RU2798494C1 - Combined target for a planar magnetron and method for its manufacture - Google Patents

Abstract

FIELD: magnetrons.

SUBSTANCE: invention relates to a combined target for a planar magnetron and a method for its manufacture. The target comprises a rectangular non-combined stainless-steel target configured for creating an erosion zone and subsequent placement of material from the YSZ, Ni-YSZ series in it. The non-combined target is located above the central linear magnet and peripheral magnets, and between the central magnet, peripheral magnets and the lower surface of the non-combined target, a sealed cavity is formed, comprising two holes configured for inlet and outlet of cooling water. In the method for manufacturing the target, the overall dimensions of the magnetron are calculated and modelling is carried out to determine the effective zone and the erosion depth of the planar magnetron and the volume of the erosion zone is calculated, which should be removed from the volume of the non-combined target, said volume is virtually removed to determine the required shape of the combined target. Next, the stainless steel of the non-combined target is removed along the profile of the erosion zone, the volume of steel is selected for the required volume of the erosion zone with the possibility of ensuring the cleanliness of the coating of the erosion zone with material from the YSZ, Ni-YSZ series, poured into the erosion zone, and eliminating erosion of the main target material. Next, the target is placed in an oven to melt the powder.

EFFECT: improved quality of the coating.

2 cl, 1 dwg

Description

The present invention relates to the field of materials for magnetron sputtering, namely, to a combined target for a planar magnetron and a method for its manufacture. The claimed technical solution can be used to obtain combined targets from new innovative materials - with a lower cost, since if the target is made of one material, then up to 30% of the target material is used for deposition, and the remaining part (70%) of the target not used for its intended purpose. As a result of this, the claimed technical solution (combined target) becomes cheaper in cases where more expensive materials are applied, or materials that are not manufactured in industry, which are manufactured by the applicant, depending on which material should be applied to the coated product.

Further in the text, the applicant gives the terms that are necessary to facilitate an unambiguous understanding of the essence of the claimed materials and to exclude contradictions and / or controversial interpretations when performing an examination on the merits.

Magnetron sputtering is a technology for depositing thin films on a substrate using cathode sputtering of a target in a gas discharge plasma. Technological devices designed to implement this technology are called magnetron sputtering systems. The principle of magnetron sputtering is based on the formation of a plasma column above the cathode surface, which is formed as a result of the collision of electrons with molecules of an inert gas, most often argon. For effective ionization of argon, a magnetron magnet is placed under the sputtered material (target).

At present, the problem of selecting complex combined materials for obtaining new coatings for solid oxide elements often arises. At the same time, there is also the problem of reducing the cost of targets.

An invention is known according to RF patent 2068886 "Method of manufacturing and restoring a target for magnetron sputtering in a vacuum", the essence is to ensure the possibility of using targets in which only the working sputtered part is made of AOC. The rest, made of high-frequency aluminum (HFA), but with an acceptable amount of impurities, can be used repeatedly, the consumable part is made from a rod, shaped into a base recess and welded under pressure, heating the entire target to 330 - 450 °C, and pressing the consumable part into the recess.

Thus, in the well-known technical solution, targets are made from the metal of the consumable part, but with a permissible excess of the amount of impurities relative to the consumable part, and the consumable part is formed from a high-purity aluminum bar and after filling the depth with it, the entire target is heated and the consumable part is pressed into the depth.

The disadvantages of the known method include the fact that the method does not guarantee the absolute purity of the chemical composition of the applied coatings, since there are minor impurities in the base, and it is applicable only for applying aluminum coatings.

The claimed technical solution uses the principle of computer simulation using software known as such, acquired by the applicant under a license. The platform is owned by COMSOL Multiphysics ^® , with which the user can simulate the desired design, devices and processes in many areas of engineering, manufacturing and scientific research. With the COMSOL Multiphysics ^® platform, you can analyze both individual and interrelated physical processes.

Model development environment (in English Model Builder) allows you to go through all the stages from building a geometric model, setting the properties of materials and describing the physics of the problem to solving and visualizing the simulation results.

Having developed a model, it is possible to create a simulation application based on it in the application development environment (in the Application Builder) with a specialized interface for solving typical problems for a wide range of users, including colleagues, clients and people with minimal experience in numerical simulation.

