RU102908U1 - TECHNOLOGICAL STAND FOR FINISHING PRODUCTS FROM FRAGILE MATERIALS WITH NANOMETRIC ACCURACY WITH A BLADE TOOL - Google Patents

Abstract

 1. Technological stand for finishing processing of products from brittle materials with nanometric accuracy with a blade tool, including a base installed on the foundation with a bed placed on it, on which are installed the means for basing, aligning and moving the workpiece with a working displacement drive, a working displacement tool unit with a drive movements and tool holder, an optical system for monitoring the position and condition of the cutting edge of the tool, while the stand is equipped with a number system of programmed control of the drives for working displacements of the tool and the product, characterized in that the base is mounted on the foundation by means of vibration-isolating supports, the means of basing, aligning and moving the workpiece are made in the form of a spindle head equipped with a rotating spindle kinematically connected to a vacuum faceplate equipped with a porous base surface and structurally organized with the possibility of spatial orientation of this surface relative to the horizontal plane ty, while the headstock spindle is oriented in a vertical plane by means of angular contact bearings with aerostatic clearance, and its rotation drive is made in the form of an asynchronous electric motor with increased sliding, the unit of working displacements of the tool is structurally organized in the form of a cross support equipped with aerostatic guides: carriage structurally organized with the possibility of stepless precision precision movement with nanometric accuracy in the horizontal direction

Description

The utility model relates to the field of machine tool construction and can be used within the framework of the State program for the modernization and technological development of leading sectors of the national economy through the introduction of the modern level of science and technology in nanotechnology in the field of complex machining by cutting complex products in leading industries that determine the level economic development of the state as a whole.

That is, the preferred direction of use is automated mechatronic processing by cutting the functional layer of products from brittle materials (for example, glass, in particular optical lenses) with a complex spatial profile using modernized machine park and auxiliary equipment (devices) known from the prior art.

The effective use of nanotechnology (for example, in microelectronics) requires, first of all, the development of tools and technology for the manufacture of optical systems with a resolution of tens, or even units of nanometers. Such systems are necessary both for local exposure of light fields to objects of submicron sizes, and for monitoring the flow of various technological processes.

The capabilities of optical designers to create new devices are limited by the manufacturer’s ability to manufacture and control the elements of the required optical system. Advanced developments in the field of optical technology are constantly expanding the production capabilities of optical components. However, production is increasingly becoming attached to metrology. It is this symbiosis of metrology tools and modern processing equipment that make it possible to produce optics of higher quality and complexity.

A technological stand (machine) is known from the prior art for finishing processing of products from brittle materials with nanometric accuracy with a blade tool including a base mounted on a foundation with a bed placed on it, on which are installed: means for basing, adjusting and moving the workpiece with a drive for working movements; assembly of working tool movements with a movement drive and tool holder; optical system for monitoring the position and condition of the cutting edge of the tool; in addition, the stand is equipped with a system of numerical control of the drives for the working displacements of the tool and product (Mochalov A.I., Pisarev A.G., Rakhovsky V.I., Sakharova O.P., Cherpakov B.I., Esterson M.A. ., Yakunin VA, article “Automated high-precision engraving machine for multi-pass planing of drawings of metallographic forms”, Machine tools and tools, No. 9, pp. 21-24, 1999).

The disadvantages of this known solution from the prior art include limited functional and technological capabilities due to the insufficient accuracy of the movements of the tool feed units and their repeatability, as a result of which it is impossible to provide the ductile cutting mode necessary for processing brittle materials, for example, optical glass.

The claimed utility model was based on the task of creating a universal stand, which, in addition to traditional machining modes of products with high accuracy, would ensure processing with nanometric accuracy of products from brittle materials (for example, optical glass) due to the structural and technological feasibility of implementing ductile cutting modes .

Thus, the technical result of the claimed technical solution is to expand the functional and technological capabilities of the stand by increasing the accuracy (as well as stability over time - repeatability) of movements with nanometric accuracy of the tool feed unit.

