RU2016137077A3 - - Google Patents

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Publication number
RU2016137077A3
RU2016137077A3 RU2016137077A RU2016137077A RU2016137077A3 RU 2016137077 A3 RU2016137077 A3 RU 2016137077A3 RU 2016137077 A RU2016137077 A RU 2016137077A RU 2016137077 A RU2016137077 A RU 2016137077A RU 2016137077 A3 RU2016137077 A3 RU 2016137077A3
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RU
Russia
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RU2016137077A
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Russian (ru)
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RU2016137077A (en
RU2653399C2 (en
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Priority to RU2016137077A priority Critical patent/RU2653399C2/en
Publication of RU2016137077A publication Critical patent/RU2016137077A/en
Publication of RU2016137077A3 publication Critical patent/RU2016137077A3/ru
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Publication of RU2653399C2 publication Critical patent/RU2653399C2/en

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RU2016137077A 2016-09-15 2016-09-15 Method of amorphous oxide of aluminum coating by reactive evaporation of aluminum in low pressure discharge RU2653399C2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
RU2016137077A RU2653399C2 (en) 2016-09-15 2016-09-15 Method of amorphous oxide of aluminum coating by reactive evaporation of aluminum in low pressure discharge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
RU2016137077A RU2653399C2 (en) 2016-09-15 2016-09-15 Method of amorphous oxide of aluminum coating by reactive evaporation of aluminum in low pressure discharge

Publications (3)

Publication Number Publication Date
RU2016137077A RU2016137077A (en) 2018-03-20
RU2016137077A3 true RU2016137077A3 (en) 2018-03-20
RU2653399C2 RU2653399C2 (en) 2018-05-08

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Family Applications (1)

Application Number Title Priority Date Filing Date
RU2016137077A RU2653399C2 (en) 2016-09-15 2016-09-15 Method of amorphous oxide of aluminum coating by reactive evaporation of aluminum in low pressure discharge

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RU (1) RU2653399C2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2697749C1 (en) * 2018-08-20 2019-08-19 федеральное государственное бюджетное образовательное учреждение высшего образования "Уфимский государственный авиационный технический университет" Method of increasing resistance of metal cutting tool

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4675089A (en) * 1985-11-25 1987-06-23 At&T Technologies, Inc. Low temperature deposition method for high quality aluminum oxide films
JP3399399B2 (en) * 1999-04-14 2003-04-21 株式会社村田製作所 Infrared sensor and method of manufacturing the same
RU2432634C1 (en) * 2010-07-14 2011-10-27 Общество с ограниченной ответственностью "БАРГАН ТЕХНОЛОДЖИ" (ООО "БТЕХ") Multilayer nanocomposite for capacitors and method of its manufacturing
JP5876724B2 (en) * 2011-12-27 2016-03-02 三菱マテリアル株式会社 Surface coated cutting tool with excellent chipping resistance, peel resistance and wear resistance
JP6544555B2 (en) * 2015-01-15 2019-07-17 国立研究開発法人物質・材料研究機構 Method of manufacturing resistance variable element

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Publication number Publication date
RU2016137077A (en) 2018-03-20
RU2653399C2 (en) 2018-05-08

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