CN100535594C - Weak pulse signal synchronous detection apparatus - Google Patents
Weak pulse signal synchronous detection apparatus Download PDFInfo
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- CN100535594C CN100535594C CNB2005100943529A CN200510094352A CN100535594C CN 100535594 C CN100535594 C CN 100535594C CN B2005100943529 A CNB2005100943529 A CN B2005100943529A CN 200510094352 A CN200510094352 A CN 200510094352A CN 100535594 C CN100535594 C CN 100535594C
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- air chamber
- airflow line
- thermistor
- detection
- base
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Abstract
The detection device has a hollow body which is formed from cover plate and base seat which are bonded together and is equipped with gas cavity, micro-jet small hole and gas stream pipeline. The external end of gas stream pipeline is led to the exterior of said synchronous detection device, and the internal end of said gas stream pipeline is communicated with gas cavity by means of micro-jet small hole. Said detection device also includes the components of film sheet, first capacitor plate, second capacitor plate, first thermistor and second thermistor.
Description
Technical field
The present invention relates to sensing technology, relate in particular in a kind of little spray microfluid inertia angular-rate sensor, the fluid in the microsize scope distributes and detects the extraction element of the gyro sensitive signal that declines.
Background technology
The Corioli's force that utilizes rotational angular velocity to produce can change space velocity, the Density Distribution of fluid.The unevenness that distributes can show heat conducting unevenness aspect.Can detect heat conducting unevenness by the heated type temperature-sensing element (device).In little gyro, the mobile of fluid (gas) is to realize by micro-spray technology.Temperature detection realizes with semiconductor thermistor.People drive fluid motion with piezoelectricity or the to-and-fro movement of electric capacity electrostatic force driven diaphragm, and diaphragm is a side of air chamber.Air chamber externally has an aperture, and aperture externally produces the pulse pneumatic jeting effect.The resistance of semiconductor thermistor is not only relevant with temperature, and the microstrain that causes with suffered mechanical force is relevant.In small integral structure, semiconductor thermistor and diaphragm connect firmly on same matrix, the mechanical wave that the diaphragm to-and-fro movement is produced seriously changes the resistance of semiconductor thermistor, and this is a kind of serious disturbance signal (to call mechanical disturbance in the following text) that the oneself produces that installs.In small integral structure, the serious oneself that the stray capacitance between the close mutually circuit has produced another kind of form again disturbs (disturbing to call electric field in the following text).
The big several times of signal that mechanical disturbance and electric field interference ratio Ke Shi power produce, and have identical fundamental frequency.With machinery symmetry, be can these two kinds of interference of cancellation on the differential method principle that disappears mutually of electric symmetry, but but be difficult on the technology realize.
Summary of the invention
Technical matters: the purpose of this invention is to provide the extraction element that a kind of fluid distribution in the microsize scope detects the gyro sensitive signal that declines, that is: Weak pulse signal synchronous detection apparatus in little spray microfluid inertia angular-rate sensor.
Technical scheme: Weak pulse signal synchronous detection apparatus of the present invention by cover plate and base be bonded together form a hollow body with air chamber, little spray aperture, airflow line, the outside of this sync detection device is led in the outer end of airflow line, the inner of airflow line is communicated with air chamber by little spray aperture, upper surface in air chamber is provided with diaphragm, first capacitor plate is positioned on the base of air chamber bottom, second capacitor plate be positioned at air chamber top the downside of diaphragm; First thermistor, second thermistor lay respectively on the airflow line interior cover plate and base.
The another kind of structure of this pick-up unit is to form being bonded together by cover plate and base in the pick-up unit of a hollow body with air chamber, little spray aperture, airflow line, the outside of this sync detection device is led in the outer end of airflow line, the inner of airflow line is communicated with air chamber by little spray aperture, be provided with light beam on opposite and go into transparency window, outside light beam is gone into transparency window, be provided with semiconductor laser with the symmetrical air chamber of little spray aperture.
Because the movement velocity of air pulse is slower than the pulsating wave in the solid (mechanical disturbance), slower than impulse electric field interferencing propagation speed certainly.When pulse machine ripple and the responsive silk of impulse electric field arrival conductor temperature, air pulse is no show also, and it all is to disturb that the signal of the responsive part of semiconductor is during this period of time exported.If adopt concussion excitation continuously, the method for continuous monitoring, useful signal all has been mixed in together with disturbing.If excitation and detection hocket, mistiming gas pulses contracted affreightment between-line spacing, and excitation and the certain phase-locking of detection difference.Then can avoid to a great extent disturbing.
Have only the cyclical variation of air pressure in the air chamber, just can use young hole and produce air pulse.The periodically variable method of air pressure in two kinds of driving gas chambeies is proposed: electric capacity electrostatic force method, light injection method here.
1, electric capacity electrostatic force method
The upside of air chamber is capacitor plate and the diaphragm that connects together, and the downside capacitor plate links to each other with pedestal.Add voltage on the electric capacity two-plate, the electrostatic force on the pole plate makes diaphragm flexes, thereby has changed the air chamber volume, and then changes cavity pressure.Institute's making alive is the alternating voltage that has direct current biasing on the pole plate, or pulse voltage.