The technical result achieved is achieved by the fact that in the technological stand for finishing processing of products from brittle materials with nanometric accuracy with a blade tool including a base mounted on the foundation with a bed placed on it, on which are installed: means for basing, aligning and moving the workpiece with a drive for working displacements ; assembly of working tool movements with a movement drive and tool holder; optical system for monitoring the position and condition of the cutting edge of the tool; in addition, the stand is equipped with a system of numerical program control of the drives for working movements of the tool and product, according to the utility model: the base is installed on the foundation by means of vibration-isolating supports; means of basing, aligning and moving the workpiece are made in the form of a spindle head equipped with a rotating spindle kinematically connected to a vacuum faceplate provided with a porous base surface and structurally organized with the possibility of spatial orientation of this surface relative to the horizontal plane, while the spindle is oriented in the vertical plane by means of radially - support bearings of rotation with an aerostatic gap, and the drive of its rotation is made in the form of asynchronous increased slip motor; the unit of working displacements of the tool is structurally organized in the form of a cross support equipped with aerostatic guides: a carriage, structurally organized with the possibility of stepless precision movement in the horizontal direction with nanometric accuracy, for which a magnetostrictive transducer with steps of rough and precise movement of the tool in technological mode; a slider mounted on the guides of the carriage, structurally organized with the possibility of installation movement in the vertical direction; as well as a mortise caliper kinematically connected with a slider with a tool holder, structurally organized with the possibility of stepless precision precision movement with nanometric accuracy in the vertical direction, for which a magnetostrictive transducer with steps of rough and precise tool movement in technological mode has been used as its drive; at the same time, the stand is equipped with an optical system for monitoring the turning process in real time, commutatively connected to the control processor of the numerical control system for the operational adjustment of the work program during the cutting process.

It is advisable that the technological stand was equipped with a cooling system for the cutting part of the tool, structurally organized with the possibility of converting the cooling agent in the area of the cutting part of the tool from the liquid phase to fog.

It is optimal for the tool holder to be structurally organized with the possibility of preventing transmission of low-frequency vibrational vibrations to the tool from the stand nodes in the technological mode.

It is reasonable that the tool holder was mounted on the mortise support with the possibility of combining the top of the front surface of the tool with the center of the workpiece during the movement of the carriage in the technological mode.

An analysis of the prior art by the applicant, including a search by patent and scientific and technical sources of information and identification of sources containing information about analogues of the claimed technical solution, made it possible to establish that the applicant did not find an analogue characterized by features and relationships between them that are identical to all the essential features of the claimed technical solutions, and the prototype selected from the list of identified analogues, as the closest analogue in the set of features, allowed to identify the totality venous (in relation to the technical result perceived by the applicant) distinctive features in the claimed object, set forth in the utility model formula.

Therefore, the claimed technical solution meets the condition of patentability "novelty" under the current law.

The utility model is illustrated by graphic materials, where the presented figure shows a general view of the technological stand (front view).

In graphic materials, the main components and assemblies of the hardware-software technological stand are indicated by the following positions:

1 - base (stand);

2 - bed (stand);

3 - support (cross);

4 - headstock (spindle);

5 - faceplate (vacuum headstock 4 spindle);

6 - axis (spindle headstock 4);

7 - carriage (longitudinal support 3);

8 - slider (transverse caliper 3);

9 - mortise caliper (caliper 3 main);

10 - holder (tool);

11 - drive (magnetostrictive caliper 9 mortise);

12 - remote control (control);

13 - panel (pressure gauges for pneumatic system pressure control);

14 - electrical cabinet.

The claimed technological stand for finishing processing of products from brittle materials with nanometric accuracy with a blade tool includes the following systems of units and assemblies.

Installed on a special foundation (not shown conventionally in graphic materials), base 1 with a frame 2 placed on it. On the frame 2 are mounted:

- means of basing, adjusting and moving the workpiece with a drive of working movements;

- site working displacements of the tool with a drive of working displacements and the holder 10 of the tool;

- an optical system for monitoring the position and condition of the cutting edge of the tool (not conventionally shown in graphic materials).

In addition, the stand is equipped with a system of numerical program control of the drives for the working displacements of the tool and product (not conventionally shown in graphic materials).

Distinctive features of the claimed stand is the following.

