PL4070036T3 - Sposób określania położenia lokalnego co najmniej jednego elementu optycznego w maszynie do obróbki laserowej materiału przy użyciu technik niskokoherentnej interferometrii optycznej - Google Patents

Sposób określania położenia lokalnego co najmniej jednego elementu optycznego w maszynie do obróbki laserowej materiału przy użyciu technik niskokoherentnej interferometrii optycznej

Info

Publication number
PL4070036T3
PL4070036T3 PL20830312.3T PL20830312T PL4070036T3 PL 4070036 T3 PL4070036 T3 PL 4070036T3 PL 20830312 T PL20830312 T PL 20830312T PL 4070036 T3 PL4070036 T3 PL 4070036T3
Authority
PL
Poland
Prior art keywords
determining
low
processing machine
material processing
laser material
Prior art date
Application number
PL20830312.3T
Other languages
English (en)
Inventor
Simone DONADELLO
Barbara Previtali
Daniele Colombo
Original Assignee
Adige S.P.A.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Adige S.P.A. filed Critical Adige S.P.A.
Publication of PL4070036T3 publication Critical patent/PL4070036T3/pl

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/046—Automatically focusing the laser beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02032—Interferometers characterised by the beam path configuration generating a spatial carrier frequency, e.g. by creating lateral or angular offset between reference and object beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G01B9/02072—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer by calibration or testing of interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00—Technologies related to metal processing
    • Y02P10/25—Process efficiency

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Laser Beam Processing (AREA)
PL20830312.3T 2019-12-06 2020-12-04 Sposób określania położenia lokalnego co najmniej jednego elementu optycznego w maszynie do obróbki laserowej materiału przy użyciu technik niskokoherentnej interferometrii optycznej PL4070036T3 (pl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT102019000023214A IT201900023214A1 (it) 2019-12-06 2019-12-06 Procedimento e sistema per la determinazione della posizione locale di almeno un elemento ottico in una macchina per la lavorazione laser di un materiale, tramite tecniche d'interferometria ottica a bassa coerenza
PCT/IB2020/061507 WO2021111393A1 (en) 2019-12-06 2020-12-04 Method and system for determining the local position of at least one optical element in a machine for laser processing of a material, using low-coherence optical interferometry techniques

Publications (1)

Publication Number Publication Date
PL4070036T3 true PL4070036T3 (pl) 2026-03-16

Family

ID=70009274

Family Applications (1)

Application Number Title Priority Date Filing Date
PL20830312.3T PL4070036T3 (pl) 2019-12-06 2020-12-04 Sposób określania położenia lokalnego co najmniej jednego elementu optycznego w maszynie do obróbki laserowej materiału przy użyciu technik niskokoherentnej interferometrii optycznej

Country Status (13)

Country Link
US (2) US12214441B2 (pl)
EP (1) EP4070036B1 (pl)
JP (1) JP7684964B2 (pl)
KR (1) KR20220120591A (pl)
CN (1) CN115038930B (pl)
BR (1) BR112022011062A2 (pl)
CA (1) CA3160513A1 (pl)
ES (1) ES3051935T3 (pl)
IT (1) IT201900023214A1 (pl)
MX (1) MX2022006915A (pl)
PL (1) PL4070036T3 (pl)
TW (1) TW202132037A (pl)
WO (1) WO2021111393A1 (pl)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT201900023229A1 (it) * 2019-12-06 2021-06-06 Adige Spa Procedimento e sistema per la determinazione della posizione di un elemento di un sistema ottico in un complesso di lavorazione o misura di un oggetto tramite misure interferometriche parallele
CN115077375B (zh) * 2022-05-23 2025-09-05 广州大学 一种用于去除伪影和噪声滤波的自见证相干成像系统
DE102023135396A1 (de) * 2023-12-15 2025-06-18 TRUMPF Laser SE Verfahren zum Durchführen eines Laserbearbeitungsprozesses und Laserbearbeitungsvorrichtung
CN121042393B (zh) * 2025-10-31 2026-01-02 上海万泽精密铸造有限公司 航空叶片矫形扭力扳手系统