For efficient and structured storage of models and applications, the COMSOL Multiphysics ^® platform includes the Model Manager (Model Manager), which is an environment for efficient storage of models in a database, control and management of different versions of models and associated files.

To create models for solving specialized applied and engineering problems, it is possible to supplement the capabilities of the COMSOL Multiphysics ^® software platform (package) with extension modules in any combination. They provide access to additional specialized tools, but are available in a single user interface and work together as a whole, no matter what physical phenomena you are modeling.

This module is used by the applicant to design the target as a whole, and then, after its design as a whole, the process follows.

The 3D scanning system Solutionix Rexcan 450 MP is known, which is a 3D scanner that uses phase-shift optical triangulation technology and high-resolution dual cameras to obtain high-precision data, realizing surface noise and an error of less than 10 µm.

Solutionix Rexcan is able to scan deeper and narrower areas on complex objects, which is possible by adding a special 10° triangulation angle with an increased depth-to-diameter ratio. Difficult-to-scan blind spots of complex objects can be covered with a 10° triangulation mode.

For large objects, aerodynamic parts, you can additionally use a photogrammetry system to increase productivity. The Solutionix Rexcan 4 can also be combined with an automatic turntable capable of handling loads up to 50 kg.

The well-known COMSOL Multiphysics software was used by the Applicant to perform a computer simulation of the sputtering process to determine the effective erosion zone width and erosion depth, and a 3D scanning system Solutionix Rexcan 450 MP was used to experimentally measure the erosion depth.

The technical result of the claimed technical solution is the expansion of the arsenal of means for applying coatings for solid oxide elements by developing a combined target for a planar magnetron and a method for its manufacture, consisting (combined target) of stainless steel and innovative materials for solid oxide fuel cells - yttria-stabilized zirconium dioxide (Eng. . Yttria-stabilized zirconia, hereinafter YSZ) or nickel-stabilized zirconia (eng. Nickel-Yttria-stabilized zirconia, hereinafter Ni-YSZ), for deposition of components of solid oxide fuel cells with low cost, while ensuring the required quality of coatings with low cost.

The essence of the claimed technical solution is a combined target for a planar magnetron, containing a rectangular non-combined stainless steel target with dimensions: length x width x thickness = 530 mm x 100 mm x 10 mm, with the possibility of creating an erosion zone and subsequent placement of material from the YSZ series in it, Ni-YSZ; in this case, a rectangular non-combined target is located above the central linear magnet and peripheral magnets; at the same time, a sealed cavity is formed between the central linear magnet, peripheral magnets and the lower surface of the rectangular non-combined target, containing two holes with a diameter of 6 mm with the possibility of inlet and outlet of cooling water to remove heat generated from the rectangular non-combined target; while all the elements are assembled in the body. The method of manufacturing a combined target according to claim 1, which consists in the fact that the overall dimensions of the combined magnetron are calculated using the COMSOL Multiphysics® platform, a virtual 3D structure of the combined magnetron is made, then modeling is performed using the COMSOL Multiphysics ^® platform to determine the effective zone and erosion depth planar magnetron using mathematical calculation models sewn into the platform package; then, using the COMSOL Multiphysics ^® platform, they calculate the volume of the erosion zone that should be removed from the volume of the non-combined target, perform a virtual removal of this volume, with the possibility of further placing the required volume of material for deposition from the YSZ, Ni-YSZ series into this volume, run the program and get the desired shape of the claimed combined target; then, stainless steel is removed from a rectangular non-combined target along the profile of the erosion zone, then, by machining, the volume of stainless steel is selected for the required volume of the erosion zone, making its dimensions 1–2 mm larger compared to the previously obtained virtual volume of the erosion zone with the possibility of ensuring the cleanliness of the coverage of the zone erosion by material from the YSZ, Ni-YSZ series and elimination of erosion of the main target material, remaining in the volume of 70%; then, a material powder from the YSZ, Ni-YSZ series is taken and poured into the erosion zone, the target is placed in a furnace, the temperature is raised to the melting point of the powder from the YSZ, Ni-YSZ series.

The claimed technical solution is illustrated in Fig.

