RU2306524C1 - Multi-probe module for scanning microscope - Google Patents

Abstract

FIELD: probe scanning microscopy, in particular, devices for providing observation, measurement and modification of object surfaces.

SUBSTANCE: multi-probe module for scanning microscope contains a cartridge with probes, engaged with rotation motor, held on the base. Also, a tubular piezo-scanner is additionally introduced, by one end held on base and containing a flange. The cartridge is made in form of a set of overhanging supports with probes, mounted on the flange with possible movements relatively to it and interaction with pusher, engaged with rotation drive. Probes are made in form of quartz resonators with sharp edges. Variants are disclosed, in which overhanging supports are mounted on the flange by means of flat springs, or via joints. The pusher may be made in form of a stop, mounted in the cartridge, with possible interaction with overhanging supports and the flange, while the cartridge is positioned with possible rotation relatively to the flange. The pusher is made in form of first platform with three supports, first ends of which are engaged with the flange, and second ends are positioned with possible interaction with overhanging supports, while shapes of profiles of second ends of supports from the edge to the middle change in accordance with rule y=1/x². The pusher is made in form of second platform with three rollers, positioned with possible interaction with flange and overhanging supports and mounted on second platform with possible rotation. A variant is possible, according to which the pusher is engaged with rotation motor with possible disconnection from it. On the flange a contact element may be held, and quartz resonators may be positioned with possible interaction with it via electric clamps.

EFFECT: increased precision of measurements and reliability of device.

9 cl, 6 dwg

Description

The invention relates to the field of scanning probe microscopy, and more particularly, to devices for monitoring, measuring and modifying the surface of objects.

Known cantilever for scanning probe microscope (SPM) containing a base to which several beams with needles are attached, and the beams are made of different lengths and are fixed on one edge of the base or along the edge of the hole located inside the base with negative values of the angle between them [1].

The main disadvantage of such a device is the length and complexity of the cantilever replacement procedure in the case of dull or broken probes, or in the case of other measurements, such as electromagnetic forces, in the same region of the sample. This procedure requires the removal of the measuring head and manual installation of a new cantilever. In addition, there are problems with cantilever probes falling into the same scanning region on the sample.

Also known is a multi-probe module for a scanning microscope, containing a cassette with probes, coupled to a rotation drive mounted on the base [2].

This device is selected as a prototype of the proposed solution.

The first disadvantage of this device is that the cartridge is mounted directly on a rotating element, in a particular case, a rotation drive, and this makes it difficult to place it on a piezoscanner, which reduces the functionality of the device.

The second disadvantage of this device is the use of cantilevers with an optical registration system in this device. It also narrows the functionality of the use of this device, due to the impossibility of its use, for example, in cryostats.

The technical result of the invention is to expand the functionality of the device.

The specified technical result is achieved by the fact that in the multi-probe module for a scanning microscope containing a cassette with probes, coupled to a rotation drive mounted on the base, a tubular piezoscanner is introduced, one end mounted on the base and containing a flange, while the cassette is made in the form of a set of brackets with probes mounted on the first flange with the possibility of movement relative to it and interaction with the pusher associated with the rotation drive, and the probes are made in the form of quartz resonators with sharp s.

There are options in which the brackets are mounted on the flange by means of flat springs, or through hinges.

There are also options in which the pusher is made in the form of a stop mounted in a cage, with the possibility of interaction with brackets and a flange, while the cage is rotatably relative to the flange, or the pusher is made in the form of a first platform with three supports, the first ends of which are paired with flange, and the second ends are arranged to interact with the brackets, while the shapes of the profiles of the second ends of the supports from edge to middle vary according to the law y = 1 / x ² .

There is also an option in which the pusher is made in the form of a second platform with three rollers arranged to interact with the flange and brackets and mounted on the second platform for rotation.

A variant is possible in which the pusher is interfaced with a rotation drive with the possibility of opening with it.

A variant is also possible in which a contact element is fixed on the flange, and the quartz resonators are arranged to interact with it with electrical leads.

Figure 1 shows a multi-probe module for a scanning microscope.

Figure 2 shows the option of fixing the bracket on the flange.

Figure 3 - the first embodiment of the manufacture of the pusher.

Figure 4 is a second embodiment of the manufacture of the pusher.

Figure 5 shows the working position of the probe.

Figure 6 shows the multi-probe module in the SPM.

The multi-probe module for a scanning microscope contains a tubular piezoscanner 1, consisting of a first piezotube 2, fixed by the first end 3 to the base element 4. The second end 5 of the first piezotube 2 is connected via the adapter 6 to the first end 7 of the second piezotube 8, on the second end of which 9 a flange is fixed 10. A cassette 11 with probes 12 is installed on the flange 10, consisting of a set of brackets 13 in which these probes can be fixed by means of glue.

The probes 12 are made in the form of quartz resonators with tips 14. In one embodiment, the brackets 13 are mounted on the flange 10 by means of flat springs 15. The flat springs 15 are mounted on the brackets 13 with screws 16 through the first gaskets 17, and on the flange 10 with screws 18 through the second gaskets 19 . At the same time, on the flange 10, by means of screws 18, racks 20 are mounted on which a contact element 21 with contact pads (not shown) is fixed. Quartz resonators 12 are installed in such a way that it is possible to electrically connect their terminals 22 with the contact pads of the element 21.

