RU2638870C1 - Method for manufacturing rotor of electrostatic gyroscope and device for implementation of this method - Google Patents

Abstract

FIELD: machine engineering.

SUBSTANCE: process for manufacturing the rotor includes forming a spherical rotor blank, balancing it, and applying a thin-film wear-resistant coating of varying thickness. An outer spherical surface of the coating is formed with a center displaced relative to the geometric center of the rotor blank by the calculated value δ in the direction opposite to the direction of the rotor imbalance vector

. For this purpose, during spraying a cyclic reciprocating motion of the rotor is performed along the axis of spayed material flow with preset amplitude Δmiddle position. Value ΔL is selected depending on the required displacementδ. The cycle of said movement is synchronized with rotation of the rotor, and the rotor is oriented by the imbalance vector

to a certain side relative to the source of sprayed material. The rotation drive is connected to the rotor fastening elements by means of a single-track shaft, in which the crankpin has eccentricity ΔL relative to the axis of rotor rotation. Said crankpin and the stop rigidly fixed on the chamber base are connected to the connecting rod ends by means of hinges. The rotation drive is mounted on guides which determine possibility of its reciprocation along the axis of sprayed material flow. In this case, the distance between the axes of hinge is varied, and the crankpin is mounted for changing the eccentricity ΔL relative to the axis of rotor rotation.

EFFECT: improvement and stability of electrostatic gyroscope rotor manufacturing due to correction of imbalance, while maintaining geometric parameters of the sphere.

2 cl, 4 dwg

Description

The invention relates to the field of precision instrumentation and can be used in the manufacture of rotors of electrostatic gyroscopes (ESG).

A spherical rotor (solid or hollow thin-walled), made, as a rule, of beryllium, is the main node of the ESG sensing element. The accuracy and quality of the rotor are largely determined by the operational characteristics of the gyroscope. The manufacturing process of the ESG rotor should provide requirements for the accuracy of the sphere (diameter and non-circularity) and the imbalance at the level of tenths and hundredths of a micrometer. On the finished surface of the outer spherical surface of the rotor, a thin-film wear-resistant coating of titanium nitride (0.8-1.2 μm thick) is formed to improve rotor landing conditions (including emergency ones). Further, a light-contrast raster pattern is formed on this coating in the form of strips representing segments of spherical helix lines for signal collection from the rotor by means of an optoelectronic gyroscope system.

A known method of manufacturing a rotor of an electrostatic gyroscope (RF patent No. 2193161), in which the forming of the rotor blank is carried out with the implementation of a reinforcing element in its body that provides the required value and the ratio of axial and equatorial moments of inertia. Next, the rotor is balanced, including successive operations of measuring its imbalance and eliminating this imbalance by directionally fine-tuning the spherical surface of the rotor and the spherical finishing to obtain a sphere of the required diameter. After that, in the pole zone by the method of electrochemical marking, a light-contrast pattern is formed on the surface of the rotor, which makes it possible to optically pick up the signal about the angular position of the rotor relative to the housing. Using the same electrochemical method, a raster drawing is performed in the equatorial zone of the rotor within the specified latitudinal angle.

This method contains the following main disadvantages.

1. The difficulty of ensuring a minimum imbalance (hundredths of a micrometer), provided that the specified diameter of the rotor is obtained with an accuracy of form at the level of hundredths and thousandths of a micrometer. This is due to the fact that when the imbalance is eliminated by the directional refinement method using tubular grinding, the material is removed from the hemispherical surface of the rotor, which is symmetrical to the imbalance vector, and the material is removed from the side oriented in a certain way with respect to the rotor unbalance vector. This technological operation obviously distorts the sphere of the rotor. Next, the rotor is spherically drilled in a three-spindle device, which allows you to restore the spherical shape of the rotor, but changes the unbalance value obtained in the previous operation. The subsequent stages of imbalance control, additional directional refinement and spherical debugging allow the method of successive approximation to obtain the required final values of the imbalance and rotor geometry. However, in fact, in this case there is a contradictory nature of these operations, which leads to the uncertainty of the technological process regarding the choice of the allowance necessary for balancing the rotor, and the processing parameters of the rotor.

2. The method of electrochemical marking is associated with poorly controlled removal of the rotor material and, depending on the required contrast value, distorts the shape of the rotor and changes the imbalance within tenths of a micrometer, which limits the possibility of manufacturing promising modifications of the ECG, where the requirements for the imbalance and accuracy of the rotor shape are an order of magnitude above.

3. This technology is difficult to modify, for example, if necessary, change the shape of the rasters on the rotor.

The method of manufacturing the rotor of an electrostatic gyroscope (RF patent No. 2140623) has the same disadvantages, in which, after spherododating and balancing the rotor on its spherical surface, a raster drawing is performed by applying a layer of photoresist on which a light image from a flat photomask is formed. After exposure and subsequent development, metal sections exposed in accordance with the pattern are etched and the remaining photoresist is removed.

It should be noted that the problems associated with the comprehensive provision of imbalance requirements and the accuracy of the size and shape of the rotor can be partially solved in the manufacture of the ESG sensing element, when the balancing of the rotor is completed upon reaching the specified value of the imbalance, fixing the actual final diameter obtained. Moreover, the required radial clearance between the rotor and the suspension electrodes is provided by processing the spherical surface of the suspension electrodes (RF patent No. 2153649). However, this technology is extremely uneconomical, because completely eliminates the interchangeability of the nodes of the sensitive element and is associated with great difficulties in fine-tuning the suspension electrodes.