2, light injection method
Gas can produce thermal expansion after being injected into heat, thereby produces gas pressure change.The pulsed light that semiconductor laser is sent injects the air inlet body cavity, can produce instantaneous temperature, and then changes cavity pressure.The aforementioned artificial interference that this method produced is little, but still can not avoid fully on the technology, so the method that still needs above-mentioned excitation and detection to hocket.
Beneficial effect: compared with prior art, the present invention has following advantage:
1, owing to adopt excitation and detect the scheme that hockets, reduced mechanical disturbance and electric field and disturbed;
2, owing to use the air pulse of Corioli's force deflection, can adopt AC coupling in the testing circuit, reduce the difficulty of static direct current adjustment at zero point;
3, owing to adopt Sampling Integral device circuit, improved the Detection of weak ability.
Description of drawings
Fig. 1 is the structural representation of the Weak pulse signal synchronous detection apparatus of use when adopting electric capacity electrostatic force method to measure.Wherein Fig. 1 a is the sectional structure synoptic diagram, and Fig. 1 b is the plan structure synoptic diagram.
Fig. 2 be use when adopting the light injection method to measure the structural representation of Weak pulse signal synchronous detection apparatus.Wherein Fig. 2 a is the sectional structure synoptic diagram, and Fig. 2 b is the plan structure synoptic diagram.
Have among the above figure: little spray aperture 1, first thermistor 2, second thermistor 3, the air-flow 4 that is subjected to Corioli's force deflection, cover plate 5, air chamber 6, diaphragm 7, first capacitor plate 8, second capacitor plate 9, base 10, airflow line 11, light beam are gone into transparency window 12, semiconductor laser 13.
Fig. 3 is an embodiment of the invention electrical block diagram.
Fig. 4 is the structural representation of sampling integrating circuit U2 in Fig. 3 circuit.
Fig. 5 is the sequential chart of time sequence adjusting circuit U5 in Fig. 3 circuit.
Embodiment
The Weak pulse signal synchronous detection apparatus that uses when the present invention adopts electric capacity electrostatic force method to measure by cover plate 5 and base 10 be bonded together form a hollow body with air chamber 6, little spray aperture 1, airflow line 11, the outside of this sync detection device is led in the outer end of airflow line 11, the inner of airflow line 11 is communicated with air chamber 6 by little spray aperture 1, be provided with diaphragm 7 in the upper surface of air chamber 6, first capacitor plate 8 is positioned on the base 10 of air chamber 6 bottoms, second capacitor plate 9 be positioned at air chamber 6 tops the downside of diaphragm 7; First thermistor 2, second thermistor 3 lay respectively on the cover plate 5 and base 10 in the airflow line 11.
Use when the present invention adopts the light injection method to measure Weak pulse signal synchronous detection apparatus by cover plate 5 and base 10 be bonded together form a hollow body with air chamber 6, little spray aperture 1, airflow line 11, the outside of this sync detection device is led in the outer end of airflow line 11, the inner of airflow line 11 is communicated with air chamber 6 by little spray aperture 1, and first thermistor 2, second thermistor 3 lay respectively on the cover plate 5 and base 10 in the airflow line 11.Be provided with light beam on opposite and go into transparency window 12, outside light beam is gone into transparency window 12, be provided with semiconductor laser 13 with the symmetrical air chamber 6 of little spray aperture 1.
Have among Fig. 3,4: the semiconductor first thermistor R1, the semiconductor second thermistor R2, balance is adjusted resistance R 5, R6, current-limiting resistance R3, R4, differential amplifier U1, dc isolation circuit capacitor C 3, dc isolation circuit resistance R 7, Sampling Integral device U2, amplifier U3, clock U4, time sequence adjusting circuit U5, amplification driving circuit U6, electrostatic force drives capacitor C 1, direct current biasing resistance R 8, DC-isolation capacitor C 2.If do not adopt electric capacity electrostatic force to drive, and adopt the light injection method, replace electrostatic force to drive capacitor C 1, DC-isolation capacitor C 2, direct current biasing resistance R 8 with laser instrument LAS, current-limiting resistance R9.The integrating circuit principle wherein has as shown in Figure 4: differential amplifier U7, capacitor C 4, resistance R 10, amplifier U8 form integrating circuit, integral restrictor SW1, integrator reset switch SW2, sampling holder U9, the logic control S3 of sampling holder.