The base 1 is installed on the foundation by means of vibration-isolating supports (conventionally not shown in graphic materials). The means of basing, aligning and moving the workpiece are made in the form of a headstock 4, equipped with a rotating spindle (with an axis of rotation 6), kinematically connected with a vacuum faceplate 5, provided with a porous base surface and structurally organized with the possibility of spatial orientation (adjustment) of this surface relatively horizontal the plane. In this case, the spindle is oriented in the vertical plane by means of angular contact bearings with aerostatic clearance (not shown conventionally in graphic materials), and its rotation drive is made in the form of an asynchronous electric motor with increased sliding (not shown conventionally in graphic materials). The unit of working displacements of the tool is structurally organized in the form of a cross support 3 equipped with aerostatic guides installed:

- carriage 7, structurally organized with the possibility of stepless precision movement in the horizontal direction with nanometric accuracy ;;

- mounted on the guides of the carriage 7 of the slider 8, structurally organized with the possibility of installation movement in the vertical direction;

- as well as a mortise caliper 9 kinematically connected with the slider 8 with a tool holder 10, structurally organized with the possibility of stepless precision movement with nanometric accuracy in the vertical direction.

To carry out the aforementioned stepless precision movements with nanometric precision of the carriage 7 and the mortise caliper 9, magnetostrictive transducers (magnetostrictive nanoscrews) with coarse and precise stages of tool movement in the technological mode are used as their drives (the caliper drive 9 is indicated in graphic materials, item 11, and the drive carriage 7 conditionally not shown).

At the same time, the stand is equipped with an optical system for monitoring the turning process in real time (not shown conventionally in graphic materials), which is commutatively connected to the control processor of the numerical program control system for the purpose of operative adjustment of the work program during the cutting process if the formed cutting surface deviates from the set geometric parameters .

It is advisable that the technological stand was equipped with a cooling system for the cutting part of the tool (not shown conventionally in graphic materials), structurally organized with the possibility of converting the cooling agent in the area of the cutting part of the tool from the liquid phase to fog.

It is optimal for the tool holder 10 to be structurally organized with the possibility of preventing transmission of low-frequency vibrational vibrations to the tool from the stand nodes in the technological (dynamic) mode of operation of the stand.

It is reasonable that the tool holder was mounted on the mortise support with the possibility of combining the top of the front surface of the tool with the center of the workpiece during the movement of the carriage in the technological mode.

In more detail, the design features of the above systems and components of the stand with the disclosure of their functional purpose and impact on the perceived technical result, implemented by the stand, are described below.

As mentioned earlier, the technical result characterizing the claimed stand is the increased accuracy of forming the surface profile of the product during diamond turning, equal to +/- 25 nm.

It is possible to control the treated surface within such accuracy, for example, by the method of controlling the surface shape according to the control scheme organized on the basis of the Fizeau interferometer, as the most appropriate for solving the problem.

As mentioned above, for the manufacture of, for example, precision optical lenses, it is necessary to take into account the specifics of processing optical glass and ensure high surface cleanliness in the range Ra = 5-10 Å

This problem is solved in the bench by the accuracy of the installation of the main nodes, as well as by the high accuracy of the nodes themselves and the movements of shaping during the formation, for example, of the lens surface.

The base of the stand with the cabinet is installed on a special foundation on the OV-31 vibration mounts for vibration isolation of the machine from external vibrations. An air preparation unit for aerostatic spindle bearings and feed drive is attached to the base.

To reduce wear on the cutting part of the tool, cooling is used. The coolant may be alcohol, which is fed into the cutting zone in the form of fog and sent to the cutting edge of the tool. To do this, compressed air is supplied to the cylinder with the coolant, creating excessive pressure in it, which displaces the coolant and delivers it to the atomizer.

The headstock 4 is located symmetrically with respect to the vertical axis. The symmetry of the design eliminates the influence of temperature deformations on the skew axis of the spindle in the vertical plane.

The spindle is positioned with a clearance in the angular contact ball bearing. The radial bearing has two rows of blowing holes (20 holes in each row), each thrust bearing also has 20 blowing holes. The chokes at the entrance to the holes are made in the form of cylindrical jets. Jets stand in each blowing hole. The cross section of the holes at the outlet of the nozzles is chosen such that the resistance at the entrance to the blowing holes of the radial and thrust bearings is equal to the resistance of the gap at the outlet of them, i.e. The pressure in the bearing should be half the pressure in the air supply chamber. The exact installation of the axis of rotation of the spindle perpendicular to the guides of the caliper 3 (and, accordingly, the adjustment of the base surface of the faceplate 5) is carried out by the relative displacement of the two spherical mounting rings. When compressed air is supplied into the aerostatic clearance, the spindle floats up and is rigidly centered by a layer of air in the bearing. With reliable drying and air filtration, the spindle rotates smoothly. Acceleration and braking of the spindle is carried out by a built-in asynchronous motor with increased sliding, the rotor of which is attached to the spindle with the help of the adapter shaft, and the stator is attached to the bronze bushing.

