RO95022B1 - Process for preparing an abrasive - Google Patents
Process for preparing an abrasiveInfo
- Publication number
- RO95022B1 RO95022B1 RO122535A RO12253586A RO95022B1 RO 95022 B1 RO95022 B1 RO 95022B1 RO 122535 A RO122535 A RO 122535A RO 12253586 A RO12253586 A RO 12253586A RO 95022 B1 RO95022 B1 RO 95022B1
- Authority
- RO
- Romania
- Prior art keywords
- abrasive
- zro2
- al2o3
- preparing
- decantation
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 abstract 4
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 2
- 229910052593 corundum Inorganic materials 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- 239000000203 mixture Substances 0.000 abstract 2
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 238000010908 decantation Methods 0.000 abstract 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract 1
- 229910017604 nitric acid Inorganic materials 0.000 abstract 1
- 239000002244 precipitate Substances 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 239000002002 slurry Substances 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 239000004094 surface-active agent Substances 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 1
Landscapes
- Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
Abstract
Inventia se refera la un procedeu de obtinere a unui abraziv pe baza de Al2O3 sau amestecuri de Al2O3 si ZrO2, ZrO2 si SiO2, utilizat în procesul de rodare a plachetelor de siliciu monocristalin, prin recuperarea abrazivului dintr-un slam de slefuire, eventual tratat cu un agent tensioactiv, si supus agitarii, în continuare, cu un amestec de acid fluorhidric si acid azotic în prezenta apei. Precipitatul rezultat se separa prin decantare, se filtreaza, se spala, se usuca si se siteaza.The invention relates to a process for obtaining an Al2O3-based abrasive or mixtures of Al2O3 and ZrO2, ZrO2 and SiO2, used in the process of routing the monocrystalline silicon wafers by recovering the abrasive from a grinding slurry optionally treated with a surfactant, and further agitated with a mixture of hydrofluoric acid and nitric acid in the presence of water. The resulting precipitate is separated by decantation, filtered, washed, dried and sieved.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| RO122535A RO95022B1 (en) | 1986-03-11 | 1986-03-11 | Process for preparing an abrasive |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| RO122535A RO95022B1 (en) | 1986-03-11 | 1986-03-11 | Process for preparing an abrasive |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| RO95022B1 true RO95022B1 (en) | 1988-08-31 |
Family
ID=40904552
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| RO122535A RO95022B1 (en) | 1986-03-11 | 1986-03-11 | Process for preparing an abrasive |
Country Status (1)
| Country | Link |
|---|---|
| RO (1) | RO95022B1 (en) |
-
1986
- 1986-03-11 RO RO122535A patent/RO95022B1/en unknown
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