Known technological methods for balancing the rotor by grinding its surface over the sphere with the removal of the desired amount of metal without deteriorating the rotor surface, or by redistributing fusible material on the inner surface of the rotor due to thermal effects from its outer side [Kovalev MP, Morzhakov SP , Terekhova A.S. Dynamic and static balancing of gyroscopic devices // M .: Mashinostroenie, 1974, 252 p.]. However, these methods are extremely time-consuming, little controlled and do not provide high accuracy of the process.

According to the largest number of common essential features for the proposed method, the technology for manufacturing the rotor of an electrostatic gyroscope (RF patent No. 2555699) was adopted as a prototype, in which they produce: shaping and balancing of the rotor blank to obtain the required imbalance and diameter values, including sequential operations of fine-tuning and sphere-finishing; a thin film wear-resistant coating of titanium nitride of the required thickness is applied to the rotor surface, for example, by magnetron sputtering, under conditions of rotation of the rotor around the main axis and at one time changing the inclination of its axis of fixation by a predetermined angle relative to the flow of the sprayed material after each rotation of the rotor 360 ° around the main axis of rotation . Then, a raster pattern is formed on the coating by laser marking. When processing with a laser beam, a pattern is formed due to the formation of an oxide film (in air), and the laser treatment modes are selected from the condition of obtaining a raster pattern with a thickness less than the coating thickness.

The presented prototype method allows to obtain a titanium nitride coating deposited by magnetron sputtering with thickness deviations not exceeding tenths and hundredths of a micrometer.

However, this method has the following disadvantages:

1. The same difficulties as in the above analogues, in ensuring imbalance and shape accuracy at the level of hundredths of a micrometer with a strictly specified value of the final rotor diameter. This is due to contradictions in the mutual influence of directional refinement and sphere-finishing operations, which leads to uncertainty in the technology of manufacturing the rotor when choosing the amount of allowance for its balancing.

2. The limited technological capabilities of the rotor manufacturing process, due to the fact that the rotor unbalance achieved at the stage of directional refinement can only be preserved at best, and there is no possibility, if necessary, to correct the imbalance during the coating process. Although the introduced mass of the coating material with a certain distribution over the surface of the rotor, in principle, could solve the problem of correcting the imbalance.

3. Inconsistency and lack of controlled interconnection of such basic technological operations for the final manufacture of the rotor as the processes of directional refinement, spherical finishing and coating of titanium nitride. Moreover, the execution of subsequent operations can negatively affect the results of the previous ones, taking the obtained rotor parameters out of tolerance.

4. The complexity and high complexity of the process of obtaining the required accuracy of the rotor in terms of imbalance.

The objective of the invention is to expand the technological capabilities of the manufacturing process of the rotor of an electrostatic gyroscope due to the fact that when applying a wear-resistant coating, the imbalance obtained at the stage of directional refinement and spherical dressing is simultaneously adjusted.

The technical result is the expansion of technological capabilities and increasing the stability of the manufacturing process of the rotor of an electrostatic gyroscope, including in terms of adjusting the imbalance while maintaining the accuracy of the sphere (diameter and non-circularity).

ротора, при этом величину δ определяют из соотношения:

, где ρ_покр и ρ_рот - плотность материала покрытия и ротора, а в процессе напыления дополнительно осуществляют циклическое возвратно-поступательное перемещение ротора вдоль оси потока напыляемого материала с амплитудой ΔL отклонения ротора от среднего положения, при этом амплитуду ΔL определяют из зависимости:

, где h - средняя толщина покрытия, равная 1/2(h_max-h_min), причем цикл указанного перемещения соответствует повороту ротора вокруг основной оси вращения на 360°. В положении, когда ротор находится на расстоянии L₀+ΔL от источника напыляемого материала, где L₀ - расстояние от среднего положения ротора до указанного источника, ротор ориентируют вектором дисбаланса

в сторону источника напыляемого материала.According to the invention, the problem is solved in that the thin-film coating is formed of a variable thickness, and the outer spherical surface of the coating is formed with the center offset from the geometric center of the rotor blank by δ in the direction opposite to the direction of the imbalance vector

rotor, while the value of δ is determined from the ratio:

, where ρ _coating and ρ _mouth is the density of the coating material and the rotor, and during the spraying process, the rotor rotates along the flow axis of the sprayed material with the amplitude ΔL of the deviation of the rotor from the middle position, and the amplitude ΔL is determined from the dependence:

where h is the average coating thickness equal to 1/2 (h _max -h _min ), and the cycle of this movement corresponds to a rotation of the rotor around the main axis of rotation by 360 °. In the position when the rotor is at a distance L ₀ + ΔL from the source of the sprayed material, where L ₀ is the distance from the middle position of the rotor to the specified source, the rotor is oriented by the imbalance vector

towards the source of the sprayed material.

The presented method, in principle, provides the expansion of technological capabilities of the manufacturing process of the ESG rotor and increase the accuracy of the rotor, however, the problem of identifying tools for its implementation, i.e. creating a device for implementing this method. It is obvious that the design of the device should allow controlling the spraying process in terms of controlling the coating thickness according to a given law with obtaining accuracy at the level of hundredths of a micrometer.

A device for coating in vacuum installations (RF patent No. 2038416) is known, comprising a chamber, inside of which there is an evaporator and a rotation mechanism for the substrate holder with the substrate, made in the form of two movable frames installed in one another in supports with the possibility of independent rotation of each frame from its own electric motor. Moreover, the electric motor of the outer frame is fixedly mounted on the camera body, and the second additional electric motor and electric motor with a substrate holder mounted on the shaft are fixed on the inner frame.

