RU2095494C1 - Installation for manufacturing polycrystalline silicon rods - Google Patents

Abstract

FIELD: semiconductor materials. SUBSTANCE: invention concerns polycrystalline silicon rods as starting material for growing silicon monocrystals. Installation contains split reactor, vertical mount, container, lifter, component-supply system, and transport carriage. Upper part of reactor is rigidly fastened to vertical mount and its lower part is mobile. Lifter is installed on mount guides and is joined by the aid of lock means with lower part of reactor or with container. Upper part of reactor has current leads with mounting units for carriers. Container has sockets with bottom dampers disposed in accordance with disposition of current leads. To lower part of reactor are ran: component-supply line from component-supply unit and removal line for gas and liquid reaction products. Loading of reactor is performed by way of lifting container with carriers installed in sockets. Operator standing on service platform should install carriers into mounting units on current leads. Then, lower part 8 is set by means of lifter under reactor, lifted, and joined with upper part. Polycrystalline silicon rods are grown by chlorosilane hydrogen reduction technique. Produce is discharged into container sockets. EFFECT: improved design. 3 cl, 5 dwg

Description

 The invention relates to the production of semiconductor materials, in particular to the production of polycrystalline silicon rods as a feedstock for growing silicon single crystals.

 A known design of the installation for producing silicon polycrystals "Polycrystal" 24-3-01, containing a reactor made in the form of a sealed cylindrical vessel, inside of which are located the current leads on the bottom bottom, on which bases for growing silicon polycrystals are vertically mounted on the attachment points. The top of the camera is made removable. Installing the basics on the current leads and unloading the rods is done manually with the housing removed.

 The disadvantage is the possibility of bending vertically arranged bases when growing polycrystalline silicon, followed by their contact with each other, which causes a short circuit. In addition, when cooling the grown rods, they may crack and when unloading the rods manually with clogging of the growing zone, which increases the time and complexity of the setup preparation cycle for the next growth.

 Also known is the design of a plant for producing polycrystalline silicon, comprising a detachable reactor mounted on a support structure, a power supply system and component supply. The reactor is a vertical sealed cylindrical vessel, consisting of a cylindrical shell and two bottoms. Windows are located in the cylindrical shell. The movable part of the reactor is made in the form of window covers, upon opening which a loading and unloading zone is formed with access to the internal cavity. On the upper wall of the reactor there are current leads with fastening nodes for the bases on which the bases are suspended for growing polycrystalline silicon rods on them by the hydrogen reduction of chlorosilanes. The supply and installation of the basics to the current leads is done manually through the windows. Through the same windows, the grown rods are unloaded after they have cooled down by breaking off the suspension points of the current leads and manually removing from the reactor cavity one by one (see A.Ya. Noshelsky. “Production of semiconductor materials” M. Metallurgy, 1989, p. 125).

 This design is taken as a prototype.

 The disadvantages of the known design are the high complexity of a single feed basics for growing, removing and stacking the grown rods. It is possible contamination and damage to the foundations for growing during loading, which causes poor-quality silicon.

 The essence of the invention lies in the fact that the installation for producing polycrystalline silicon rods containing a detachable reactor, a part of which with current leads located on its upper wall with fastening nodes of the bases is mounted on a supporting structure, and the other part is movable relative to the first part with the formation of a loading and unloading zone, power supply and component supply, is equipped with a container with sockets, made in accordance with the placement of current leads, and means of orienting it in the load primary unloading area and vertical movement.

 The supporting structure is made in the form of a vertical strut, the reactor is made with a horizontal connector and its upper part is fixedly mounted on the strut, which is equipped with guides on which a hoist is installed with a locking device made with the possibility of coupling with the lower part of the reactor and the container. In addition, the nests of the container are equipped with bottom shock absorbers.

 New is that the installation is equipped with a container with sockets made in accordance with the placement of current leads, and means of orienting it in the loading and unloading zone and vertical movement. The support structure is made in the form of a vertical rack, the reactor is made with a horizontal connector and its upper part is fixedly mounted on the rack, which is equipped with guides on which a hoist is installed with a locking device made with the possibility of coupling with the lower part of the reactor and the container, in addition, the container jack equipped with bottom shock absorbers.

 By supplying the installation with a container with sockets made in accordance with the location of the current leads and means of orientation in the loading and unloading zone and vertical movement, it is possible to simultaneously feed the basics into the loading zone, orienting them with respect to the current leads, eliminating the possibility of contamination and damage to the bases, increasing thereby the quality of the resulting silicon. In addition, the complexity of unloading is reduced due to the simultaneous removal of the grown polycrystalline silicon rods from the unloading zone. At the same time, the possibility of contamination of the loading and unloading zone in the event of the destruction of the rods is excluded.

