов включает от примерно 0,5 до примерно 1,5 мол.% фторида водорода. 13. The method according to p. 2, where the gaseous mixture of reagents includes from about 0.5 to about 1.5 mol.% Hydrogen fluoride. 14. Способ по п. 1, где газообразная смесь реагентов включает от примерно 2 до примерно 50 мол.% воды. 14. The method according to p. 1, where the gaseous mixture of reagents includes from about 2 to about 50 mol.% Water. 15. Способ по п. 14, где газообразная смесь реагентов включает от примерно 15 до примерно 35 мол.% воды. 15. The method according to p. 14, where the gaseous mixture of reagents includes from about 15 to about 35 mol.% Water. 16. Способ по п. 1, где газообразная смесь реагентов включает от примерно 10 до примерно 60 мол.% кислорода. 16. The method according to p. 1, where the gaseous mixture of reagents includes from about 10 to about 60 mol.% Oxygen. 17. Способ по п. 16, где газообразная смесь реагентов включает от примерно 30 до примерно 50 мол.% кислорода. 17. The method according to p. 16, where the gaseous mixture of reagents includes from about 30 to about 50 mol.% Oxygen. 18. Способ химического осаждения из паровой фазы для нанесения покрытия из оксида олова, легированного фтором, на поверхность горячей стеклянной подложки, предусматривающий: а) получение горячей стеклянной подложки при температуре от примерно 750 до примерно 1500°F, на поверхность которой необходимо нанести легированное фтором оловооксидное покрытие; б) приготовление однородной смеси испаренных реагентов, содержащей оловоорганическое соединение, от примерно 0,2 до примерно 2 мол.% фторида водорода, от примерно 2 до примерно 50 мол.% воды и от примерно 10 до примерно 60 мол.% кислорода; и в) подачу смеси испаренных реагентов к поверхности горячей стеклянной подложки; причем в этой однородной смеси испаренных реагентов протекает реакция с осаждением на поверхности горячей стеклянной подложки легированного фтором оловооксидного покрытия. 18. A method of chemical vapor deposition for coating fluorine doped tin oxide on a surface of a hot glass substrate, comprising: a) producing a hot glass substrate at a temperature of from about 750 to about 1500 ° F, on the surface of which it is necessary to apply fluorine doped tin oxide coating; b) preparing a homogeneous mixture of vaporized reagents containing an organotin compound, from about 0.2 to about 2 mol.% hydrogen fluoride, from about 2 to about 50 mol.% water and from about 10 to about 60 mol.% oxygen; and c) feeding the mixture of vaporized reactants to the surface of the hot glass substrate; moreover, in this homogeneous mixture of evaporated reagents, a reaction proceeds with the deposition of a tin oxide coating doped with fluorine on the surface of a hot glass substrate. 19. Способ химического осаждения из паровой фазы для нанесения покрытия из оксида олова, легированного фтором, на поверхность горячей стеклянной подложки, предусматривающий: а) получение горячей стеклянной подложки при температуре от примерно 750 до примерно 1500°F, на поверхность которой необходимо нанести легированное фтором оловооксидное покрытие, причем эта поверхность снабжена нанесенным не нее слоем диоксида кремния, б) приготовления однородной смеси испаренных реагентов, содержащей оловоорганическое соединение, от примерно 0,2 до примерно 2 мол.% фторида водорода, от примерно 2 до примерно 50 мол.% воды и от примерно 10 до примерно 60 мол.% кислорода, и в) подачу смеси испаренных реагентов к поверхности горячей стеклянной подложки; причем в этой однородной смеси испаренных реагентов протекает реакция с осаждением на слой диоксида кремния, находящийся на поверхности горящей стеклянной подложки, легированного фтором оловооксидного покрытия. 19. A method of chemical vapor deposition for coating fluorine doped tin oxide on a surface of a hot glass substrate, comprising: a) producing a hot glass substrate at a temperature of from about 750 to about 1500 ° F, on the surface of which it is necessary to apply fluorine doped tin oxide coating, and this surface is provided with a layer of silicon dioxide deposited thereon, b) preparing a homogeneous mixture of vaporized reagents containing an organotin compound, from about 0.2 to ... Approximately 2 mole% hydrogen fluoride, from about 2 to about 50 mole% water and from about 10 to about 60 mole% oxygen, and c) feeding the mixture of vaporized reactants to the surface of the hot glass substrate; moreover, in this homogeneous mixture of evaporated reagents, a reaction proceeds with deposition on a layer of silicon dioxide located on the surface of a burning glass substrate doped with fluorine tin oxide coating.
RU98102125/02A 1996-05-06 1997-05-06 Method for obtaining tin oxide coat on glass RU2194089C2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/642921 1996-05-06
US08/642,921 US5698262A (en) 1996-05-06 1996-05-06 Method for forming tin oxide coating on glass

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RU2194089C2 RU2194089C2 (en) 2002-12-10

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EP (1) EP0839218B1 (en)
JP (1) JP4322314B2 (en)
KR (1) KR100577945B1 (en)
CN (1) CN1122115C (en)
AT (1) ATE211779T1 (en)
AU (1) AU2828197A (en)
BR (1) BR9702244A (en)
CA (1) CA2225961A1 (en)
DE (1) DE69709525T2 (en)
PL (1) PL185373B1 (en)
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WO (1) WO1997042357A1 (en)

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