When electric motors are turned on, a substrate having, for example, the shape of a ball starts to rotate within relatively three coordinate axes. In this case, spraying occurs on all surfaces of the substrate. The selected law of the distribution of coating thicknesses is implemented due to different frequencies of rotation of the electric motors.

The above analog device has the following disadvantages.

- Excessive complexity of the design of the device associated with its significant dimensions and weight. Massive and large-sized structural elements of the device (electric motors, axles, frames), crossing the flow of sprayed material during rotation, lead to screening of the surface of the part, i.e. create shadow effects that significantly impair the uniformity of the coating and the shape of the sphere on which the coating is applied.

- The low quality of the coating, due to the possible instability of the electric motors and an excess of complex kinematic elements in the temperature range 300 ° C - 400 ° C.

- Obtaining coatings of the required configuration due to the choice of different rotational speeds of electric motors is practically unacceptable for obtaining the shape of the rotor with an accuracy of hundredths of a micrometer due to the complexity of the selection and, most importantly, the possibility of maintaining stability during spraying of both the rotational speeds of the electric motors and the ratio of these frequencies.

They do not solve the problem of spraying thin-film coatings of complex configuration on precision spherical products and technical solutions based on the use of several sources of sprayed material. For example, an installation for spraying coatings (Japanese Patent No. 6099803), in which opposite targets of magnetron sprays are placed in pairs around a rotating part holder. The same disadvantages are inherent in other known installations: a device for positioning a sample in an airtight chamber (French patent No. 21585822), a manipulator for spherical objects (ed. St. USSR No. 1366385), a vacuum coating system (RF patent No. 2058427), a device for spraying coatings (RF patent No. 2038416).

The largest number of common existing features for the proposed device as a prototype adopted a device for spraying thin-film functional coatings on spherical rotors of an electrostatic gyroscope (RF patent No. 2555699). The device comprises a vacuum chamber, inside of which there is a source of sprayed material and a rotor rotation mechanism of two frames inserted one into the other in the form of concentric half rings having the possibility of independent rotation. The structure of the device, in addition, includes two frame rotation drives, one of which is connected to the outer frame and mounted on the camera body, and the second is placed on the inner frame and is made in the form of a rotary-step mechanism. This mechanism provides simultaneous rotation of the inner frame at a given angle after each revolution of the outer frame at an angle of 360 °. The internal frame is rigidly connected with clamps for mounting the rotor, for example, in the form of coaxial needle stops, while the axis of rotation of the frames and the axis of the needle stops intersect at one point that coincides with the center of the rotor fixed in these stops, and the axis of rotation of the inner frame is inclined to the axis rotation of the outer frame.

The presented prototype device allows you to expand technological capabilities when spraying thin-film functional coatings on the spherical rotors of an electrostatic gyroscope, providing the ability to obtain coatings with minimal deviations in a given thickness (up to hundredths of a micrometer). In addition, it is possible to obtain coatings of variable thickness with a larger thickness in the area of a given spherical layer, i.e. the coating is ellipsoidal with a binding profile of the coating, for example, to the dynamic axis of rotation of the rotor, which is carried out by the corresponding positioning of the rotor when it is fixed in the needle stops.

However, the presented prototype device has the following disadvantages.

1. Limitations associated with the fact that the prototype device provides the formation of a functional coating either with minimal thickness or, as indicated above, a coating of variable thickness having an ellipsoidal shape.

Those. the outer surface of the coating is equidistant or symmetrical to the sphere of the sprayed rotor. There is no possibility of obtaining the outer spherical surface of the coating with the center offset from the geometric center of the rotor by a predetermined amount to correct the imbalance of the rotor due to the redistribution of the coating material on the surface of the rotor, in this case.

2. Limited kinematic capabilities of the device in terms of orientation and positioning of the rotor relative to the source of the sprayed material. The device does not allow varying the distance from the rotor to the source, whereas, based on the dependence determining that the deposition rate of the coating is inversely proportional to the square of the distance, you can use the distance change as a significant factor for forming a coating of a given configuration.

3. The absence of a controlled relationship between the main technological operations for the final production of the rotor - balancing and coating processes, since the formation of the coating can negatively affect the imbalance of the rotor, excluding the possibility of any way to adjust its value.

4. The complexity and relatively high complexity of obtaining the required accuracy of the rotor parameters in terms of the diameter and magnitude of the imbalance, since the operations of eliminating the imbalance and spherical debugging contain technological contradictions.

The objective of the invention is to expand the technological capabilities of the manufacturing process of the rotor of an electrostatic gyroscope.

The technical result is the expansion of technological capabilities and increasing the stability of the manufacturing process of the rotor of an electrostatic gyroscope, including in terms of adjusting the imbalance while maintaining the accuracy of the sphere (diameter and non-circularity).

According to the invention, the task is solved in that the rotation drive of the outer frame is connected to this frame by means of a single shaft; an emphasis is fixed on the camera base, the axis of the emphasis and the axis of rotation of the drive are located in one plane passing through the axis of flow of the sprayed material; a connecting rod neck of a single-shaft shaft having an eccentricity ΔL relative to the axis of the main journals coinciding with the axis of rotation of the drive, and the stop through cylindrical joints connected to the ends of the connecting rod; the distance between the axes of the said hinges is L ₁ , while the rotation drive is mounted on rails, providing the possibility of its reciprocating movement along the axis of flow of the sprayed material; the articulated connection of the connecting rod with the connecting rod journal is made with the possibility of varying the value of L ₁ , and the connecting rod journal is installed in a single shaft with the possibility of changing the eccentricity ΔL.

