RU2017139160A - A method of obtaining a wear-resistant coating for cutting tools - Google Patents

A method of obtaining a wear-resistant coating for cutting tools Download PDF

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Publication number
RU2017139160A
RU2017139160A RU2017139160A RU2017139160A RU2017139160A RU 2017139160 A RU2017139160 A RU 2017139160A RU 2017139160 A RU2017139160 A RU 2017139160A RU 2017139160 A RU2017139160 A RU 2017139160A RU 2017139160 A RU2017139160 A RU 2017139160A
Authority
RU
Russia
Prior art keywords
wear
resistant coating
obtaining
cutting tools
titanium
Prior art date
Application number
RU2017139160A
Other languages
Russian (ru)
Other versions
RU2697592C2 (en
RU2017139160A3 (en
Inventor
Владимир Петрович Табаков
Алексей Валерьевич Чихранов
Дамир Ильдарович Сагитов
Original Assignee
федеральное государственное бюджетное образовательное учреждение высшего образования "Ульяновский государственный технический университет"
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
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Application filed by федеральное государственное бюджетное образовательное учреждение высшего образования "Ульяновский государственный технический университет" filed Critical федеральное государственное бюджетное образовательное учреждение высшего образования "Ульяновский государственный технический университет"
Priority to RU2017139160A priority Critical patent/RU2697592C2/en
Publication of RU2017139160A3 publication Critical patent/RU2017139160A3/ru
Publication of RU2017139160A publication Critical patent/RU2017139160A/en
Application granted granted Critical
Publication of RU2697592C2 publication Critical patent/RU2697592C2/en

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C23C14/0057—Reactive sputtering using reactive gases other than O2, H2O, N2, NH3 or CH4
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C23C14/0068—Reactive sputtering characterised by means for confinement of gases or sputtered material, e.g. screens, baffles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0664—Carbonitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)

Claims (1)

Способ получения износостойкого покрытия для режущего инструмента, включающий вакуумно-плазменное нанесение покрытия, отличающийся тем, что наносят износостойкое покрытие из нитрида или карбонитрида титана, кремния, алюминия, хрома и железа при их соотношении, мас. %: титан 57,09, кремний 0,81, алюминий 9,31, хром 31,46, железо 1,33, а нанесение покрытия осуществляют расположенными горизонтально в одной плоскости тремя катодами, первый из которых выполняют из сплава титана, кремния и алюминия, второй - составной из хрома и железа и располагают противоположно первому, а третий изготавливают из титана и располагают между ними.A method of obtaining a wear-resistant coating for cutting tools, including vacuum-plasma coating, characterized in that they wear a wear-resistant coating of nitride or carbonitride of titanium, silicon, aluminum, chromium and iron in their ratio, wt. %: titanium 57.09, silicon 0.81, aluminum 9.31, chromium 31.46, iron 1.33, and coating is carried out by three cathodes arranged horizontally in one plane, the first of which is made from an alloy of titanium, silicon and aluminum the second is a composite of chromium and iron and is placed opposite to the first, and the third is made of titanium and placed between them.
RU2017139160A 2017-11-10 2017-11-10 Method of producing wear-resistant coating for cutting tool RU2697592C2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
RU2017139160A RU2697592C2 (en) 2017-11-10 2017-11-10 Method of producing wear-resistant coating for cutting tool

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
RU2017139160A RU2697592C2 (en) 2017-11-10 2017-11-10 Method of producing wear-resistant coating for cutting tool

Publications (3)

Publication Number Publication Date
RU2017139160A3 RU2017139160A3 (en) 2019-05-13
RU2017139160A true RU2017139160A (en) 2019-05-13
RU2697592C2 RU2697592C2 (en) 2019-08-15

Family

ID=66548724

Family Applications (1)

Application Number Title Priority Date Filing Date
RU2017139160A RU2697592C2 (en) 2017-11-10 2017-11-10 Method of producing wear-resistant coating for cutting tool

Country Status (1)

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RU (1) RU2697592C2 (en)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE0402180D0 (en) * 2004-09-10 2004-09-10 Sandvik Ab Deposition of Ti1-xAlxN using Bipolar Pulsed Dual Microwave Sputtering
RU2548862C2 (en) * 2013-07-12 2015-04-20 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Method of wear-resistant coating obtainment for cutting tool
RU2561579C2 (en) * 2013-12-03 2015-08-27 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Method for obtaining wear-resistant coating for cutting tool

Also Published As

Publication number Publication date
RU2697592C2 (en) 2019-08-15
RU2017139160A3 (en) 2019-05-13

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MM4A The patent is invalid due to non-payment of fees

Effective date: 20191111