RU2001132917A - Homogenous gas-vapor mixture dispenser - Google Patents

Homogenous gas-vapor mixture dispenser

Info

Publication number
RU2001132917A
RU2001132917A RU2001132917/28A RU2001132917A RU2001132917A RU 2001132917 A RU2001132917 A RU 2001132917A RU 2001132917/28 A RU2001132917/28 A RU 2001132917/28A RU 2001132917 A RU2001132917 A RU 2001132917A RU 2001132917 A RU2001132917 A RU 2001132917A
Authority
RU
Russia
Prior art keywords
vapor mixture
homogenous gas
dispenser
mixture dispenser
tubes
Prior art date
Application number
RU2001132917/28A
Other languages
Russian (ru)
Other versions
RU2227903C2 (en
Inventor
Михаил Александрович Скоробогатов
Алексей Николаевич Долгов
Юрий Николаевич Гурский
Original Assignee
Акционерное общество открытого типа "НИИ молекулярной электроники и завод "Микрон"
Filing date
Publication date
Application filed by Акционерное общество открытого типа "НИИ молекулярной электроники и завод "Микрон" filed Critical Акционерное общество открытого типа "НИИ молекулярной электроники и завод "Микрон"
Priority to RU2001132917/28A priority Critical patent/RU2227903C2/en
Priority claimed from RU2001132917/28A external-priority patent/RU2227903C2/en
Publication of RU2001132917A publication Critical patent/RU2001132917A/en
Application granted granted Critical
Publication of RU2227903C2 publication Critical patent/RU2227903C2/en

Links

Claims (1)

Дозатор гомогенной парогазовой смеси, содержащий резервуар с реагентом, нагреватель, размещенный во внутренней трубке, систему регулирования температуры, камеру испарения с патрубками, образованную двумя эксцентрично расположенными одна в другой трубками, образующими щелевой переменного поперечного сечения капиллярный зазор вдоль трубок, отличающийся тем, что в капиллярном зазоре, в нижней части поверхности внутренней трубки нанесены по всей ее длине капиллярные каналы с острошероховатой внутренней поверхностью.A dispenser of a homogeneous vapor-gas mixture containing a reservoir with a reagent, a heater placed in the inner tube, a temperature control system, an evaporation chamber with nozzles formed by two tubes eccentrically arranged in one another, forming a slotted variable cross-section, a capillary gap along the tubes, characterized in that capillary gap, in the lower part of the surface of the inner tube, capillary channels with a sharply roughened inner surface are applied along its entire length.
RU2001132917/28A 2001-12-06 2001-12-06 Apparatus for metering homogenous gas-vapor mixture RU2227903C2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
RU2001132917/28A RU2227903C2 (en) 2001-12-06 2001-12-06 Apparatus for metering homogenous gas-vapor mixture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
RU2001132917/28A RU2227903C2 (en) 2001-12-06 2001-12-06 Apparatus for metering homogenous gas-vapor mixture

Publications (2)

Publication Number Publication Date
RU2001132917A true RU2001132917A (en) 2003-09-27
RU2227903C2 RU2227903C2 (en) 2004-04-27

Family

ID=32464912

Family Applications (1)

Application Number Title Priority Date Filing Date
RU2001132917/28A RU2227903C2 (en) 2001-12-06 2001-12-06 Apparatus for metering homogenous gas-vapor mixture

Country Status (1)

Country Link
RU (1) RU2227903C2 (en)

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