On FIG. shows a 3D view of the structure of the magnetron (cathode) for use on a rectangular target, while the substrate (anode) in Fig. not shown where:

1 – central linear magnet,

2 - peripheral magnets,

3 - water inlet,

4 - water outlet,

5 - sealed cavity,

6 - rectangular non-combined target (cathode),

7 - erosion zone,

8 - material from the series YSZ, Ni-YSZ,

9 - body,

10 - bolts.

Further, the applicant provides a description of the claimed technical solution.

The declared combined target is obtained using the COMSOL Multiphysics program or the 3D scanning system Solutionix Rexcan 450 MP, to determine the effective zone and the erosion depth of a planar magnetron, consisting of the following elements (Fig.):

– a rectangular non-combined target (cathode) with 6 dimensions: length x width x thickness = 530 mm x 100 mm x 10 mm with the possibility of creating an erosion zone 7 and subsequent placement of innovative materials for solid oxide fuel cells from the series: yttria-stabilized zirconium dioxide ( English Yttria-stabilized zirconia), hereinafter - YSZ, or nickel-stabilized zirconia (English Nickel-Yttria-stabilized zirconiaс) - hereinafter Ni-YSZ;

- in this case, a rectangular non-combined target 6 is located above the central linear magnet 1 and peripheral magnets 2;

– between magnets 1 and 2 and the lower surface of a rectangular non-combined target 6, a sealed cavity 5 is formed;

– hermetic cavity 5 contains two holes for water - inlet 3 and outlet 4, 6 mm in diameter with the possibility of inlet and outlet of cooling water to remove heat generated from a rectangular non-combined target 6;

- all elements are assembled in a case 9, for example, made of stainless steel, which is fixed, for example, with bolts 10.

Further, the applicant presents the claimed method of manufacturing the claimed combined target.

1 - carry out the identification of the overall dimensions of the planar magnetron;

2 - using the platform (package) COMSOL Multiphysics®, a virtual 3D structure of the planar magnetron itself is made;

3 - further, using the same platform (package) COMSOL Multiphysics ^®, simulation is performed to determine the effective zone and depth of erosion of a planar magnetron using mathematical calculation models embedded in the platform package;

4 – next, the volume of the erosion zone is calculated, which should be removed from the volume of the combined planar magnetron target using the COMSOL Multiphysics ^® platform (package), this volume is virtually removed, with the possibility of further placing into it (virtual volume) the required volume of material for deposition from a number of YSZ, Ni-YSZ, run the program and get the desired shape of the claimed combined target;

5 - then the stainless steel of a rectangular non-combined target is removed along the profile of the erosion zone, then by machining (for example, milling) the volume of stainless steel is selected for the required volume of the erosion zone, making its dimensions 1 - 2 mm larger compared to the previously obtained virtual volume of the zone erosion, to ensure that the erosion zone is covered with a material from the YSZ, Ni-YSZ range and to exclude erosion of the base material - stainless steel (remaining in the volume of 70% of the base material of the target);

6 - then take the powder of new innovative materials from the range: YSZ, Ni-YSZ and pour it into the erosion zone. The target is then placed in an oven and the temperature is raised to the melting point of the YSZ or Ni-YSZ powder.

Get the claimed combined target.

The claimed combined target has dimensions, mm: length x width x thickness = 530 x 100 x 10 and consists of stainless steel and material from the series: YSZ, Ni-YSZ, located in the erosion zone.

Further, the applicant gives examples of the manufacture and use of a combined target for a planar magnetron.

Example 1 . The use of the claimed combined target from YSZ, for applying the electrolyte of solid oxide fuel cells.

- take a rectangular non-combined target 6 made of stainless steel with a size of 530 mm x 100 mm and a thickness of 10 mm;

– by modeling using the COMSOL Multiphysics software, determine the volume of the erosion zone 7, then removing the metal along the profile of the erosion zone and then machining to increase the width and depth of the erosion zone by 1 - 2 mm compared to the original width and depth to ensure the purity of the coating of the material ;

- then determine the amount of new material YSZ 8 required to fill the depth of erosion;

- then take the YSZ powder, pour it into the erosion zone, then the target is placed in an oven, and the temperature is raised to the melting point of the YSZ powder, thus obtaining the declared combined target;

– then, the rectangular non-combined target in the planar magnetron is replaced with the declared combined target and used, for example, for applying the electrolyte of solid oxide fuel cells;

- turn on the magnetron sputtering installation, apply a coating from the declared combined target.