The invention is illustrated by drawings, where in FIG. 1 shows a circuit for correcting rotor imbalance, FIG. 2 is a general view of a device for spraying a coating; FIG. 3 shows the orientation of the elements of the device when the rotor is at the maximum distance from the source of the sprayed material, and in FIG. 4 - the orientation of the elements of the device with the location of the rotor at a minimum distance from the source.

In FIG. 1, 2, 3 and 4 are indicated:

1 - Spherical rotor with a diameter of D _p , on the surface of which is applied a thin-film functional coating (hereinafter referred to as the rotor).

2 - Thin film coating (hereinafter referred to as the coating), forming a final rotor with a diameter D _p ^* , deposited on the rotor 1 and having a center O * of a spherical surface, which is offset by a value of δ relative to the center O of the outer sphere of the rotor blank 1.

3 - Source of sprayed material.

4 - The flow of sprayed material.

5 and 6 - The outer and inner frames of the device, providing rotation and simultaneous rotations of the rotor 1 (hereinafter referred to as the frame).

7 - Drive rotation of the rotor 1 around the main axis (hereinafter referred to as the drive).

8 and 9 - Needle stops for fixing the rotor in the inner frame 6.

10 - The connecting rod neck of a single shaft (hereinafter - the connecting rod neck).

11 - Cheeks of a single shaft.

12 - The root necks of a single-shaft shaft (hereinafter referred to as the root necks).

13 - emphasis, rigidly fixed on the basis of the vacuum chamber (hereinafter - emphasis).

14 and 15 - Cylindrical bearings connecting the emphasis 13 and the main neck 12 with the connecting rod 16.

17 - Guides, rigidly fixed to the base of the camera and setting the direction of the reciprocating movement of the actuator 7 with the rotor 1.

D _p - the diameter of the rotor 1, which is sprayed coating 2.

D _p ^* is the diameter of the outer sphere of the coating 2 (final diameter of the finished rotor).

δ is the amount of displacement of the center O * of the outer spherical surface of the coating 2 relative to the center O of the outer sphere of the rotor blank 1.

M ₁ M ₂ - the main axis of rotation of the rotor 1, defined by the drive 7.

N ₁ N ₂ - the axis of simultaneous rotation of the rotor 1 with the inner frame 6 after each rotation of the rotor around the axis M ₁ M ₂ 360 °.

- Вектор дисбаланса ротора 1.

- Vector imbalance of the rotor 1.

на поверхность ротора 1.a - The output point of the imbalance vector

to the surface of the rotor 1.

b - A point on the surface of the rotor 1, diametrically opposite to the point a.

h _min and h _max - The minimum and maximum thickness of the coating 2 on the rotor 1.

L ₀ - The average distance from the source 3 of the flow of the sprayed material 4 to the rotor 1.

L ₁ - the working length of the connecting rod 16 or the distance between the axes of the emphasis 13 and the hinge 15.

ΔL - The eccentricity of the axis of the connecting rod journal 10 relative to the axis of the main journals 12 of the single-shaft shaft, which determines the amplitude of the reciprocating movement of the actuator 7 with the rotor 1.

Implementation of the proposed method for manufacturing an ESG rotor using a device for implementing this method consists in performing the totality and sequence of the following operations.

(фиг 1). Очевидно, что диаметр D_р определяется с учетом напыления1. By means of machining (turning, grinding, lapping), a rotor blank is formed by a diameter D _p + Δ (where Δ is the allowance for balancing this rotor blank, not shown in the figures) by means of directional refinement and sphere-finishing. The rotor 1 obtained after operations directed directional refinement and spherical finishing, has a given diameter D _p and imbalance

(Fig 1). Obviously, the diameter D _p is determined taking into account the spraying

и формируя покрытие 2 со смещением центра О* его сферической поверхности относительно центра О ротора 1 на расчетную величину δ с выбором направления этого смещения, которое задается вектором дисбаланса

, можно корректировать величину ε₀ этого дисбаланса. Очевидно, что в данном случае требуется учитывать плотности материала ротора 1 и покрытия 2. Т.е. на этапе формирования покрытия 2 необходимо выявление зависимости величины требуемого смещения δ центра О* этого покрытия 2 относительно центра О ротора 1.functional coating of the required thickness to obtain the desired final diameter D _p ^{* of the} finished rotor. Determining the imbalance vector

and forming a coating 2 with a displacement of the center О * of its spherical surface relative to the center О of the rotor 1 by the calculated value δ with a choice of the direction of this displacement, which is set by the imbalance vector

, you can adjust the value ε _{0 of} this imbalance. Obviously, in this case, it is required to take into account the density of the material of the rotor 1 and coating 2. That is, at the stage of formation of the coating 2, it is necessary to identify the dependence of the magnitude of the required offset δ of the center О * of this coating 2 relative to the center О of the rotor 1.

2. For this, in the coordinate system with the origin in the geometric center O of the rotor 1 with coating 2, one can write the expression for the center of mass z of the system, which corresponds to the final imbalance ε ₁ of the coated rotor (Fig. 1):

определяет центр масс ротора 1, V_Σ - объем конечного готового ротора, образованного ротором 1 и покрытием 2, V₁ - объем ротора 1 и V₂ - объем покрытия 2, z - центр масс системы, M_Σ - масса конечного готового ротора, ρ - плотность конечного готового ротора, dν - область интегрирования.where is the integral

determines the center of mass of rotor 1, V _Σ is the volume of the final finished rotor formed by rotor 1 and coating 2, V ₁ is the volume of rotor 1 and V ₂ is the volume of coating 2, z is the center of mass of the system, M _Σ is the mass of the final finished rotor, ρ is the density of the final finished rotor, dν is the integration region.

