RU158289U1 - SATUATOR FOR DOSING - Google Patents

Abstract

1. A saturator for dispensing, containing at least one thermostatically controlled chamber-evaporator of liquid or solid substances, characterized in that the chamber-evaporator is located horizontally and has partitions forming channels for the passage of carrier gas. Saturator p. 1, characterized in that the chamber-evaporators are interconnected by tubes for the passage of carrier gas.

Description

The utility model relates to the field of dosing liquid and solid chemicals transported in the form of saturated vapors of a given concentration by a carrier gas stream and can be used in the chemical industry, chemical vapor deposition of coatings, semiconductor manufacturing, and other industries.

Known devices for dispensing liquid vapor, the operation of which is based on the transfer of liquid vapor with a carrier gas passing through the saturation chamber (a.w. RF No. 2242725, IPC G01F 13/00, G05D 11/03 of 02/14/2003). The concentration of liquid vapor in such devices is controlled by changing the position of the damper installed in the saturation chamber above the surface of the liquid. The disadvantages of such devices are: the complexity of the design and assembly technology, the ability to dispense only liquid substances, as well as a significant dependence of the metering accuracy on the flow rate of the carrier gas due to the relatively low saturation rate of the vapor-gas mixture.

As a prototype device, a saturator (bubbler) for steam delivery was selected (application 2006145280/02, IPC C23C 16/448 of 05/17/2005). The prototype allows saturating the carrier gas stream with liquid and solid chemicals and is a prefabricated structure that contains one two or more vertically arranged in series interconnected chamber-evaporators. To increase the completeness of saturation of the carrier gas with evaporated substances, the number of evaporation chambers is increased. The disadvantages of this device are: the large size and complexity of the design of the device, as well as the technical difficulties of maintaining constant the same temperature temperatures in different chambers-evaporators along the path of the carrier gas, which makes it difficult to maintain a constant predetermined concentration of the vaporized substance.

The technical result of the proposed solution is the ability to reduce the dimensions of the device, simplify its design, achieve more accurate maintenance of the same temperatures along the entire path of the carrier gas and, as a result, increase the accuracy of setting the vapor concentration of the vaporized substance in the gas mixture at the outlet of the device in a wide speed range carrier gas flow.

This technical result is achieved in that in a dosing saturator containing at least one thermostatically controlled chamber-evaporator of liquid or solid substances, according to the proposal, the chamber-evaporator is located horizontally and has partitions forming channels for the passage of the carrier gas.

In addition, the evaporator chambers are interconnected by tubes for the passage of carrier gas

The proposed form of the saturator increases the length of the carrier gas over the vaporized substance, leading to an increase in the contact time of the substance with the carrier gas, which helps to obtain saturated vapor of the substance in the gas, that is, it precisely sets the concentration of the substance in the gas at a certain temperature.

The use of several evaporator chambers arranged one above the other allows increasing the length of the carrier gas flow channel, which is important at high flow rates (low saturation time).

In addition, the compact design of the saturator allows you to maintain almost the same evaporation temperature along the entire path of the carrier gas, which also increases the accuracy of setting the concentration of the substance in the gas.

The design of the saturator is illustrated by drawings, where in FIG. 1 shows a dosing saturator, side view; in FIG. 2 - the same, bottom view; in FIG. 3 - saturator for dispensing with two evaporators, side view; in FIG. 4 - the same section AA; in FIG. 5 - the same, section BB; in FIG. 6 - the same section BB.

The dispensing saturator consists of a housing 1 (Fig. 1, 2), hermetically sealed from below by a lid 2 attached by threaded rods 3. Inside the saturator there is a channel 5 of the evaporator chamber, divided by partitions 4, filled with evaporated substance 6. The carrier gas is supplied by the nozzle 7 and the output of vapor-gas mixture saturated with vaporized vapor of the substance is provided by pipe 8.