A pusher 23 is also installed on the flange 10, made, for example, in the form of a cage 24 with a stop 25. The first stop 25 (for example, a ball) is located in the hole 26 for rotation of the cage 24, which is installed in the flange 10 and is coupled to the rotation drive 27, mounted on the base 28. This pairing is carried out by means of a gripper 29 arranged to interact with a slot 30 made in an adapter 31 connected to the rod 32 of the actuator 27. A guide 33 can be installed in the base 28 to interact with by the walker 31. In this case, the guide 33 can be fixed in the base 28 through its shoulders 34 and through the elastic element 35, which can be preloaded by the drive 27.

The base element 4 can be connected to the base 28 via struts 36.

It should be noted that in a particular case the scanner may consist of one piezotube (not shown).

In one embodiment, the bracket 37 (Fig. 2) is mounted on the flange 10 (pivotally) by means of the axis 38 and the gripper 39. At the same time, the spring 40 can be fixed on the flange 10 with the possibility of interaction with the bracket 37 and pressing it to the clip 24.

There is an option in which the pusher is made in the form of a first platform 41 (FIG. 3) with three supports 42, the first ends of which 43 are mated to the flange 10, and the second 44 are arranged to interact with the brackets 13 (37). Moreover, the shapes of the profiles of the second ends 44 from edge to middle can be measured according to the law y = 1 / x ² .

There is also an embodiment of the pusher, in which two rollers 47 are mounted in the second platform 45 (Fig. 4) with the possibility of rotation and interaction with the flange 10 and the brackets 13 (37) (Locking rings for not falling out of the rollers are not shown).

The multi-probe module 48 (FIG. 6) as part of the SPM 49 can be mounted on a preliminary alignment unit 50 and paired with the cassette with probes 51 to the measurement object 52.

A piezoscanner, quartz resonators (via a contact element) and a rotation drive are connected to the SPM control unit (not shown separately).

The device operates as follows. Rotating the yoke 24 (FIG. 1), the actuator 27 lifts one of the brackets 10 with a stop so that the tip 14 is above the level of the remaining tips (see also FIG. 5). The findings of 22 quartz resonators 12 relate to the contact pads of element 21. From the SPM control unit, an alternating voltage is supplied to the inputs of 22 quartz resonators 12, exciting them at a natural frequency. After this, the approach of the tip 14 with the object is carried out. After approaching, they scan the surface of the object 52. For more details on the operation of quartz resonators as probes of scanning microscopes, see [3, 4].

After completing the work with one probe, for example, after its failure, the object 52 is withdrawn from the tip 14. Then, the clip 24 is rotated and the next tip is raised, after which the process is repeated.

The implementation of the cartridge in the form of a set of brackets with quartz resonators with points mounted on the flange of the piezoscanner expands the functionality of the device.

The use of flat springs simplifies the design, and the use of hinges makes it more reliable due to the possibility of its use in high-tech systems, such as cryochambers, high-vacuum chambers, etc.

The use of an emphasis in the clip simplifies the design, and the use of a platform with three supports, as well as in the form of three rollers, increases the accuracy of the position of the tip.

The described effects expand the functionality of the device.

The coupling of the pusher with the rotation drive with the possibility of opening with it reduces the mechanical effect of the drive during scanning.

The use of a contact element minimizes the number of conductive wires and also reduces their mechanical effect during scanning.

Reducing mechanical influences increases the resolution of the device.

Information sources

1. Patent RU 2124251, 1998.

2. Patent RU 2244256, 2005.

3. Patent RU 2008763, 2003.

4. Patent RU 2251071, 2005.

Claims (9)

1. A multi-probe module for a scanning microscope, comprising a cassette with probes, coupled to a rotation drive fixed to the base, characterized in that a tubular piezoscanner is inserted into it, fixed at one end and containing a flange, the cartridge being made in the form of a set of brackets with probes mounted on the flange with the possibility of movement relative to it and interaction with the pusher associated with the rotation drive, and the probes are made in the form of quartz resonators with tips. 2. The device according to claim 1, characterized in that the brackets are mounted on the flange by means of flat springs. 3. The device according to claim 1, characterized in that the brackets are mounted on the flange by means of hinges. 4. The device according to claim 1, characterized in that the pusher is made in the form of a stop mounted in a holder, with the possibility of interaction with brackets and a flange, while the holder is rotatably relative to the flange. 5. The device according to claim 1, characterized in that the pusher is made in the form of a first platform with three supports, the first ends of which are paired with a flange, and the second ends are arranged to interact with brackets. 6. The device according to claim 5, characterized in that the shapes of the profiles of the second ends of the supports from edge to middle vary according to the law y = 1 / x ² . 7. The device according to claim 1, characterized in that the pusher is made in the form of a second platform with three rollers arranged to interact with the flange and brackets and mounted on the second platform for rotation. 8. The device according to claim 1, characterized in that the pusher is interfaced with a rotation drive with the possibility of opening with it. 9. The device according to claim 1, characterized in that the contact element is fixed on the flange, and the quartz resonators are arranged to interact with it with electrical leads.

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