, где ε₀ - разница между геометрическим центром О ротора 1 и его центром масс (т.е. исходный дисбаланс) и M₀ - масса ротора 1.The above expression can be represented as

, where ε ₀ is the difference between the geometric center О of the rotor 1 and its center of mass (i.e., the initial imbalance) and M ₀ is the mass of the rotor 1.

, где можно принять

из соображений симметрии, т.к. начало системы координат определено в геометрическом центре О* ротора с покрытием.Consider the integral

where can I take

for symmetry reasons, as the origin of the coordinate system is defined in the geometric center O * of the coated rotor.

переменную

(координата

соответствует системе координат с началом в центре О ротора 1), получаем:Replacing the integral

variable

(coordinate

corresponds to the coordinate system with the origin in the center О of the rotor 1), we obtain:

.

.

, как указано выше, равен нулю из соображений симметрии, т.к. он берется в системе координат с началом в центре О ротора 1, а интеграл

равен объему ротора 1.Integral

, as indicated above, is equal to zero for reasons of symmetry, because it is taken in the coordinate system with the origin in the center О of rotor 1, and the integral

equal to the volume of the rotor 1.

, где R_p - радиус ротора 1, равный 1/2 D_р.In this way

where R _p is the radius of the rotor 1, equal to 1/2 D _p .

Substituting the resulting expression in the original formula (1), we obtain:

масса ротора 1 и

- масса конечного готового ротора, т.е. масса ротора 1 с покрытием 2.Here

rotor mass 1 and

- mass of the final finished rotor, i.e. mass of rotor 1 with coating 2.

, тогда для изменения величины дисбаланса получается выражение:With sufficient accuracy, we can assume that the ratio

, then to change the magnitude of the imbalance we get the expression:

It is characteristic that the displacement δ of the center O * of the final finished rotor from the center O of the initial rotor 1 does not depend on the diameter of the rotor.

From expression (3), one can determine the value of δ, knowing the initial imbalance ε _{0 of the} rotor 1 and setting the required value ε _{1 of the} final imbalance of the coated rotor. Obviously, the value of ε ₁ should be set equal to zero. In this case, we have an expression that allows us to determine the displacement δ:

The dependence of the offset δ on the corrected imbalance ε ₀ , determined from the condition that ε ₁ = 0 is linear. For a beryllium rotor coated with titanium nitride (densities are respectively equal: ρ _coat = 5.44 g / cm ³ and ρ _mouth = 1.85 g / cm ³ ) we can determine that for ε ₀ = 0.2 μm we have δ = 0.102 μm, ε ₀ = 0.4 μm - δ = 0.205 μm, for ε ₀ = 0.8 μm - δ = 0.41 μm, etc. From the above values, the effectiveness of the proposed technical solution is visible. So, for example, with the required value of the final imbalance of not more than 0.05 μm, it is possible to obtain the exact sphere of the rotor 1 of a given diameter D _p , fixing the actual resulting imbalance ε ₀ , which can be in the range of 0.3-0.6 μm, and then correct this imbalance at the stage of coating formation 2, shifting the center О * of the coating sphere relative to the center О of rotor 1 by the calculated value δ, which, as indicated above, will be 0.1-0.3 μm, which is quite acceptable for the average thickness coatings 0.8-1.2 microns.

3. To carry out the process of forming a coating 2 with an offset of δ from the center О of the rotor blank 1 of the center О * of the outer spherical surface of the coating, which is the outer sphere of the final finished rotor, it is advisable to use the known dependence of the deposition rate ν _oc upon magnetron sputtering on the distance L the sprayed object to the source of the sprayed material [Danilin B.S., Syrchin V.K. Magnetron sputtering systems // M .: Radio and communication, 1982, 73 S.]:

where L ₀ is the distance from the surface to the source of the sprayed material, Ω is the angle between the direction of flow of the material and the normal to the surface, A is the dimensional constant determined by the parameters of the spraying process.

By analogy, for the current thickness h * of the sprayed coating at an arbitrary selected point, we can write:

With a constant value of the distance L _{0 of the} rotor 1 from the source 3 of the flow of the sprayed material 4 on the rotor 1 is formed, as is the case in the prototype device, a coating of the same thickness with an accuracy of hundredths of a micrometer. The uniformity of the coating is ensured by the fact that the rotor 1 is in the process of spraying and is placed in a device of two frames in the form of concentric half rings 5 and 6, which have the possibility of independent rotation. The main drive of rotation 7 is connected with the frame 5, providing a constant speed of rotation around the axis M ₁ M ₂ , and with the internal frame 5, an auxiliary drive, made in the form of a rotary-step mechanism (not shown in Figs. 2, 3 and 4). This device allows the frame 5 to be rotated by a predetermined angle around the additional axis N ₁ N ₂ after each revolution of the frame 6 with the rotor 1 fixed around it by the axis M ₁ M ₂ through the coaxial needle stops 8 and 9 through an angle of 360 °.

