RU95102546A - Cathodic atomization method - Google Patents

Cathodic atomization method

Info

Publication number
RU95102546A
RU95102546A RU95102546/02A RU95102546A RU95102546A RU 95102546 A RU95102546 A RU 95102546A RU 95102546/02 A RU95102546/02 A RU 95102546/02A RU 95102546 A RU95102546 A RU 95102546A RU 95102546 A RU95102546 A RU 95102546A
Authority
RU
Russia
Prior art keywords
plasma
density plasma
density
increased
spraying
Prior art date
Application number
RU95102546/02A
Other languages
Russian (ru)
Other versions
RU2101383C1 (en
Inventor
В.В. Будилов
С.Р. Шехтман
Р.М. Киреев
Original Assignee
Уфимский государственный авиационный технический университет
В.В. Будилов
С.Р. Шехтман
Р.М. Киреев
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Уфимский государственный авиационный технический университет, В.В. Будилов, С.Р. Шехтман, Р.М. Киреев filed Critical Уфимский государственный авиационный технический университет
Priority to RU95102546A priority Critical patent/RU2101383C1/en
Publication of RU95102546A publication Critical patent/RU95102546A/en
Application granted granted Critical
Publication of RU2101383C1 publication Critical patent/RU2101383C1/en

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  • Coating By Spraying Or Casting (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

FIELD: mechanical and optical engineering, electronic and other branches of industry, in particular, spraying of vacuum-plasma depositions. SUBSTANCE: method involves using high-density plasma, which is formed between optically transparent screen and material to be atomized to create hollow cathode. EFFECT: increased efficiency by intensified atomization due to increased current density, increased ionization extent and formation of high-density plasma.

Claims (1)

Изобретение относится к области машиностроения и может быть использовано для напыления вакуумно-плазменных покрытий в электронной, оптической и других отраслях промышленности. Задача: увеличение скорости распыления за счет повышения плотности тока, увеличение степени ионизации и создания области плазмы высокой плотности. Способ осуществляется с помощью плазмы повышенной плотности, создаваемой между оптически прозрачным экраном и распыляемой материалом, образуя полый катод.The invention relates to mechanical engineering and can be used for spraying vacuum-plasma coatings in the electronic, optical and other industries. Objective: increase the spraying rate by increasing the current density, increase the degree of ionization and create a high-density plasma region. The method is carried out using high-density plasma created between an optically transparent screen and a sprayed material, forming a hollow cathode.
RU95102546A 1995-02-21 1995-02-21 Cathode spraying method RU2101383C1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
RU95102546A RU2101383C1 (en) 1995-02-21 1995-02-21 Cathode spraying method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
RU95102546A RU2101383C1 (en) 1995-02-21 1995-02-21 Cathode spraying method

Publications (2)

Publication Number Publication Date
RU95102546A true RU95102546A (en) 1996-11-10
RU2101383C1 RU2101383C1 (en) 1998-01-10

Family

ID=20165030

Family Applications (1)

Application Number Title Priority Date Filing Date
RU95102546A RU2101383C1 (en) 1995-02-21 1995-02-21 Cathode spraying method

Country Status (1)

Country Link
RU (1) RU2101383C1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2534907C1 (en) * 2013-04-08 2014-12-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Уфимский государственный авиационный технический университет" Procedure for local treatment of material at nitriding in glow discharge
RU2534697C1 (en) * 2013-04-09 2014-12-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Уфимский государственный авиационный технический университет" Method of local material treatment with effect of hollow cathode during ionic nitriding
RU2534906C1 (en) * 2013-04-17 2014-12-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Уфимский государственный авиационный технический университет" Method of local material treatment with effect of hollow cathode during ionic nitriding

Also Published As

Publication number Publication date
RU2101383C1 (en) 1998-01-10

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