Example 2 The use of the claimed combined Ni-YSZ target for coating solid oxide elements.

After the service life of a target made of any metal, the depth of corrosion is maximum and cannot be used for deposition.

The coating was carried out on a substrate (anode) of a solid oxide element:

- take a rectangular non-combined target 6 made of stainless steel with a size of 530 mm x 100 mm and a thickness of 10 mm;

– by modeling using the COMSOL Multiphysics software, determine the volume of the erosion zone 7, then removing the metal along the profile of the erosion zone and then machining to increase the width and depth of the erosion zone by 1 - 2 mm compared to the original width and depth to ensure the purity of the coating of the material ;

- then determine the amount of new material Ni-YSZ 8 required to fill the depth of erosion;

– then, Ni-YSZ powder is taken, poured into the erosion zone, then the target is placed in an oven, and the temperature is raised to the melting point of Ni-YSZ powder, and thus the declared combined target is obtained;

- turn on the magnetron sputtering installation, apply a coating from the declared combined target.

Thus, the applicant has achieved the claimed technical result , namely, expanded the arsenal of coating agents for solid oxide elements by developing a combined target for a planar magnetron and a method for its manufacture, consisting (combined target) of stainless steel and innovative materials for solid oxide fuel cells - stabilized yttria-stabilized zirconia (hereinafter YSZ) or Nickel-Yttria-stabilized zirconia (hereinafter Ni-YSZ), for deposition of low cost solid oxide fuel cell components, with ensuring the required quality of coatings at low cost.

The claimed technical solution complies with the "novelty" patentability condition for inventions, since the set of features given in the independent claim of the invention has not been identified from the prior art studied by the applicant.

The claimed technical solution complies with the "inventive step" patentability condition for inventions, since the prior art studied by the applicant did not reveal the correspondence between the totality of the features given in the independent claim of the invention and the totality of the obtained technical results.

The claimed technical solution complies with the "industrial applicability" patentability condition for inventions, since the claimed technical solution can be implemented in industry through the use of materials, equipment and technologies known from the prior art.

Claims (2)

1. Combined target for a planar magnetron, containing a rectangular non-combined stainless steel target with dimensions: length × width × thickness = 530 mm × 100 mm × 10 mm, with the possibility of creating an erosion zone and subsequent placement of material from the YSZ, Ni-YSZ series in it ; in this case, a rectangular non-combined target is located above the central linear magnet and peripheral magnets; at the same time, a sealed cavity is formed between the central linear magnet, peripheral magnets and the lower surface of the rectangular non-combined target, containing two holes with a diameter of 6 mm with the possibility of inlet and outlet of cooling water to remove heat generated from the rectangular non-combined target; while all the elements are assembled in the body. 2. The method of manufacturing a combined target according to claim 1, which consists in calculating the overall dimensions of the combined magnetron using the COMSOL Multiphysics® platform, manufacturing a virtual 3D structure of the combined magnetron, then performing modeling using the COMSOL Multiphysics® platform to determine the effective zone and the depth of erosion of the planar magnetron using the mathematical calculation models sewn into the platform package; then, using the COMSOL Multiphysics® platform, they calculate the volume of the erosion zone that should be removed from the volume of the non-combined target, perform a virtual removal of this volume with the possibility of further placing the required volume of material for deposition from the YSZ, Ni-YSZ series into this volume, launch the program and get the desired shape of the claimed combined target; then, stainless steel is removed from a rectangular non-combined target along the profile of the erosion zone, then, by machining, the volume of stainless steel is selected for the required volume of the erosion zone, making its dimensions 1–2 mm larger compared to the previously obtained virtual volume of the erosion zone, with the possibility of ensuring the purity of the coating zones of erosion by material from the range YSZ, Ni-YSZ and exclusion of erosion of the main material of the target, remaining in the volume of 70%; then take the material powder from the series YSZ, Ni-YSZ and pour it into the erosion zone, the target is placed in a furnace, increase the temperature to the melting point of the powder from the series YSZ, Ni-YSZ.

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