4. To form a coating of variable thickness with the center О * of the outer sphere of the coating 2 shifted by a predetermined value δ relative to the center О of the rotor 1, using the above dependence (6) of the thickness of the formed coating 2 on the distance between the rotor 1 and the source 3 of the sprayed material stream 4 , the proposed device provides additional cyclic reciprocating movement of the rotor 1 along the axis of the flow of the sprayed material 4 with the amplitude ΔL of the deviation of the rotor 1 from the middle position (Fig. 2, 3 and 4). In this case, the cycle of this movement corresponds to the rotation of the rotor around the main axis of rotation of M ₁ M ₂ 360 °. For this, the rotation drive 7 of the outer frame 5 is connected to this frame by means of a single-shaft, which is part of the mechanism that converts the rotational movement of the drive 7 into a reciprocating movement of the drive itself with the rotor 1. The amplitude ΔL of the specified reciprocating movement is set by the crank pin 10, mounted on the cheeks 11 of the single-track shaft, is made with an eccentricity ΔL relative to the axis of the main journals 12, and the axes of the necks 12 coincide with the axis of rotation of the actuator 7. The connecting rod journal 10 and the stop 13 of the cylindrical hinges 14 and 15 are connected with the ends of the connecting rod 16, while the stop 13 is rigidly fixed to the base of the vacuum chamber. The distance between the axes of the hinges 14 and 15 is L ₁ , and the axis of the rotation drive 7 and the stop 13 are located in the same plane parallel to the axis of the flow 4 of the sprayed material. The reciprocating movement of the rotor 1 along the flow axis of the sprayed material 4 is ensured by the fact that the rotation drive 7 is mounted on the guides 17, which are rigidly fixed to the base of the vacuum chamber and set the desired direction of movement of the drive 7 with the rotor 1.

в сторону источника 3 напыляемого материала. В процессе напыления на так называемом «тяжелом месте» (точка а) ротора 1 формируется покрытие наименьшей толщины h_min (фиг. 1). Условие перемещения ротора 1 строго вдоль оси потока напыляемого материала 4 определяется тем, что при этом минимизируется влияние на получение покрытия заданного профиля изменения угла Ω согласно выражению (6). Поскольку цикл указанного возвратно-поступательного перемещения соответствует повороту ротора вокруг оси вращения M₁M₂ на 360°, то толщина покрытия 2 будет монотонно меняться от минимальной величины h_min до максимального значения h_max. При этом формируется наружная поверхность покрытия (фиг. 1), которая является наружной сферой конечного готового ротора, с центром О*, смещенным относительно центра О ротора 1 на величину δ.It is obvious that when the rotor 1 is at a distance L ₀ + ΔL from the source of the sprayed material (Fig. 3), where L ₀ is the distance from the middle position of the rotor to the specified source, i.e. when the deposition rate is minimal, it must be oriented by the imbalance vector

towards source 3 of the sprayed material. In the process of spraying on the so-called "hard spot" (point a) of the rotor 1, a coating of the smallest thickness h _{min is formed} (Fig. 1). The condition for the movement of the rotor 1 strictly along the axis of the flow of the sprayed material 4 is determined by the fact that in this case the influence on the obtaining of the coating of a given profile of the change in the angle Ω is minimized according to expression (6). Since the cycle of the indicated reciprocating movement corresponds to the rotation of the rotor around the axis of rotation of M ₁ M ₂ by 360 °, the thickness of the coating 2 will monotonously change from the minimum value of h _min to the maximum value of h _max . In this case, the outer surface of the coating is formed (Fig. 1), which is the outer sphere of the final finished rotor, with the center О * offset from the center О of the rotor 1 by δ.

Thus, the process of forming a coating of variable thickness is ensured by the sequential selection of the required displacement value δ depending on the adjusted imbalance ε ₀ from the condition that ε ₁ is set equal to zero and the amplitude ΔL of the reciprocating movement of the rotor 1 is determined.

5. Obviously, there is a relationship between the values of h _max and h _min , which determine the offset δ of the center О * of the coating sphere 2 relative to the center О of the rotor 1, and such parameters as the amplitude ΔL and the average distance L _{0 of the} rotor 1 from the source 3.

Using expression (6) and translating cos ² (Ω) into constant B (B is a constant defined by the parameters of the spraying process) for the maximum and minimum coating thickness h _max and h _min, we can write:

From the obvious geometric transformations it follows:

where can we get the expression that defines the relationship between the quantities δ, L ₀ and ΔL:

Obtaining the exact analytical dependence ΔL = f (δ) to determine the amplitude of the reciprocating movement of the rotor is extremely difficult, because is related to the solution of the fourth degree equation, which is the dependence (10). A rational option is to determine empirically the constant B for specific spraying conditions and construct graphical dependencies ΔL = f (δ) for the set of real values of L ₀ . As a distinctive feature of the claims defining the ΔL values used, the following relationship is reasonable for determining ΔL.

, а средняя толщина покрытия

, можно получить требуемую зависимость:Fairly obvious transformations of expressions (7) and (8), and considering that, as follows from FIG. 1 and as indicated in the description of the application, the offset

and average coating thickness

, you can get the required dependency:

6. It is obvious that for the required values of δ in the presented device, it is necessary to provide the possibility of varying the values of L ₁ and ΔL by performing a movable articulation of the connecting rod 16 with the connecting rod neck 10 and the possibility of changing the eccentricity of the connecting rod neck 10 relative to the axis of the main journals, which are significant distinguishing features signs. Moreover, the values of L ₀ , L ₁ and ΔL are interconnected. The specific design of the indicated swivel is not critical. For example, a change in the value of L ₁ can be achieved by performing a swivel connection of the connecting rod 16 with the connecting rod neck 10 in the cage, which has the ability to move along the connecting rod with fixing in the desired position. And one of the options for varying the ΔL value is to change the eccentricity of the connecting rod journal 10 relative to the main journals 12 (or the main axis M ₁ M _{2 of} rotation of the rotor 1) by performing longitudinal grooves in the cheeks 11 of the single shaft and fixing fixing nodes in these grooves.

