RU2011145603A - METHOD FOR PRODUCING THE MATRIX OF A MULTI-HAZED AUTO EMISSION CATHODE ON MONOCRYSTAL SILICON - Google Patents

METHOD FOR PRODUCING THE MATRIX OF A MULTI-HAZED AUTO EMISSION CATHODE ON MONOCRYSTAL SILICON Download PDF

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RU2011145603A
RU2011145603A RU2011145603/07A RU2011145603A RU2011145603A RU 2011145603 A RU2011145603 A RU 2011145603A RU 2011145603/07 A RU2011145603/07 A RU 2011145603/07A RU 2011145603 A RU2011145603 A RU 2011145603A RU 2011145603 A RU2011145603 A RU 2011145603A
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matrix
crystal silicon
emission cathode
silicon wafers
hazed
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RU2011145603/07A
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Russian (ru)
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RU2484548C1 (en
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Равиль Кяшшафович Яфаров
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Равиль Кяшшафович Яфаров
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  • Crystals, And After-Treatments Of Crystals (AREA)
  • Cold Cathode And The Manufacture (AREA)

Abstract

1. Способ изготовления матрицы многоострийного автоэмиссионного катода в виде композиционной наноалмазографитовой пленки, синтезированной в плазме микроволнового газового разряда паров углеводородных веществ, например, этанола в диапазоне давлений от 0,05 до 0,08 Па и температуре подложки от 200 до 350°С, отличающийся тем, что пленки осаждают толщиной от 1 до 1,5 нм на поверхность пластин монокристаллического кремния, которые подвергают высокотемпературному отжигу с последующим высокоанизотропным травлением на определенную глубину, которая зависит от температуры пластины в процессе осаждения углеродной пленки.2. Способ по п.1, отличающийся тем, что для увеличения поверхностной плотности столбчатых эмиссионных центров синтез композиционной наноалмазографитовой пленки на пластинах монокристаллического кремния проводят при более высоких температурах.1. A method of manufacturing a matrix of a multi-tip field emission cathode in the form of a composite nanodiamond film synthesized in a plasma of a microwave gas discharge of hydrocarbon vapor, for example, ethanol in the pressure range from 0.05 to 0.08 Pa and the substrate temperature from 200 to 350 ° C, the fact that the films are deposited with a thickness of 1 to 1.5 nm on the surface of single-crystal silicon wafers, which are subjected to high-temperature annealing followed by high-anisotropic etching to a certain depth, which Avis from the plate temperature during the deposition of carbon plenki.2. The method according to claim 1, characterized in that in order to increase the surface density of columnar emission centers, the synthesis of a composite nanodiamond film on single-crystal silicon wafers is carried out at higher temperatures.

Claims (2)

1. Способ изготовления матрицы многоострийного автоэмиссионного катода в виде композиционной наноалмазографитовой пленки, синтезированной в плазме микроволнового газового разряда паров углеводородных веществ, например, этанола в диапазоне давлений от 0,05 до 0,08 Па и температуре подложки от 200 до 350°С, отличающийся тем, что пленки осаждают толщиной от 1 до 1,5 нм на поверхность пластин монокристаллического кремния, которые подвергают высокотемпературному отжигу с последующим высокоанизотропным травлением на определенную глубину, которая зависит от температуры пластины в процессе осаждения углеродной пленки.1. A method of manufacturing a matrix of a multi-tip field emission cathode in the form of a composite nanodiamond film synthesized in a plasma of a microwave gas discharge of hydrocarbon vapor, for example, ethanol in the pressure range from 0.05 to 0.08 Pa and the substrate temperature from 200 to 350 ° C, the fact that the films are deposited with a thickness of 1 to 1.5 nm on the surface of single-crystal silicon wafers, which are subjected to high-temperature annealing followed by high-anisotropic etching to a certain depth, which Avis from the plate temperature during the carbon film deposition. 2. Способ по п.1, отличающийся тем, что для увеличения поверхностной плотности столбчатых эмиссионных центров синтез композиционной наноалмазографитовой пленки на пластинах монокристаллического кремния проводят при более высоких температурах. 2. The method according to claim 1, characterized in that to increase the surface density of the column emission centers, the synthesis of a composite nanodiamond film on wafers of single-crystal silicon is carried out at higher temperatures.
RU2011145603/07A 2011-11-09 2011-11-09 Method for manufacture of matrix of multipoint autoemissive cathode based on single-crystal silicon RU2484548C1 (en)

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RU2600505C1 (en) * 2015-06-23 2016-10-20 федеральное государственное автономное образовательное учреждение высшего образования "Нижегородский государственный университет им. Н.И. Лобачевского" Method of forming epitaxial array of monocrystalline nanoislands of silicon on sapphire substrate in vacuum
RU2654522C1 (en) * 2016-06-22 2018-05-21 Акционерное общество "Научно-исследовательский институт молекулярной электроники" (АО "НИИМЭ") Method for increasing current density and degradation resistance of auto-emission codes on silicon plates
RU2653843C2 (en) * 2016-08-01 2018-05-15 Акционерное общество "Научно-производственное предприятие "Алмаз" (АО "НПП "Алмаз") Method of increasing the density and stability of a matrix current of a multiple auto-emission cathode
RU2652651C2 (en) * 2016-09-15 2018-04-28 Федеральное государственное бюджетное учреждение науки Институт радиотехники и электроники им. В.А. Котельникова Российской академии наук Method of the multi-pin auto emission cathode matrix manufacturing on a mono-crystalline silicon
RU2770303C1 (en) * 2021-04-20 2022-04-15 Акционерное общество "Научно-производственное предприятие "Алмаз" (АО "НПП "Алмаз") Nanocarbon material for suppression of secondary electron emission and method for its production

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KR20000035592A (en) * 1998-11-19 2000-06-26 가네코 히사시 Carbon material, method for manufacturing the same material, field-emission type cold cathode using the same material and method for manufacturing the same cathode
KR100307310B1 (en) * 1999-01-27 2001-10-29 송자 Manufacturing method for nano-size diamond whisker
KR101307032B1 (en) * 2005-06-22 2013-09-11 엘리멘트 식스 리미티드 High colour diamond layer
RU2309480C2 (en) * 2005-08-04 2007-10-27 Федеральное государственное унитарное предприятие "НПП "Контакт" Material and method for manufacturing multipoint field-emission cathode
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