RU2016137077A3 - - Google Patents
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- RU2016137077A3 RU2016137077A3 RU2016137077A RU2016137077A RU2016137077A3 RU 2016137077 A3 RU2016137077 A3 RU 2016137077A3 RU 2016137077 A RU2016137077 A RU 2016137077A RU 2016137077 A RU2016137077 A RU 2016137077A RU 2016137077 A3 RU2016137077 A3 RU 2016137077A3
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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RU2016137077A RU2653399C2 (en) | 2016-09-15 | 2016-09-15 | Method of amorphous oxide of aluminum coating by reactive evaporation of aluminum in low pressure discharge |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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RU2016137077A RU2653399C2 (en) | 2016-09-15 | 2016-09-15 | Method of amorphous oxide of aluminum coating by reactive evaporation of aluminum in low pressure discharge |
Publications (3)
Publication Number | Publication Date |
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RU2016137077A RU2016137077A (en) | 2018-03-20 |
RU2016137077A3 true RU2016137077A3 (en) | 2018-03-20 |
RU2653399C2 RU2653399C2 (en) | 2018-05-08 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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RU2016137077A RU2653399C2 (en) | 2016-09-15 | 2016-09-15 | Method of amorphous oxide of aluminum coating by reactive evaporation of aluminum in low pressure discharge |
Country Status (1)
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RU (1) | RU2653399C2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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RU2697749C1 (en) * | 2018-08-20 | 2019-08-19 | федеральное государственное бюджетное образовательное учреждение высшего образования "Уфимский государственный авиационный технический университет" | Method of increasing resistance of metal cutting tool |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
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US4675089A (en) * | 1985-11-25 | 1987-06-23 | At&T Technologies, Inc. | Low temperature deposition method for high quality aluminum oxide films |
JP3399399B2 (en) * | 1999-04-14 | 2003-04-21 | 株式会社村田製作所 | Infrared sensor and method of manufacturing the same |
RU2432634C1 (en) * | 2010-07-14 | 2011-10-27 | Общество с ограниченной ответственностью "БАРГАН ТЕХНОЛОДЖИ" (ООО "БТЕХ") | Multilayer nanocomposite for capacitors and method of its manufacturing |
JP5876724B2 (en) * | 2011-12-27 | 2016-03-02 | 三菱マテリアル株式会社 | Surface coated cutting tool with excellent chipping resistance, peel resistance and wear resistance |
JP6544555B2 (en) * | 2015-01-15 | 2019-07-17 | 国立研究開発法人物質・材料研究機構 | Method of manufacturing resistance variable element |
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- 2016-09-15 RU RU2016137077A patent/RU2653399C2/en active
Also Published As
Publication number | Publication date |
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RU2016137077A (en) | 2018-03-20 |
RU2653399C2 (en) | 2018-05-08 |