RU2009105207A - METHOD FOR PRODUCING MEMBRANES WITH REGULAR NANOPORES FROM VENTIAL METAL OXIDES - Google Patents
METHOD FOR PRODUCING MEMBRANES WITH REGULAR NANOPORES FROM VENTIAL METAL OXIDES Download PDFInfo
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- RU2009105207A RU2009105207A RU2009105207/05A RU2009105207A RU2009105207A RU 2009105207 A RU2009105207 A RU 2009105207A RU 2009105207/05 A RU2009105207/05 A RU 2009105207/05A RU 2009105207 A RU2009105207 A RU 2009105207A RU 2009105207 A RU2009105207 A RU 2009105207A
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Abstract
1. Способ изготовления мембран с регулярными нанопорами из оксидов вентильных металлов, включающий формирование методом анодирования на одной стороне металлической фольги или тонкой металлической пленки из вентильного металла высокой чистоты слоя анодного оксида с гексагональной канализированной столбчатой структурой, последующее ионно-плазменное травление неанодированной стороны фольги или тонкой металлической пленки до удаления оставшегося металла и сплошного барьерного слоя оксида, закрывающих каналы, и образования в оксидной пленке сквозных наноотверстий. ! 2. Способ по п.1, отличающийся тем, что в качестве материала фольги или тонкой пленки используют высокочистые металла из ряда алюминий, титан, тантал, ниобий, магний, цирконий. ! 3. Способ по п.1, отличающийся тем, что анодирование осуществляют в потоке электролита, направляемого на анодируемую поверхность. ! 4. Способ по п.1, отличающийся тем, что анодирование осуществляют в потенциостатическом режиме при напряжениях 20-60 B и температурах электролита в диапазоне 18-80°C. ! 5. Способ по п.1, отличающийся тем, что ионно-плазменное травление осуществляют потоком плазмы аргона или криптона или ксенона с энергией ионов 300-400 эВ. 1. A method of manufacturing membranes with regular nanopores from valve metal oxides, comprising the formation by anodizing on one side of a metal foil or a thin metal film of high purity valve metal a layer of anode oxide from a hexagonal channelized columnar structure, followed by ion-plasma etching of the non-anodized side of the foil or thin a metal film to remove the remaining metal and a continuous oxide barrier layer covering the channels and form in the oxide film of through nanoholes. ! 2. The method according to claim 1, characterized in that as the material of the foil or thin film using high-purity metal from a number of aluminum, titanium, tantalum, niobium, magnesium, zirconium. ! 3. The method according to claim 1, characterized in that the anodization is carried out in a stream of electrolyte directed to the anodized surface. ! 4. The method according to claim 1, characterized in that the anodization is carried out in a potentiostatic mode at voltages of 20-60 V and electrolyte temperatures in the range of 18-80 ° C. ! 5. The method according to claim 1, characterized in that the ion-plasma etching is carried out by a plasma stream of argon or krypton or xenon with an ion energy of 300-400 eV.
Claims (5)
Priority Applications (1)
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RU2009105207/05A RU2405621C2 (en) | 2009-02-17 | 2009-02-17 | Method of producing membranes with regular nanopores from barrier-film metal oxides |
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RU2009105207/05A RU2405621C2 (en) | 2009-02-17 | 2009-02-17 | Method of producing membranes with regular nanopores from barrier-film metal oxides |
Publications (2)
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RU2009105207A true RU2009105207A (en) | 2010-08-27 |
RU2405621C2 RU2405621C2 (en) | 2010-12-10 |
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RU2009105207/05A RU2405621C2 (en) | 2009-02-17 | 2009-02-17 | Method of producing membranes with regular nanopores from barrier-film metal oxides |
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Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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RU2474466C1 (en) * | 2011-08-09 | 2013-02-10 | Федеральное государственное автономное образовательное учреждение высшего профессионального образования "Дальневосточный федеральный университет" | Method of making aluminium oxide-based membranes |
RU2678055C2 (en) * | 2017-07-14 | 2019-01-22 | ООО "Нелан-оксид плюс" | Elastic alumina nano-membrane obtaining method |
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RU2405621C2 (en) | 2010-12-10 |
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Effective date: 20160218 |