RU94025312A - Charged particles spectrometer - Google Patents

Abstract

FIELD: electronic and ionic spectroscopy of surface of solids and gases. SUBSTANCE: spectrometer uses an axisymmetric energy analyzer of the "electrostatic mirror" type with Z-axis of symmetry, plane position-sensitive detector located perpendicularly to the Z-axis, and a specimen, whose center of emission region is on the Z-axis. The field-setting electrodes look like two electrically insulated from each other coaxial circular tapered surfaces with a common vertex. The inlet and outlet annular diaphragms are cut out in the inner electrode so that their boundaries are located in planes perpendicular to the Z-axis. The inlet diaphragm is narrower than the outlet one and positioned closer to the common vertex of the cones. The center of the emission source is positioned on the axis, in the middle plane of the inlet diaphragm. The sensing surface of the position- sensitive detector is located farther from the cones vertex than any of the diaphragms, on the same side of the Z-axis as these diaphragms. The device makes it possible to simultaneously indicate the spectra of emission of particles flying from the source in any direction near a definite plane perpendicular to the Z-axis. It will provide, for example, for examining of the relationship betweenenergy of electron and its wave vector near the selected crystallographic plane simultaneously in all directions lying in this plane, and energy δE. in the final range. At instrument dimensions of about 700 mm, emission source diameter of 0.35 mm, resolution 0,08%≲ΔE/E≲0,13% in range 2%≲δE/E≲3,5%.. EFFECT: enhanced accuracy.

Claims (1)

The invention relates to the field of electronic and ion spectroscopy of the surface of solids, as well as gases. The spectrometer consists of an axisymmetric energy analyzer of the "electrostatic mirror" type with an axis of symmetry Z, a flat position-sensitive detector (PSD) located perpendicular to the Z axis, and a sample whose center of the emission region is on the Z axis. The dropping electrodes are two electrically isolated from each other friend coaxial circular conical surfaces with a common vertex. The input and output annular diaphragms are cut in the inner electrode so that their boundaries are located in planes perpendicular to the Z axis. The input diaphragm is narrower than the output diaphragm and is closer to the common top of the cones. The center of the emission source is on the axis, in the middle plane of the input diaphragm. The sensing surface of the PCB is located farther from the top of the cones than either of the diaphragms, on the same side of the Z axis as these diaphragms. The device allows you to simultaneously record the emission spectra of particles flying from the source in any direction near a certain plane perpendicular to the Z axis. This will allow, for example, to study the dependence E (

) the electron energy from its wave vector near the selected crystallographic plane simultaneously in all directions lying in this plane and in the final energy range δE .. With the dimensions of the device about 700 mm, the diameter of the emission source 0.35 mm, the resolution is 0.08% <0 , 08% ≲ΔE / E≲0.13% <0.13% in the range of 2% <2% ≲δE / E≲3.5%. <3.5%.