RU97112303A - MICROWAVE PLASMA DEPOSITION OF DIELECTRIC FILMS ON METAL SURFACES - Google Patents
MICROWAVE PLASMA DEPOSITION OF DIELECTRIC FILMS ON METAL SURFACESInfo
- Publication number
- RU97112303A RU97112303A RU97112303/02A RU97112303A RU97112303A RU 97112303 A RU97112303 A RU 97112303A RU 97112303/02 A RU97112303/02 A RU 97112303/02A RU 97112303 A RU97112303 A RU 97112303A RU 97112303 A RU97112303 A RU 97112303A
- Authority
- RU
- Russia
- Prior art keywords
- metal surfaces
- dielectric films
- microwave plasma
- plasma deposition
- plasma
- Prior art date
Links
- 210000002381 Plasma Anatomy 0.000 title claims 4
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 239000007789 gas Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 238000003786 synthesis reaction Methods 0.000 claims 1
- 230000002194 synthesizing Effects 0.000 claims 1
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
RU97112303A RU2117070C1 (en) | 1997-07-17 | 1997-07-17 | Shf-plasma deposition of dielectric films on metal surfaces |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
RU97112303A RU2117070C1 (en) | 1997-07-17 | 1997-07-17 | Shf-plasma deposition of dielectric films on metal surfaces |
Publications (2)
Publication Number | Publication Date |
---|---|
RU2117070C1 RU2117070C1 (en) | 1998-08-10 |
RU97112303A true RU97112303A (en) | 1998-12-27 |
Family
ID=20195435
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
RU97112303A RU2117070C1 (en) | 1997-07-17 | 1997-07-17 | Shf-plasma deposition of dielectric films on metal surfaces |
Country Status (1)
Country | Link |
---|---|
RU (1) | RU2117070C1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090115060A1 (en) | 2007-11-01 | 2009-05-07 | Infineon Technologies Ag | Integrated circuit device and method |
-
1997
- 1997-07-17 RU RU97112303A patent/RU2117070C1/en not_active IP Right Cessation
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