By the first thermistor R1, the second thermistor R2, balance is adjusted resistance R 5, R6, and current-limiting resistance R3, R4 form unbalanced bridge; Bridge current is heated thermistor, the air pulse 4 of Corioli's force deflection has changed the radiating condition of two thermistors, make self temperature difference of two resistance, thereby the variation of resistance difference appears, the voltage of bridge circuit output changes, the pulse that this amplitude that variation forms and air pulse is synchronous changes.Differential amplifier U1 takes out differential wave from unbalanced bridge and amplifies.DC-isolation capacitor C 3 filtering static direct current compositions allow pulsed quantity pass through.Sampling Integral device U2 carries out integration in the moment paired pulses amount that sequential is distributed, and has solved Detection of weak.Amplifier U3 finishes the last amplification and the output of signal., clock source U4, time sequence adjusting circuit U5 produce time clock, the work of control Sampling Integral device, and produce driving pulse.Driving pulse is exported via amplifier.Amplifier U6 output voltage can drive on the capacitor plate through be added to electrostatic force every straight coupling capacitance.8 pairs of electrostatic force of direct current biasing resistance R drive electric capacity and add bias voltage.When adopting light beam to go into scheme, amplifier output voltage provides pulse direct current through current-limiting resistance R9 to laser diode LAS.
The method of adjustment of unbalanced bridge is: adjust current-limiting resistance R3, R4 and make the sensitivity of the bridge circuit two arms interchange common mode interference that vibration causes to mechanical disturbance identical, exchange common mode output near zero; The adjustment balance is adjusted resistance R 5, R6 makes the static output of bridge circuit near zero.
The sequential of time sequence adjusting circuit U5 as shown in Figure 5.S1 is more backward than drive control signal S4 for the sampling integral control signal, sampling integral control signal S1 action n time, integrator is output as a ladder sawtooth wave, finish the logic control S3 action of n integration post-sampling retainer, integrated value (staircase waveform peak value) is kept in the sampling holder, the control signal of integration zero clearing afterwards S2 action, electric charge is by return-to-zero on the capacitor C 4, drive control signal S4 → sampling integral control signal S1 (n time) → retentive control signal S3 → zero clearing control signal S2 beginning that circulates next time.N is big more, and signal to noise ratio (S/N ratio) is big more, but the tracking velocity of system is slow more.
Claims (2)
1. Weak pulse signal synchronous detection apparatus, it is characterized in that this pick-up unit comprises by cover plate (5) and base (10) is bonded together, form one and have air chamber (6), little spray aperture (1), the hollow body of airflow line (11), the outside of this sync detection device is led in the outer end of airflow line (11), the inner of airflow line (11) is communicated with air chamber (6) by little spray aperture (1), be provided with diaphragm (7) in the upper surface of air chamber (6), first capacitor plate (8) is positioned on the base (10) of air chamber (6) bottom, and second capacitor plate (9) is positioned at the downside of the diaphragm (7) of air chamber (6) upper surface; First thermistor (2), second thermistor (3) lay respectively on airflow line (11) the interior cover plate (5) and base (10); Employing excitation and detection mode alternately make mistiming gas pulses contracted affreightment between-line spacing, and excitation and the certain phase locked mode of detection difference, reduce interference; Adopt Sampling Integral device circuit, improved the Detection of weak ability.
2. Weak pulse signal synchronous detection apparatus, it is characterized in that being bonded together comprising by cover plate (5) and base (10), form one and have air chamber (6), little spray aperture (1), in the pick-up unit of the hollow body of airflow line (11), the outside of this sync detection device is led in the outer end of airflow line (11), the inner of airflow line (11) is communicated with air chamber (6) by little spray aperture (1), be provided with light beam on opposite and go into transparency window (12), outside light beam is gone into transparency window (12), be provided with semiconductor laser (13) with the symmetrical air chamber (6) of little spray aperture (1); First thermistor (2), second thermistor (3) lay respectively on airflow line (11) the interior cover plate (5) and base (10); Employing excitation and detection mode alternately make mistiming gas pulses contracted affreightment between-line spacing, and excitation and the certain phase locked mode of detection difference, reduce interference; Adopt Sampling Integral device circuit, improved the Detection of weak ability.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100943529A CN100535594C (en) | 2005-09-14 | 2005-09-14 | Weak pulse signal synchronous detection apparatus |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100943529A CN100535594C (en) | 2005-09-14 | 2005-09-14 | Weak pulse signal synchronous detection apparatus |
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| Publication Number | Publication Date |
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| CN1740744A CN1740744A (en) | 2006-03-01 |
| CN100535594C true CN100535594C (en) | 2009-09-02 |
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| CNB2005100943529A Expired - Fee Related CN100535594C (en) | 2005-09-14 | 2005-09-14 | Weak pulse signal synchronous detection apparatus |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105606091A (en) * | 2015-12-21 | 2016-05-25 | 中国科学院长春光学精密机械与物理研究所 | All-time interferometric measuring star sensor |
| CN106053930B (en) * | 2016-07-06 | 2018-11-23 | 西北核技术研究所 | A kind of anti-random noise without switch weak signal synchronous integration measuring device and measuring method |
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2005
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Non-Patent Citations (2)
| Title |
|---|
| 差动电容敏感式力学传感器的信号提取电路. 王宏伟，张伟等.电子元件与材料，第22卷第3期. 2003 |
| 差动电容敏感式力学传感器的信号提取电路. 王宏伟，张伟等.电子元件与材料，第22卷第3期. 2003 * |
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Granted publication date: 20090902 Termination date: 20120914 |