CN112461263B - Nano manufacturing method of diamond gyro harmonic oscillator - Google Patents
Nano manufacturing method of diamond gyro harmonic oscillator Download PDFInfo
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- CN112461263B CN112461263B CN202011316672.5A CN202011316672A CN112461263B CN 112461263 B CN112461263 B CN 112461263B CN 202011316672 A CN202011316672 A CN 202011316672A CN 112461263 B CN112461263 B CN 112461263B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/18—Metallic material, boron or silicon on other inorganic substrates
- C23C14/185—Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
Abstract
The invention provides a nano manufacturing method of a diamond gyro harmonic oscillator, belonging to the field of ultra-precision machining of difficult-to-machine materials. The laser pulse frequency of the laser device is adjustable at 1-500kHz, the pulse width is adjustable at 5-300ps, the diameter of a laser spot is adjustable at 5-40 mu m, the power is adjustable at 0-100W, and rough machining and finish machining can be simultaneously realized; the nano moving platform device can realize the movement of three coordinate axes of X, Y and Z and the rotation around the Z axis, the movement precision is less than 10nm, and the rotation precision is less than 0.02 degrees; the in-situ online detection device carries out in-situ detection on the processing quality by utilizing a laser interferometer; the film plating device adopts ion plating; the focused ion beam device has the acceleration voltage adjustable within 2-30kV and the current adjustable within 20pA-50 nA; the invention provides a nano manufacturing method of a diamond superhard material complex structure, which realizes nano-scale precision manufacturing of a diamond gyroscope harmonic oscillator.
Description
Technical Field
The invention relates to a nano manufacturing method of a diamond gyro harmonic oscillator, relates to the field of nano manufacturing of superhard materials, and belongs to the field of ultra-precision machining of materials difficult to machine.
Background
With the development of national defense, aviation, aerospace and other major projects in China, the requirements on high-performance equipment are higher and higher, and high-performance parts of the high-performance equipment can stably work for a long time under extremely harsh conditions of high temperature, high pressure, high frequency, high power and the like. Diamond is used as an ultra-wide bandgap semiconductor, is a material with the highest hardness in the world, has excellent mechanical, optical, electrical and other properties, and is widely applied to the fields of high-energy physical detectors, radiation detectors, laser optical elements and the like. However, diamond is difficult to process by conventional processing methods due to its high hardness, good wear resistance, and stable chemical properties. The processing quality directly determines the performance of the diamond high-performance device, thereby influencing the service performance of the whole high-performance equipment. China is a big country for producing artificial diamonds, the annual output is stable in the world, and more than 90% of the artificial diamonds are produced in China every year. At present, the preparation technology of diamond materials in China is in an international advanced level, and ultra-large single crystal diamond can be produced, and the quality of the diamond materials is close to that of natural diamond. However, many high-performance diamond parts with complex structures still rely on import seriously or entrust foreign relevant units to process, and the manufacturing can not be processed at all at home, and for the key manufacturing technology in the fields of national defense, aviation, aerospace and the like, the foreign technology carries out strict technical blockade on China all the time. Therefore, the diamond processing technology with a complex structure is a core key manufacturing technology of high-performance equipment and high-performance parts in the fields of national defense, aviation, aerospace and the like.
The inertial navigation gyroscope is non-GPS navigation, is not influenced by weather and electromagnetic interference, is widely applied to the fields of aviation, aerospace, military industry, national defense and the like, and the application field of the existing silicon gyroscope is very limited because the existing silicon gyroscope can not be used under severe conditions such as high load and the like. Diamond is expected to replace silicon to become an inertial navigation gyroscope material used under complex and harsh conditions due to excellent physical properties such as high hardness, high breaking strength and the like. However, the most important part of the inertial gyro is a harmonic oscillator, the structure of which is complex, and diamond is difficult to machine by the traditional mechanical machining method due to high hardness, good wear resistance and stable chemical properties, and the methods developed at present for machining diamond include a mechanical grinding method, chemical mechanical polishing and thermochemical polishing, but these methods are often used for machining planes, while the laser machining method can machine grooves, but the machining quality is poor, and the complex structure of miniaturized parts is difficult to machine. Therefore, a new processing method and a new processing technology are designed, a complex microstructure is processed on the diamond, nano-precision manufacturing is realized, and the method has very important significance for improving the machining technology of China and the performance of important equipment in the fields of national defense, aviation and the like.
Disclosure of Invention
The invention adopts a nano manufacturing method of a diamond gyro harmonic oscillator, which comprises the steps of rotating and moving a sample table, scanning the surface of a sample by utilizing a laser beam, processing a groove array, plating a layer of metal film in a groove by utilizing a magnetron sputtering method, and finely trimming the groove by utilizing a focused ion beam.