7. The inclusion of the actuator 7 provides rotation of the rotor 1 around the main axis of rotation. At the same time, the rotation of the single shaft begins,

. Указанная схема реализуется при жесткой фиксации упора 13 на основании вакуумной камеры. Вращение вокруг оси M₁M₂, задаваемое приводом 7, синхронизировано с возвратно-поступательным перемещением привода с ротором. В данной конструкции привод, выполняя свою основную функцию - вращение и изменение ориентации ротора, обеспечивает собственное возвратно-поступательное перемещение для обеспечения формирования покрытия заданной конфигурации. Представленная на фиг. 3 схема ориентации определяет позицию ротора 1, когда при расстоянии L₀+ΔL максимально приближенной точкой к источнику 3 является точка а, соответствующая месту пересечения вектора дисбаланса с поверхностью ротора, т.н. «тяжелое место» ротора. В этой позиции формируется покрытие с конечной толщиной h_min. Аналогично диаметрально противоположная точка b определяет «легкое место» ротора и ориентирована в сторону источника 3, когда при повороте вокруг основной оси вращения M₁M₂ на угол 180° привод 7 с ротором 1 перемещаются в позицию, показанную на фиг. 4 и соответствующую минимальному расстоянию L₀-ΔL ротора 1 от источника 3. В этой позиции шатунная шейка 10 и упор 12 располагаются по разные стороны от коренных шеек 12, а расстояние от ротора 1 до источника 4 определяется разницей L₀-ΔL (фиг. 4). В этой позиции скорость осаждения напыляемого покрытия максимальна и соответственно формируется покрытие с конечной толщиной h_max.defined by the actuator 7, in which the connecting rod journal 10 rotates around a circle of radius ΔL. In this mechanism, a single-shaft shaft is the link that sets the oscillating movement to the connecting rod 16. And the output link of the circuit is actually the drive 7, which performs a reciprocating movement with an amplitude ΔL. At the same time, through the hinge 15, a force is transmitted to the connecting rod 16, which forces it to change the angle of inclination to the plane passing through the axis M ₁ M ₂ and the axis of the stop 13, in which the reciprocating movement of the actuator 7 with the rotor 1 is carried out. constantly changing slope in said plane of the shaft and bends, which performs the function of a crank, and as a result, and changing the configuration of a triangle formed by this knee, connecting rod 16 and the segment, characterized by the distance between the axis M ₁ M ₂ and the abutment 13 axis. since the direction of movement of the actuator 7 with the rotor 1 is given by the guide 17 in a plane resembling through the axis M ₁ M ₂ and the abutment axle 13 which is rigidly fixed to the base of the chamber, this movement will be of a reciprocating nature along the flow 4 spraying material axis with amplitude ΔL relative to the middle position. Denoting the average distance L ₀ , we can show that the value of L ₀ is determined from the expression

. The specified circuit is implemented with rigid fixation of the stop 13 on the basis of a vacuum chamber. The rotation around the axis M ₁ M ₂ defined by the drive 7 is synchronized with the reciprocating movement of the drive with the rotor. In this design, the drive, performing its main function - rotation and change of orientation of the rotor, provides its own reciprocating movement to ensure the formation of a coating of a given configuration. Presented in FIG. 3, the orientation scheme determines the position of the rotor 1, when at a distance L ₀ + ΔL the closest point to the source 3 is point a, corresponding to the intersection of the imbalance vector with the surface of the rotor, the so-called "Heavy spot" of the rotor. In this position, a coating with a final thickness h _{min is formed} . Similarly, the diametrically opposite point b defines the “easy spot” of the rotor and is oriented towards the source 3 when, when turning around the main axis of rotation M ₁ M ₂ through an angle of 180 °, the drive 7 with the rotor 1 moves to the position shown in FIG. 4 and corresponding to the minimum distance L ₀ -ΔL of the rotor 1 from the source 3. In this position, the connecting rod journal 10 and the stop 12 are located on opposite sides of the main journals 12, and the distance from the rotor 1 to the source 4 is determined by the difference L ₀ -ΔL (Fig. four). In this position, the deposition rate of the sprayed coating is maximum and, accordingly, a coating with a final thickness h _{max is formed} .

в сторону источника 3 потока напыляемого материала 4. При этом коренные шейки 12 и упор 13 располагаются по разные стороны от шатунной шейки 10, что соответствует наибольшему расстоянию от ротора 1 до источника 3, которое определяется суммой L₀+ΔL (фиг. 3). В этой позиции скорость осаждения напыляемого покрытия 2 на ротор 1 минимальна, и формируется покрытие с конечной толщиной h_min.8. A fundamental element of the technology is the positioning of the rotor 1, as shown in FIG. 3. The rotor 1 is fixed in the needle stops 7 and 8 in the position of its maximum distance from the source 4 of the sprayed material, while orienting the imbalance vector

towards the source 3 of the flow of the sprayed material 4. In this case, the main journals 12 and the stop 13 are located on different sides from the connecting rod journal 10, which corresponds to the greatest distance from the rotor 1 to the source 3, which is determined by the sum L ₀ + ΔL (Fig. 3). In this position, the deposition rate of the sprayed coating 2 on the rotor 1 is minimal, and a coating is formed with a final thickness h _min .

заготовки ротора 1, причем покрытие 2 при этом имеет точную наружную сферическую поверхность, которая является наружной сферической поверхностью конечного ротора.Thus, the necessary initial conditions for performing the coating operation are created from the point of view of correcting the imbalance of the rotor 1, which is determined by the redistribution of the coating material on the outer surface of the rotor. The specified redistribution is associated with a monotonic change in the thickness of the coating with reference to the nature of this change in the imbalance vector

billet rotor 1, and the coating 2 in this case has a precise outer spherical surface, which is the outer spherical surface of the final rotor.

If any parameters of the coating or rotor do not meet the technical requirements, the coating is etched in chemicals that are inert to the main material of the rotor - beryllium. Thus, the initial rotor blank is restored, and titanium nitride coating is re-applied to its surface.