To improve the quality of the spindle, the quality of the air preparation is improved by connecting a mod dehydration system. UOV-2 and air purification systems mod. P-PPV 16-12 / 10 GOST 17437-81.

A special vacuum faceplate 5 has been developed for fastening the processed products. In the faceplate 5, channels have been drilled to form a vacuum in the area of the base surface onto which the processed product (lens) is mounted through a special porous carrier block. When creating a vacuum, the processed lens is pressed against the surface of the faceplate 5 and rotates with the spindle. The imbalance of the faceplate 5 is eliminated by means of weights or removal of material. To eliminate the aerodynamic effect that occurs when the faceplate 5 is rotated, it is covered with a special part so that the lens surface protrudes no more than 0.5 mm.

Mortise support 9 serves for the supply and removal of the cutter and fine feed to the depth in the technological mode.

The smooth movement of the corresponding elements of the cross support 3 is provided by aerostatic guides and a hydraulic drive.

The surface shaping of the lens is carried out by specially designed feed drives. Feed drives moving with a resolution of 5 nm and a repeatability of 20 nm are used for final processing, for example, glass in the plastic deformation zone (ductile processing). The high resolution of magnetostrictive storage power drives (for example, drive 11) is achieved by using it to create precise movements of a rod of an alloy of rare-earth elements with metals of the iron group, which has the effect of giant magnetostriction.

The principle of operation of the magnetostrictive nano-screw MN-3 (i.e., drive 11) is based on the method of controlling the magnetomechanical converter. Magnetostrictive nano-screws are designed for linear force displacement of the mortise support 9 with a diamond tool and carriage 7.

With manual adjustment of the nano-screws, it is possible to obtain a step of 1 nanometer, and when using an electric drive, a step of 10 picometers. The main parameters of the power magnetostrictive nanoscrew (drive 11) are shown in table 1.

An electronic device with inductive transducers model BV-6436, designed to measure the linear dimensions of tool movement, is used to control nanoscale movements of the cutter feed drive during turning at the bench.

The inductive converter is fed to the cutter and on the display unit (the device is equipped with a digital indicator, there is an analog output).

To control the shape of the cutting part of the tool, it is proposed to use a television optical system known from the prior art based on television computer microscopes.

The tool, as well as the entire technological system, has requirements to minimize the likelihood of disruption of the processing cycle. With the "blunting" of the cutting edge, the likelihood of a breakage of the cutter increases sharply. Changing the shape of the incisors during processing is periodically monitored by a television computer microscope with an image fed to a personal computer (PC) monitor with a magnification of 625 times.

Thus, for the manufacture of precision lenses, it is necessary to take into account the specifics of glass processing and ensure:

1. The roughness of the treated surface of the product within Ra = 5-10 Å. To do this, eliminate the possibility of vibrations in the cutting zone. This problem is solved in the stand at different levels due to:

a) installing the stand on a special foundation and using vibration isolating supports having their own vibration frequency of 3 ... 5 Hz, which provide vibration isolation of the stand from external vibrations, the frequency of which is higher than 5 ... 8 Hz.

b) the use of aerostatic supports in the guides of movement of large mass-dimensional nodes of the stand;

c) balancing the subject table (faceplate 5) with the part;

d) the use of precision bearings in all nodes of rotation;

e) the use of procedures for leveling the position of the plane, as well as eliminating or significantly reducing vibration sources in the tool holder and other machine mechanisms.

2. The accuracy of the shape and position of the aspherical surface of the product within ± 25 nm at a diameter of not more than 150 mm.

