RU2525715C1 - Method of assembling sensing element of micromechanical sensor - Google Patents

Abstract

FIELD: instrumentation.

SUBSTANCE: in the process of assembling the sensing element of micromechanical sensor the glass lining and crystal of monocrystalline silicon are combined, installed and clamped in a special device, warmed up, kept at a predetermined temperature and the required voltage is supplied. At that two glass linings and crystal of monocrystalline silicon are combined simultaneously, located between them, they are heated to a temperature of 410°C, kept for 1.5 hours, the voltage is supplied to both linings for not less than two minutes, the voltage is switched off, the polarity of the voltage is changed, the voltage is applied again and the cycle of changing polarity is repeated at least three times.

EFFECT: simplification and reduction of technological cycle of assembling sensing element of micromechanical sensor.

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Description

The invention relates to the field of instrumentation and can be used in the manufacture of sensitive elements used in the manufacture of micromechanical accelerometers, microgyroscopes, integrated pressure sensors.

A known method of assembling microaccelerometers, which consists in the sequential installation of the frame coil, welding the torsion bars in the sensor housing, installation on the frame coil of the sensor plate of the displacement transducer [1].

The disadvantage of this method is the complexity of the assembly and the high qualification of the collector.

A known method of assembling sensitive elements, which consists in combining a glass lining and a crystal of single-crystal silicon, installation and clamping in a special device, heating to a temperature of 400 ° C, holding at this temperature for 1 hour and applying voltage of 700 V to the glass lining and silicon crystal [2].

The disadvantage of this method is that the anode connection is carried out with only one glass lining. To connect with the second glass lining, an additional operation of combining, installing in a special device, heating, holding and applying voltage is required.

The problem to which the invention is directed is to simplify and reduce the assembly cycle of a sensitive element of a micromechanical sensor.

The problem is solved due to the fact that in a method of assembling a sensitive element of a micromechanical sensor, which consists in combining a glass lining and a crystal of single-crystal silicon, installing and clamping in a special device, heating, holding at a given temperature and applying voltage, two glass plates are combined at the same time and a single crystal silicon crystal located between them, and supply a voltage of at least 160 V to both plates for at least two minutes, disconnect the voltage e, carry out a change in the polarity of the voltage, apply voltage again, repeat the cycle of changing the polarity at least three times.

Distinctive features from the well-known is that a simultaneous combination of two glass plates with a crystal of single-crystal silicon is carried out, as well as their anode connection. Moreover, the voltage is applied to the glass plates from above and below, as well as the repetition of cycles with a change in polarity. In this case, the anode connection is carried out at a voltage of at least 160 V, which is much lower than in the prototype.

Figure 1 shows a diagram for implementing the proposed method, where:

1 - glass plates;

2 - a crystal of single-crystal silicon;

3 - power source;

4 - heating source;

5 - electric furnace.

The method is as follows. First, combine two glass plates with a crystal of single-crystal silicon. Then put the assembled structure in a special device. After that, it is clamped under a certain force until optical contact is created between the glass plates and a single-crystal silicon crystal. Spend heating to a temperature of 410 ° C. Stand at this temperature for 1.5 hours. Assemble the circuit according to figure 1. A voltage of 160 V is applied for two minutes, while observing during this period of time the current in the circuit decreases to almost zero at a constant speed. Turn off the power. Change the polarity. Again turn on the food for two minutes. Repeat the cycle of polarity reversal at least three times. Allow to cool with the oven. Get out of the oven at a temperature not exceeding plus 80 ° C.

Thus, the manufacture of sensitive elements by the proposed method allows to reduce the technological cycle and at the same time connect two glass plates with a crystal of single-crystal silicon.

Information sources

1. Capillary accelerometer AK5-15, TU 611.781.TU. 1984 year

2. US patent No. 6537938 (prototype).

Claims (1)

A method of assembling a sensitive element of a micromechanical sensor, which consists in combining a glass lining and a crystal of single-crystal silicon, installing and clamping in a special device, heating, holding at a given temperature and applying voltage, characterized in that two glass plates and a crystal of single-crystal silicon are combined simultaneously, located between them, and supply a voltage of at least 160 V to both plates for at least two minutes, turn off the voltage, change the polarity voltage, apply voltage again, repeat the cycle of polarity change at least three times.