In FIG. 3-6 shows a saturator with two evaporator chambers. The saturator case 1 contains a lower part, hermetically sealed from below by a cover 2 attached by threaded rods 3. Inside the lower part of the case 1 there is an evaporator channel 5 separated by partitions 4, filled with evaporated substance 6. In the upper part of the 9 saturator there is also a chamber-evaporator 4 divided by partitions the shape of the channel 5, filled with the evaporated substance 6. The lower and upper chamber-evaporators are interconnected by the overflow pipe 10 (Fig. 4). The height of the upper cut of the overflow pipe limits the liquid level of the upper evaporator chamber. The carrier gas is supplied to the channel of the upper chamber of the evaporator through the pipe 7 (Fig. 1, 3), and the output of the vapor-gas mixture saturated with vapor of the vaporized substance is provided by the pipe 8.

A saturator for dosing works as follows.

Through the pipe 7 (Fig. 1), the carrier gas enters the channel 5 of the evaporator chamber (Fig. 2), formed by partitions 4 in the casing 1 of the saturator and partially, approximately 2/3 filled with the evaporated substance 6. When liquid substances are evaporated, they are preliminarily they are poured through nozzle 7. When evaporating solids, the saturator is placed with the lid 2 up, the studs 3 are unscrewed, the lid 2 is removed, the solid substance is poured into the channel 5 of the evaporator chamber, the lid 2 is put in place. The vapor-gas mixture saturated with the vapor of the vaporized substance leaves the nozzle 8. The carrier gas is saturated with the vapor of the vaporized substance in the channel 5 to a concentration corresponding to the theoretical value of the saturated vapor pressure at a given temperature of temperature control of the saturator. Calibration dependences of saturated vapor pressure on temperature are reference values for many substances. To change the vapor concentration of the vaporized substance in the carrier gas, the temperature of the thermostat is changed. The presence of partitions 4 allows you to change the direction of flow of the carrier gas, which contributes to its mixing with the vapor of the vaporized substance and more complete saturation.

A saturator with two chambers-evaporators (Fig. 3-6) has a longer channel for the passage of carrier gas above the vaporized substance. The increase in the length of the channel 5 is advisable, for example, in the case of a relatively high transmission rate of the carrier gas through the saturator. The time spent by the carrier gas above the vaporized substance in this case will be longer than when the gas flows through one chamber-evaporator and the gas has time to fully saturate with the vapor of the vaporized substance.

A saturator for dispensing with two chambers-evaporators works as follows.

Through the pipe 7 (Fig. 3), the carrier gas enters the channel 5 of the evaporator chamber block (Fig. 3, 4), formed by partitions 4 in the saturator body 1 and partially filled with the vaporized substance 6. The vapor-gas mixture saturated with vapor of the vaporized substance exits the pipe 8. To evaporate liquid substances, they are pre-filled through the nozzle 7. First, the upper vaporizer chamber is filled with liquid to the level specified by the overflow nozzle 10 (Fig. 4), then the liquid to be filled through the nozzle 10 fills the lower evaporator chamber.

When solids are evaporated, the saturator is placed with the lid 2 up, the studs 3 are unscrewed, the lid 2 and the lower chamber-evaporator are removed, the solid substance is poured into the channel 5 of the upper and lower chamber-evaporators, then the saturator is assembled and the lid 2 is put in place.

The advantages of the claimed device in comparison with the known is:

1. The increased accuracy of setting the vapor concentration of the vaporized substance in the carrier gas stream.

2. Independence of the vapor concentration of the vaporized substance in the carrier gas stream from the change in the carrier gas flow rate.

3. The simplicity and compactness of the design will contribute to its widespread use.

Claims (2)

1. A saturator for dispensing, containing at least one thermostatically controlled chamber-evaporator of liquid or solid substances, characterized in that the chamber-evaporator is located horizontally and has partitions forming channels for the passage of the carrier gas. 2. Saturator p. 1, characterized in that the chamber-evaporators are interconnected by tubes for the passage of carrier gas.

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