The resulting rotor coated with titanium nitride is installed in the drive of the laser system and a raster pattern of a given configuration is formed by laser marking on its outer spherical surface.

The raster is applied over the surface of titanium nitride, and the laser treatment mode is selected from the condition of obtaining a raster thickness less than the coating thickness h _min . This is followed by the certification of the main rotor parameters - geometry, imbalance, contrast and uniformity of the contrast of the raster pattern.

Thus, in comparison with the prototype, the technological capabilities of the manufacturing process of the rotor are significantly expanded. The interconnection of technological operations of balancing the rotor by the method of directional fine-tuning and sphere-finishing is provided, on the one hand, and the formation of a functional coating, on the other. At the same time, the contradiction is minimized when directed refinement eliminates the imbalance, but distorts the shape, and subsequent spherical finishing restores the spherical shape, however, it can change the amount of imbalance. In the proposed technical solution, the manufacture of the rotor with the required parameters, including obtaining an imbalance and accuracy of the form at the level of hundredths and thousandths of a micrometer, is provided in the process of two sequential and interconnected operations.

Moreover, at the stage of obtaining the exact sphere of the rotor, it is possible to deviate the imbalance from the set value, since the imbalance can be corrected at the stage of formation of the thin-film functional coating, which increases the controllability of the process of eliminating the imbalance.

Thus, the goal is achieved. Achieving this goal is ensured by the unity of the essential features of the method, the fulfillment of the conditions of necessity and sufficiency of the features and their stable relationship.

The technical result - the expansion of technological capabilities and increasing the stability of the manufacturing process of the rotor of an electrostatic gyroscope, including in terms of adjusting the imbalance while maintaining the accuracy of the sphere (diameter and non-circularity) - is achieved.

In practice, beryllium rotors were obtained in which the imbalance was adjusted from a value of the order of 0.25-0.35 μm to a value of 0.02-0.05 μm due to the displacement of the center of the sphere of a thin-film coating of titanium nitride relative to the center of the rotor blank by 0.12 -0.18 μm. In real conditions, this corresponds to L ₀ = 100 mm and ΔL = 15 mm. Moreover, the accuracy of the shape of the rotor, characterized by the amplitudes of the harmonics, was provided in the range of 0.04-0.015 μm.

At the moment, in JSC Concern TsNII Elektropribor, the proposed method and device have been tested in the manufacture of an experimental batch of beryllium rotors of electrostatic gyroscopes with obtaining positive results.

Currently, technical documentation is being developed for using the method in the serial production of these devices.

The technical and economic efficiency of the invention consists in expanding the technological capabilities of the manufacturing process of rotors of electrostatic gyroscopes, in increasing the efficiency of navigation systems and complexes where these gyroscopes are used.

Claims (6)

1. A method of manufacturing a rotor of an electrostatic gyroscope, including shaping and balancing the rotor blank to obtain the desired diameter and imbalance ε ₀ and applying a thin film wear-resistant coating with a density higher than the density of the rotor material by magnetron sputtering on the rotor surface with constant rotation of the rotor around the main axis with periodic a change in its orientation with respect to the rotor body, characterized in that the thin-film coating is formed of a variable thickness, moreover, the outer spherical surface of the coating is formed with the center offset relative to the geometric center of the rotor blank by a value of δ in the direction opposite to the direction of the imbalance vector

rotor, while the value of δ is determined from the ratio:

, where ρ _coating and ρ _mouth is the density of the coating material and the rotor, and during the spraying process, the rotor rotates along the flow axis of the sprayed material with the amplitude ΔL of the deviation of the rotor from the middle position, and the amplitude ΔL is determined from the dependence:

where h is the average coating thickness equal to 1/2 (h _max -h _min ), and the cycle of this movement corresponds to a rotation of the rotor around the main axis of rotation by 360 °, while in the position when the rotor is at a distance L ₀ + ΔL from the source the sprayed material, where L ₀ is the distance from the middle position of the rotor to the specified source, the rotor is oriented by the imbalance vector

towards the source of the sprayed material. 2. Device for manufacturing a rotor of an electrostatic gyroscope, containing a vacuum chamber, inside of which there is a source of sprayed material and a rotor rotation mechanism made of two frames in the form of concentric semirings having the possibility of independent rotation, two frame rotation drives, one of which is connected to the outer frame and mounted on the camera body, and the second is placed on the inner frame and is made in the form of a rotary-step mechanism, providing rotation of the inner frame at a given angle after each rotation of the outer frame through an angle of 360 °, latches rigidly connected to the inner frame in the form of coaxial needle stops for mounting the rotor, while the axis of rotation of the frames and the axis of the needle stops intersect at one point that coincides with the center of the rotor fixed in the indicated stops, and the axis the rotation of the inner frame is inclined to the axis of rotation of the outer frame, characterized in that the rotational drive of the outer frame is connected to it by a single-shaft shaft, a stop is rigidly fixed to the base of the camera, the stop axis and the axis of rotation of the drive located on the same plane passing through the axis of flow of the sprayed material, the connecting rod neck of a single-shaft with an eccentricity ΔL relative to the axis of the main journals coinciding with the axis of rotation of the drive, and the stop through cylindrical hinges connected to the ends of the connecting rod, while the distance between the axes of the hinges is L ₁ , while the rotation drive is mounted on rails with the possibility of its reciprocating movement along the flow axis of the sprayed material, a connecting rod with a connecting rod neck connected ball nirno with the possibility of varying the aforementioned L ₁ , and the connecting rod journal is mounted in a single shaft with the possibility of changing the eccentricity ΔL.

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