 We analyzed various options for the location of the plane of the reactor connector, and, accordingly, the location of the loading and unloading zone. For example, the reactor vessel has a connector in the vertical plane, the container can be composite, the loading and unloading zone is located on the side of the installation, etc. Analysis showed that the most optimal option is the one selected in which the reactor is made with a horizontal connector, the supporting structure is in the form of a vertical racks, fixing the upper part of the reactor to the rack, which is equipped with guides on which a hoist with a locking device is mounted, made with the possibility of coupling with the lower part of the reactor and container, which allows you to create a loading and unloading zone from the bottom of the installation, providing the convenience of removing the bottom of the reactor vessel undocked by a lift, feeding the container under the grown rods, orienting it and lifting it with subsequent unloading, and also for servicing the reactor in order to prepare it for the next growing cycle. The supply of container nests with bottom shock absorbers reduces the possibility of destruction of the grown rods during their unloading and removal from the growing zone.

 All other options for the implementation of the connector of the reactor, and therefore the location of the loading and unloading zone complicate the sealing elements, complicate the design of the container, increase the complexity and reduce the reliability of the installation.

 In FIG. 1 shows a setup for producing polycrystalline silicon rods, general view; in FIG. 2 container with the basics in the loading position; in FIG. 3 container with the basics before loading; in FIG. 4 container on the lift at the time of unloading; in FIG. 5 container on a cart with rods after unloading.

 The installation for producing polycrystalline silicon rods includes a detachable reactor 1, a vertical rack 2, a container 3, a hoist 4, a component supply system 5, a transport trolley 6. The upper part 7 of the reactor 1 is fixedly mounted on the vertical rack 2, the lower part 8 of the reactor 1 is made mobile. The elevator 4 is mounted on rails 9 of the rack 2 and the locking device 10 is coupled to the lower part of the reactor 8 or to the container 3. In the upper part 7 of the reactor there are current leads 11 with a mounting unit for the bases 12. The container 3 has slots 13 with bottom shock absorbers 14 arranged in accordance with the placement of current leads 11. To the lower part of the reactor 8 are connected the component supply lines from the component supply unit 5 and the removal line for gaseous and liquid reaction products. The installation has a service platform 15.

 Installation works as follows. Before the start of the process in the loading position, the container 3 with the bases 6 installed in the sockets 13 is transported on the trolley 6 to the reactor 1, from which the lower part 8 is undocked, oriented and lifted up to the loading position using the elevator 4. The apparatchik, who is at the service site 15, installs the basics 16 in the attachment points 12 to the current leads 11. After that, the container 3 is lowered by a lift 4 onto the carriage 6 and is taken away. The lower part 8 is brought under the reactor 1, the elevator 4 rises and joins the upper part 7. The process of growing polycrystalline silicon rods by the hydrogen reduction of chlorosilanes is carried out, after which the lower part of the reactor 8 is undocked, the elevator 4 is lowered to the trolley 6 and transported to the side. The container 3 on the trolley 6 is brought under the reactor 1 and the elevator 4 rises to the unloading position until the lower ends of the grown rods 17 come in contact with the bottom shock absorbers 14 of the nests 13 of the container 3. The apparatchik, bypassing the reactor 1 along the service platform 15, alternately separates silicon polycrystal rods 11 from the current leads 11 17, which remain fixed in the sockets 13 of the container 3. Then the container 3 with the rods of polycrystals of silicon 17 is lowered by a lift 4 down onto the trolley 6 and is removed from the loading and unloading zone.

Claims (3)

 1. Installation for the production of polycrystalline silicon rods containing a detachable reactor, part of which with current leads located on its upper wall with the attachment points of the bases is mounted on a supporting structure, and the other part is movable relative to the first part with the formation of a loading and unloading zone, an electrical power system and component supply, characterized in that it is equipped with a container with sockets made in accordance with the placement of current leads, and means of orienting it in the loading and unloading zone and vertical movement.  2. Installation according to claim 1, characterized in that the support structure is made in the form of a vertical rack, the reactor is made with a horizontal connector, and its upper part is fixedly mounted on the rack, which is equipped with guides on which a hoist is installed with a locking device made with the possibility of coupling with the bottom of the reactor and the container.  3. Installation according to p. 1, characterized in that the nests of the container are equipped with bottom shock absorbers.

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