The technical scheme of the invention is as follows:
a nano-class manufacturing method for the harmonic oscillator of diamond gyro includes such steps as scanning the surface of specimen by laser beam, making a slot array, plating a layer of metal film in the slot by magnetron sputtering, and trimming the slot by focused ion beam. The laser beam is picosecond laser, the pulse width is 100-300ps, a layer of polyimide adhesive tape is adhered on the surface of the sample to be used as a protective layer, the sample stage rotates and moves, the laser beam is enabled to scan on the surface of the sample, and a groove array is processed; plating a layer of metal film on the sample by a magnetron sputtering method; finely trimming the groove by using a focused ion beam, wherein the beam current of the ion beam is 5-30kV and 20-160pA; the sample was removed, the polyimide tape removed, and ultrasonically cleaned in alcohol. The invention provides a nano manufacturing method of a diamond superhard material complex structure, which realizes nano-scale precision manufacturing of a diamond gyroscope harmonic oscillator.
(1) The sample is a diamond sheet with side length of 4-10mm and thickness of 0.1-0.5mm. Diamond is the hardest known substance in the world, has excellent mechanical, optical, thermal and other properties, and is a guarantee for stable and reliable service of high-performance equipment and high-performance parts.
(2) The laser beam is picosecond laser, and the pulse width is 100-300ps. The picosecond laser has small pulse width and high single pulse energy, so the continuous processing time in the same area of the sample is short, the influence of a heat effect can be reduced, and the picosecond laser is suitable for processing materials with high hardness and high melting point, so the picosecond laser is selected to process the diamond.
(3) And (3) putting the sample into an alcohol solution, ultrasonically cleaning for 5-10min, and drying the sample by utilizing compressed air. The sample is required to be cleaned before being subjected to laser processing, contaminants such as impurities on the surface of the sample are removed, and the alcohol is a common non-toxic organic cleaning solvent, so that the sample is placed into an alcohol solution for ultrasonic cleaning, and the sample is dried after being cleaned so as to ensure the cleanness of the sample and prevent the influence on the processing quality caused by the action of laser and liquid in the processing process.
(4) Adhering a polyimide adhesive tape with the thickness of 20-60 mu m on the surface of a sample, horizontally fixing the sample on a workbench, and adjusting the height of the workbench to enable the surface of the sample to be processed to be positioned on a laser beam focal plane, wherein the geometric center of the sample is taken as the origin of a processing center. Adhering a layer of polyimide on the surface of the sample so as to protect the surface of the diamond in the metal film plating process and enable the metal film to be plated in the groove; polyimide with the thickness of 20-60 mu m is used because the polyimide is high-temperature resistant, the heat generated in the laser processing process cannot influence the protective film, and the laser processing time can be prolonged due to the excessively thick protective film; the vertical groove is processed, a sample needs to be horizontally fixed on the workbench, so that the laser beam is vertical to a processing surface, the energy is most concentrated at the laser focal plane, the energy density is highest, the processing efficiency is highest, and the processing precision can be improved.
(5) And opening the laser beam and the nitrogen auxiliary gas, scanning the laser beam on the surface of the sample, and processing a vertical through hole groove with the width of 30-50 mu m and the length of 30-50 mu m. The auxiliary gas is opened in the laser scanning process, so that the slag can be removed, the part to be processed and the processed part are kept clean, and the cooling effect is achieved.
(6) The sample stage is rotated 360/n degrees around the center, n =10-20, and step (5) is repeated. In order to ensure that the gyro harmonic oscillator has high symmetry, a regular polygon structure is processed, and the processing parameters are consistent.
(7) Repeating the step (6) n-1 times; in order to ensure that the gyro harmonic oscillator has high symmetry, a regular polygon structure is processed, and the processing parameters are consistent.
(8) And (4) moving the sample table along the X-axis direction by 20-60 mu m, repeating the steps (5) - (7) and processing the vertical through hole groove. In order to ensure that the gyro harmonic oscillator has high symmetry, a regular polygon structure is processed, and the processing parameters are consistent.
(9) And (5) repeating the step (8). In order to ensure that the gyro harmonic oscillator has high symmetry, a regular polygon structure is processed, and the processing parameters are consistent.
(10) Taking out the sample, putting the sample into an alcohol solution, ultrasonically cleaning for 5-10min, and drying the sample by utilizing compressed air. And ultrasonically cleaning in alcohol to remove residues and pollutants on the surface of the sample.
(11) And plating a layer of metal film on the sample by using a magnetron sputtering method, wherein the thickness of the metal film in the groove area is 10-20nm. In order to make the via trench conductive, a metal film is plated by using focused ion beam finishing.
(12) Roughly repairing the groove by using a focused ion beam, wherein the beam current of the ion beam is 30kV and 50-120pA. The surface roughness and damage layer after laser processing are large, which seriously affect the precision of the device and require trimming by using a focused ion beam.
(13) And (3) finely trimming the groove by using a focused ion beam, wherein the ion beam current is 5kV and 20-50pA. After the large beam ion beam is corrected, an amorphous layer is formed, so that the small beam is needed to be used for removing the amorphous, and the nano-scale precision manufacturing is realized.
