RO97368B1 - Dispozitiv piezorezistiv - Google Patents
Dispozitiv piezorezistivInfo
- Publication number
- RO97368B1 RO97368B1 RO127599A RO12759987A RO97368B1 RO 97368 B1 RO97368 B1 RO 97368B1 RO 127599 A RO127599 A RO 127599A RO 12759987 A RO12759987 A RO 12759987A RO 97368 B1 RO97368 B1 RO 97368B1
- Authority
- RO
- Romania
- Prior art keywords
- sensor
- piezo
- active
- piezoresistive device
- support
- Prior art date
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 2
- 238000010586 diagram Methods 0.000 abstract 2
- 229910052710 silicon Inorganic materials 0.000 abstract 2
- 239000010703 silicon Substances 0.000 abstract 2
- 239000000853 adhesive Substances 0.000 abstract 1
- 230000001070 adhesive effect Effects 0.000 abstract 1
- 239000000919 ceramic Substances 0.000 abstract 1
- 239000012530 fluid Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Abstract
Inventia se refera la un dispozitiv piezorezistiv, destinat masurarii presiunii fluidelor. Dispozitivul piezorezistiv, conform inventiei, este alcatuit, în principal, dintr-un senzor piezorezistiv, ce contine o punte activa si o punte martor, înconjurate fiecare de un inel de garda, formate din piezorezistente, senzor sudat pe un suport de siliciu monocristalin, senzorul si suportul fiind fixati pe o ambaza ceramica pentru protectia conexiunilor de lipire a senzorului la ambaza fiind acelasi adeziv folosit la fixarea senzorului pe suportul de siliciu, senzorul piezorezistiv fiind realizat pe o placheta de siliciu pe una din fetele careia se realizeaza o diagrama activa, care poate fi circulara sau patrata si o diagrama martor, iar pe cealalta fata sunt difuzate printr-un procedeu cunoscut piezorezistente, care formeaza, legate fiind între ele prin trasee metalice, puntile active si, respectiv, martor, care sunt alimentate de la aceeasi sursa de alimentare.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| RO127599A RO97368B1 (ro) | 1987-03-27 | 1987-03-27 | Dispozitiv piezorezistiv |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| RO127599A RO97368B1 (ro) | 1987-03-27 | 1987-03-27 | Dispozitiv piezorezistiv |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| RO97368B1 true RO97368B1 (ro) | 1989-08-02 |
Family
ID=40905603
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| RO127599A RO97368B1 (ro) | 1987-03-27 | 1987-03-27 | Dispozitiv piezorezistiv |
Country Status (1)
| Country | Link |
|---|---|
| RO (1) | RO97368B1 (ro) |
-
1987
- 1987-03-27 RO RO127599A patent/RO97368B1/ro unknown
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