PL392786A1 - Wyrzutnia magnetronowa - Google Patents

Wyrzutnia magnetronowa

Info

Publication number
PL392786A1
PL392786A1 PL392786A PL39278610A PL392786A1 PL 392786 A1 PL392786 A1 PL 392786A1 PL 392786 A PL392786 A PL 392786A PL 39278610 A PL39278610 A PL 39278610A PL 392786 A1 PL392786 A1 PL 392786A1
Authority
PL
Poland
Prior art keywords
magnetron gun
magnetron
gun
Prior art date
Application number
PL392786A
Other languages
English (en)
Other versions
PL218274B1 (pl
Inventor
Krzysztof Wojciechowski
Rafał Zybała
Ryszard Mania
Original Assignee
Akademia Górniczo-Hutnicza im. Stanisława Staszica
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akademia Górniczo-Hutnicza im. Stanisława Staszica filed Critical Akademia Górniczo-Hutnicza im. Stanisława Staszica
Priority to PL392786A priority Critical patent/PL218274B1/pl
Publication of PL392786A1 publication Critical patent/PL392786A1/pl
Publication of PL218274B1 publication Critical patent/PL218274B1/pl

Links

PL392786A 2010-10-28 2010-10-28 Wyrzutnia magnetronowa PL218274B1 (pl)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PL392786A PL218274B1 (pl) 2010-10-28 2010-10-28 Wyrzutnia magnetronowa

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PL392786A PL218274B1 (pl) 2010-10-28 2010-10-28 Wyrzutnia magnetronowa

Publications (2)

Publication Number Publication Date
PL392786A1 true PL392786A1 (pl) 2012-05-07
PL218274B1 PL218274B1 (pl) 2014-10-31

Family

ID=46060872

Family Applications (1)

Application Number Title Priority Date Filing Date
PL392786A PL218274B1 (pl) 2010-10-28 2010-10-28 Wyrzutnia magnetronowa

Country Status (1)

Country Link
PL (1) PL218274B1 (pl)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3340274A1 (en) 2016-12-24 2018-06-27 WINDLIPIE spólka z ograniczona odpowiedzialnoscia spólka komandytowa Magnetron sputtering device

Also Published As

Publication number Publication date
PL218274B1 (pl) 2014-10-31

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