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GB8622082D0 (en) * 1986-09-12 1986-10-22 Cogent Ltd Optical fibre measuring system
JPH05133712A (ja) * 1991-11-12 1993-05-28 Nikon Corp 表面位置測定装置
GB0408073D0 (en) * 2004-04-08 2004-05-12 Council Cent Lab Res Councils Optical sensor
JP5330749B2 (ja) * 2008-07-01 2013-10-30 株式会社トプコン 測定装置
US20120105861A1 (en) * 2009-01-20 2012-05-03 Thilo Weitzel Device and method for determining optical path lengths
US8107084B2 (en) * 2009-01-30 2012-01-31 Zygo Corporation Interference microscope with scan motion detection using fringe motion in monitor patterns
WO2010092533A1 (en) * 2009-02-13 2010-08-19 Ecole Polytechnique Federale De Lausanne (Epfl) Method and apparatus for 3d object shape and surface topology measurements by contour depth extraction acquired in a single shot
FR2959305B1 (fr) * 2010-04-26 2014-09-05 Nanotec Solution Dispositif optique et procede d'inspection d'objets structures.
EP2482031A1 (en) * 2011-01-26 2012-08-01 Mitutoyo Research Center Europe B.V. Method and apparatus for performing film thickness measurements using white light scanning interferometry
DE102013008269C5 (de) * 2013-05-15 2019-01-24 Precitec Optronik Gmbh Bearbeitungskopf für eine Laserbearbeitungsvorrichtung
JP6186215B2 (ja) * 2013-09-04 2017-08-23 株式会社日立エルジーデータストレージ 光計測装置及び光断層観察方法
KR102414277B1 (ko) * 2014-04-07 2022-06-29 노바 엘티디. 광학 위상 측정 방법 및 시스템
NL2014994A (en) * 2014-07-09 2016-04-12 Asml Netherlands Bv Inspection apparatus and methods, methods of manufacturing devices.
DE102014011569B4 (de) * 2014-08-02 2016-08-18 Precitec Optronik Gmbh Verfahren zum Messen des Abstands zwischen einem Werkstück und einem Bearbeitungskopf einer Laserbearbeitungsvorrichtung
DE102017218494B4 (de) * 2017-10-17 2024-02-08 Trumpf Laser- Und Systemtechnik Gmbh Bearbeitungsvorrichtung und Verfahren zur insbesondere schweißenden Bearbeitung eines Werkstücks
DE102018105319A1 (de) * 2018-03-08 2019-09-12 Precitec Gmbh & Co. Kg Vorrichtung zur Bestimmung einer Fokuslage in einem Laserbearbeitungssystem, Laserbearbeitungssystem mit derselben und Verfahren zur Bestimmung einer Fokuslage in einem Laserbearbeitungssystem
DE102018105877B3 (de) * 2018-03-14 2019-02-28 Precitec Gmbh & Co. Kg Vorrichtung für die Bestimmung einer Ausrichtung einer optischen Vorrichtung eines Kohärenztomographen, Kohärenztomograph und Laserbearbeitungssystem
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Also Published As

Publication number Publication date
IT201900023214A1 (it) 2021-06-06
US20250135576A1 (en) 2025-05-01
CN115038930B (zh) 2025-10-03
CN115038930A (zh) 2022-09-09
EP4070036A1 (en) 2022-10-12
CA3160513A1 (en) 2021-06-10
US12214441B2 (en) 2025-02-04
EP4070036B1 (en) 2025-08-20
KR20220120591A (ko) 2022-08-30
MX2022006915A (es) 2022-07-27
ES3051935T3 (en) 2025-12-30
JP2023504714A (ja) 2023-02-06
JP7684964B2 (ja) 2025-05-28
BR112022011062A2 (pt) 2022-08-23
US20220410309A1 (en) 2022-12-29
TW202132037A (zh) 2021-09-01
WO2021111393A1 (en) 2021-06-10

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