(13) Removing the polyimide adhesive tape on the surface of the sample, and putting the sample into an alcohol solution for ultrasonic cleaning for 5-10min. The polyimide tape functions to protect the diamond surface during plating, and after processing, the tape needs to be removed and ultrasonically cleaned in an alcohol solution.
The method has the effects and benefits that the surface of a sample is scanned by utilizing a laser beam, a groove array is processed, a layer of metal film is plated in the groove by utilizing a magnetron sputtering method, and rough trimming and fine trimming are carried out on the groove by utilizing focused ion beams, so that the diamond gyro harmonic oscillator nano-fine manufacturing is realized.
Detailed Description
The following further describes the specific embodiments of the present invention in combination with the technical solutions.
Examples
The method comprises the steps of placing a diamond sample with the length of 6mm, the width of 6mm and the thickness of 0.3mm in an alcohol solution, ultrasonically cleaning for 8min, blow-drying by compressed air, adhering a polyimide adhesive tape with the thickness of 50 mu m on the surface of the sample, horizontally fixing the sample on a workbench, adjusting the height of the workbench to enable the surface to be processed of the sample to be positioned on a focal plane of a laser beam, using the geometric center of the sample as the original point of a processing center, using picosecond laser as the laser and auxiliary gas nitrogen as the laser, opening the laser beam and the auxiliary gas nitrogen to enable the laser beam to scan on the surface of the sample, processing a vertical through hole groove with the width of 35 mu m and the length of 45 mu m, rotating the sample platform 30 degrees along the center for 11 times in total, processing 12 vertical through hole grooves with the same interval, moving the sample platform 40 mu m along the X-axis direction for each time, processing vertical through hole grooves with the same size, plating a layer of metal film on the sample by a magnetic control method, enabling the thickness of the metal film in a groove area to be 20nm, establishing a straight angle beam current, roughly repairing the groove by using an adhesive tape, roughly repairing pA, using ion beam, roughly repairing the ion beam, removing the sample for 1208 kV, placing the sample in an alcohol solution, cleaning for 2kV sample, placing the sample in the sample, cleaning, and cleaning for 2 kV ultrasonic ion beam, and cleaning, wherein the sample surface of the sample, and then placing the sample in the sample, and cleaning, and drying the sample, and drying process.
Claims (1)
1. A method for manufacturing a diamond gyro harmonic oscillator nanometer is characterized in that a sample table rotates and moves, a laser beam is used for scanning the surface of a sample, a groove array is processed, a magnetron sputtering method is used for plating a layer of metal film in a groove, focused ion beams are used for roughly trimming and finely trimming the groove, and the diamond gyro harmonic oscillator nanometer precision manufacturing is realized, and the method comprises the following steps:
(1) The sample is a diamond sheet with the side length of 8-10mm and the thickness of 0.1-0.5mm;
(2) The laser beam is picosecond laser, and the pulse width is 100-300ps;
(3) Putting the sample into alcohol, ultrasonically cleaning for 5-10min, and drying the sample by utilizing compressed air;
(4) Sticking a polyimide adhesive tape with the thickness of 20-60 mu m on the surface of a sample, horizontally fixing the sample on a workbench, and adjusting the height of the workbench to enable the surface of the sample to be processed to be positioned on a laser beam focal plane, wherein the geometric center of the sample is taken as the origin of a processing center;
(5) Opening a laser beam and nitrogen auxiliary gas to enable the laser beam to scan on the surface of the sample, and processing a vertical through hole groove with the width of 30-50 mu m and the length of 30-50 mu m;
(6) Rotating the sample table by 360/n degrees along the center, wherein n =10-20, and repeating the step (5);
(7) Repeating the step (6) n-1 times;
(8) Moving the sample table along the X-axis direction by 20-60 μm, repeating the steps (5) - (7), and processing a vertical through hole groove;
(9) Repeating the step (8);
(10) Taking out the sample, putting the sample into alcohol, ultrasonically cleaning for 5-10min, and drying the sample by utilizing compressed air;
(11) Plating a layer of metal film on the sample by using a magnetron sputtering method, wherein the thickness of the metal film in the groove area is 10-20nm;
(12) Roughly repairing the groove by using a focused ion beam, wherein the beam current of the ion beam is 30kV and 50-120pA;
(13) Finely trimming the groove by using a focused ion beam, wherein the beam current of the ion beam is 5kV and 20-50pA;
(14) Removing the polyimide adhesive tape on the surface of the sample, and putting the sample into alcohol for ultrasonic cleaning for 5-10min.
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| CN114227451B (en) * | 2021-11-18 | 2022-11-01 | 华中光电技术研究所（中国船舶重工集团公司第七一七研究所） | Quality trimming method for hemispherical harmonic oscillator |
| CN115852329A (en) * | 2022-12-19 | 2023-03-28 | 中国科学院高能物理研究所 | Processing method of transmission type multilayer film optical element |
| CN117226440B (en) * | 2023-11-15 | 2024-02-02 | 四川图林科技有限责任公司 | Harmonic oscillator configuration of two-piece hemispherical resonator gyroscope and processing method thereof |
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