This problem is solved in the stand by using a special drive to move the tool; kinematic resolution of moving systems realizing accuracy of 5 nm and repeatability of 20 nm, as well as stabilization of temperature, humidity, pressure in the working room within 1% -0.1%

The most important factor determining the accuracy of the form is also the possibility of measuring the surface using a metrological control interferometer and a microscope for observing the processing zone, the ability to straighten the cutting tool at the working position or to precisely set it after fine-tuning.

To ensure reliability and stability of formation at the stand of the finished product, the ability to perform multi-pass turning with a diamond cutter is structurally realized, and polishing of the product (lens) without removing it from the subject table is also possible.

The advantage of turning is the fundamental possibility of manufacturing complex shapes of surfaces that accurately implement the required design values.

The principle of operation of the claimed stand for a specialist in this field follows from the description of its design and graphic materials, in connection with which a more detailed description is not required.

Thus, the claimed technical solution can be used in various fields of technology for the implementation of ductile processing of high-precision products (mainly optical lenses) from brittle materials.

Reliable production technology of almost any optical elements will lead to an increase in the production of optical elements and devices in the wavelength ranges from infrared to x-ray. The introduction of such technology will not only simplify modern optical systems, but also radically improve the quality of images created with their help in photo and video equipment, in microscopy and astronomical observations. As a result, it will be possible to produce a great many high-resolution optical elements and devices for various purposes by domestic manufacturers.

Therefore, the claimed technical solution meets the patentability criterion of "industrial applicability".

Parameters of the magnetostrictive nanoscrew MN-3
Table 1 Parameter MN-3 Range of movement - coarse step, mm fifteen - exact step, microns 7.7 Sensitivity to turning the control knob - rough movement, micron \ hail. 1.4 - precise displacement, nm \ deg. 2.2 Minimum step - coarse step, microns 1,0 ... 1,2 - exact step, nm 0 ... 2 Top speed = coarse step, mm \ s 0.4 - exact step, microns \ s 0.9 Rigidity, N \ microns eleven Maximum force, N 700 Overall dimensions of the nano-screw, mm D 21.5 × 90 Weight, kg 0.13

Claims (4)

1. Technological stand for finishing processing of products from brittle materials with nanometric accuracy with a blade tool, including a base installed on the foundation with a bed placed on it, on which are installed the means for basing, aligning and moving the workpiece with a drive for working displacements, a unit for working displacements of a tool with a drive displacements and tool holder, an optical system for monitoring the position and condition of the cutting edge of the tool, while the stand is equipped with a number system of programmed control of the drives for working displacements of the tool and the product, characterized in that the base is mounted on the foundation by means of vibration-isolating supports, the means of basing, aligning and moving the workpiece are made in the form of a spindle head equipped with a rotating spindle kinematically connected to a vacuum faceplate equipped with a porous base surface and structurally organized with the possibility of spatial orientation of this surface relative to the horizontal plane ti, while the headstock spindle is oriented in a vertical plane by means of angular contact bearings with aerostatic clearance, and its rotation drive is made in the form of an asynchronous electric motor with increased sliding, the unit of working displacements of the tool is structurally organized in the form of a cross support equipped with aerostatic guides: carriage structurally organized with the possibility of stepless precision precision movement with nanometric accuracy in the horizontal direction For this purpose, a magnetostrictive transducer with steps of rough and precise tool movement in technological mode mounted on the slide carriage guides structurally organized with the possibility of installation movement in the vertical direction, as well as a mortise caliper kinematically connected to the slide with the tool holder, is used as its drive organized with the possibility of stepless precision movement with nanometric accuracy in vertical on This is accomplished by using a magnetostrictive transducer with coarse and precise tool steps in technological mode, and the bench is equipped with an optical system for monitoring the turning process in real time, commutatively connected to the control processor of the numerical program control system for the operational adjustment of the working programs in the cutting process. 2. The technological stand according to claim 1, characterized in that it is equipped with a cooling system for the cutting part of the tool, structurally organized with the possibility of converting the cooling agent in the area of the cutting part of the tool from the liquid phase to fog. 3. The technological stand according to claim 1 or 2, characterized in that the tool holder is structurally arranged to prevent transmission of low-frequency vibrational vibrations to the tool from the side of the stand nodes in a technological mode. 4. The technological stand according to claim 1, characterized in that the tool holder is mounted on a mortise support with the possibility of combining the top of the front surface of the tool with the center of the workpiece in the process of moving the carriage in technological mode.