RU1831313C - Cylindrical brush - Google Patents

Abstract

Use: treatment equipment. The inventive cylindrical brush contains coaxially mounted pair of holders with a pile radially fixed between them and means for connecting the holders to each other, made in the form of a cylinder installed between the holders, the outer surface of which has an annular groove, and the conical shape is made on one side of the end an annular recess, and on the other side of the end, a conical annular protrusion is made. Each of the holders is made in the form of a washer with a cone-shaped annular protrusion on one end surface and a cone-shaped annular recess on the other end surface.The holders are installed so that the cone-shaped protrusion of one washer is placed in the recess of the cylinder, and the protrusion of the cylinder is placed in the cone-shaped recess of the other washer. 1 s.p. f-ly, 7 ill.

Description

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WITH

The invention relates to a cleaning technology and is intended for use in precision electronic engineering equipment for washing plates, e.g., semiconductor ones.

The problem to be solved by the claimed invention is the creation of a small-sized cylindrical brush, simple construction, durable, providing high quality cleaning when working in aggressive environments (hydrogen peroxide-ammonia solutions, acids and alkalis).

Moreover, in the present invention, the following technical results should be achieved: the brush should be easy to assemble and disassemble, on the working surface of the brush the distance between the villi should be the same, the pile

must be firmly and reliably fixed in the brush and fall onto the surface to be cleaned, all parts of the brush must be durable npw work in aggressive environments.

In FIG. 1 shows a general sectional view of a cylindrical brush: in FIG. 2 is a sectional view of a pair of holders and a cylinder between them; in FIG. 3 is a perspective view of paired holders and a cylinder between them in a perspective view: in FIG. 4-cylinder; in FIG. 5 - holder; in FIG. 6 is a brush section after pile formation; in FIG. 7 is a sectional view of a hydromechanical plate cleaning installation.

The proposed cylindrical brush contains (Fig. 1, 2) mounted on the axis 1 paired holders 2 and 3 with a radially fixed between them pile 4 and means

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for connecting the holders to each other, the Means for connecting the holders to each other is made in the form of a cylinder 5 mounted between the holders 2 and 3 (Fig. 3), the outer surface of which has an annular groove 6, and an annular conical shape is made on one side of its end face a recess 7, and on the other side of the end face an annular conical protrusion 8. In this case, each of the holders 2 and 3 is made in the form of a washer 9 with a conical protrusion 10 on one of its end surfaces.

Moreover, the holders 2 and 3 are installed so that the conical protrusion 10 of one washer (holder 3) is located in the recess 7 of the cylinder 5, and in the cone-shaped recess 11 of the other washer (holder 2) the protrusion 8 of the cylinder 5 is placed.

A fixed stop 12 is made at one end of the axis 1, and a disk 13 and a pin 14 are made at the other end.

The assembly of this brush is carried out as follows.

Before assembling the brushes, a pile is formed on the cylinder 5, into the groove of which two technological disks 15 are pre-installed. In this case, the grooves of the disks 15 are inserted into the cylinder groove at an angle of 180 °. Winding (shaping) of the pile is carried out mechanically on a machine (not shown).

Then, parts are mounted on the axis 1 from the side of the disk 13 (Fig. 1) along the entire length of the axis in the following order: holder 2, brush section (cylinder 5 with pile 4 and technological disks 15). After assembling the holders and brush sections, a disk 13 is installed along the entire length of the axis, the assembled bag is compressed by axial force, a hole is drilled into parts 13 and I, and a pin 14 is installed. After the pin is installed, its ends are melted as shown in Figs. 1.1

Works cylindrical brush as follows.

The brush is placed in the installation 16 of the hydromechanical cleaning of the plates (Fig. 7). To do this, the brush axis 1 is mounted in clamps 17 connected to a rotation drive (not shown). A cleaning solution is supplied to the plate 18 from the line 19. The brush rotates around its axis and cleans the surface of the plate 18.

The advantages of this brush design are as follows.

The simplicity of the proposed design of the brush is obvious due to the fact that the means for connecting the holders to each other are made in the form of a single cylinder part and are installed between the holders of the proposed shape.

The simplicity of the design of the details of this brush and their mutual connection by type

pyramids allows you to create small-sized brushes.

No deterioration is observed.

. or disappearance of functional properties

of these details. On the contrary, the scope of application of this design of the brush expands, namely, such a brush is used in precision equipment for cleaning and washing plates using chemically active liquids (electronic

5 industry). By preventing degradation in hydrogen peroxide-ammonia environments, the service life of the proposed brush is significantly increased.

Also, thanks to the brush

0 is made of non-metal, the occurrence of excessive reactive pollution in the processing of plates is eliminated. Thus, the main advantages of this design of the brush are the reliable fastening of the pile in the conical connections, holders and connectors, the layout of the attachment points of the pile directly on the surface of the axis, which determines the reduction in the size of the outer diameter

0 brushes, combination, functions of connecting nodes. In, elastic. Elements and holders in two parts - their ybe and disk, the use of chemically resistant materials in the details of the brush allows fi; apply successfully for

5 purification of semiconductor wafers in hydrogen peroxide-ammonia solutions.

Due to the fact that the proposed design of the brush provides for the implementation of the same p ;, measures the width of the cylinder 5,

0 and also widens the holders, and also due to the fact that these D. ales are placed so that they do not contain additional structural elements squeezed between them, you ensure: i not only uniform position in; i: a, but it is increased extremely possible arrangement. This provides v uniformity of the surface treatment of pla (in, which significantly increases the quality of 1 cleaning,

0 invention

Claims (2)

1. The cylinders. a black brush containing coaxially mounted pair holders with a pile fixed between them and means for joining the holders 5 with each other, characterized in that the means connected by i holders are made in the form of a stand i of the cylinder between holders, the surface of which has a ring-shaped groove on the inner surface, and on the inner surface i on one side a conical annular recess is made on the end, and a conical annular protrusion is made on the other side of the end, each of the holders is made in the form of a washer with a conical annular protrusion on one end surface and a cone-shaped annular recess on the other end surface, the holder 153 whether it is installed so that the cone-shaped protrusion of one washer is placed in the recess of the cylinder, and the protrusion of the cylinder is placed in the cone-shaped recess of the other washer. 2. A brush according to claim 1, characterized in that the holders and means for their connection to each other are made of a chemically resistant polymer. 4 P 13 Figure 1 $ Figure 1 with n CD OO tv-e Figl FIG. 5 GP l with with # , f ////// S /. about I to