DE3273692D1
(en )
1986-11-13
An electron beam array lithography apparatus and a method of operating the same
JPS54124757A
(en )
1979-09-27
Method and device for determining position of reflector by fan beam
DE3070860D1
(en )
1985-08-14
Ion beam lithography process and apparatus using step-and repeat exposure
AU530337B2
(en )
1983-07-14
Process of and apparatus for cold-cathode electron-beam generation for sterilation of surfaces
AU5227479A
(en )
1980-05-08
Process of and apparatus for cold-cathode electron-beam generation for sterilation of surfaces
DE3070035D1
(en )
1985-03-07
Charged particle beam tube and method of operating the same
DE2966879D1
(en )
1984-05-10
Method of and apparatus for gas generation
JPS5472683A
(en )
1979-06-11
Electron beam device and method of using same
DE3168325D1
(en )
1985-02-28
Arrangement for the stroboscopic measuring of a potential with an electron beam measuring apparatus, and method of operating such an apparatus
SE414094B
(sv )
1980-07-07
Forfarande och apparat for generering och detektering av positiva och negativa joner nermelsevis samtidigt
JPS55110642A
(en )
1980-08-26
Method of generating gas and device used for said method
JPS5474377A
(en )
1979-06-14
Device for searching electron beam for electron beam device and method of driving same
GB2021789B
(en )
1982-07-07
Monitoring voltage using an electron beam probe
FR2331162A1
(fr )
1977-06-03
Methode et appareil de production d'energie electrochimique a partir de l'hydrogene
FR2336696A1
(fr )
1977-07-22
Procede et appareil pour diviser un rayonnement d'energie
DE3279954D1
(en )
1989-10-26
Exposure method with electron beam exposure apparatus
JPS5780644A
(en )
1982-05-20
Graphite target for x-ray tube and method of producing same
FR2317787A1
(fr )
1977-02-04
Procede et appareil pour l'emission d'un rayonnement coherent sur 14 et 16 mm
FR1247837A
(fr )
1960-12-02
Procédé et appareil pour la focalisation d'un faisceau d'électrons
RO76630A2
(ro )
1981-05-30
Metoda si aparat de monitorare a energiei fasciculului,la un accelerator de electroni
IT7950008A0
(it )
1979-08-08
Metodo e procedimento per arilalchi lazione
JPS5412584A
(en )
1979-01-30
Method of determining electron density and xxray tube executing same
EP0023988A3
(en )
1982-01-20
Electron beam sensitive resist composition, and method of forming positive and negative resist images
JPS54153029A
(en )
1979-12-01
Method of and device for automatically or semiiautomatically focusing
JPS54162958A
(en )
1979-12-25
Method of and device for adjusting specimen for particle beam device