PL3861401T3 - System i sposób pomiaru kąta wiązki światła kierowanej przez układ optyczny kierujący wiązką - Google Patents

System i sposób pomiaru kąta wiązki światła kierowanej przez układ optyczny kierujący wiązką

Info

Publication number
PL3861401T3
PL3861401T3 PL19759516.8T PL19759516T PL3861401T3 PL 3861401 T3 PL3861401 T3 PL 3861401T3 PL 19759516 T PL19759516 T PL 19759516T PL 3861401 T3 PL3861401 T3 PL 3861401T3
Authority
PL
Poland
Prior art keywords
measuring
optical unit
guiding optical
guided
angle
Prior art date
Application number
PL19759516.8T
Other languages
English (en)
Inventor
Florian Baumer
Matthias Manger
Original Assignee
Carl Zeiss Smt Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Smt Gmbh filed Critical Carl Zeiss Smt Gmbh
Publication of PL3861401T3 publication Critical patent/PL3861401T3/pl

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—Production of X-ray radiation generated from plasma
    • H05G2/008—Production of X-ray radiation generated from plasma involving an energy-carrying beam in the process of plasma generation
    • H05G2/0082—Production of X-ray radiation generated from plasma involving an energy-carrying beam in the process of plasma generation the energy-carrying beam being a laser beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S3/00—Direction-finders for determining the direction from which infrasonic, sonic, ultrasonic or electromagnetic waves, or particle emission, not having a directional significance, are being received
    • G01S3/78—Direction-finders for determining the direction from which infrasonic, sonic, ultrasonic or electromagnetic waves, or particle emission, not having a directional significance, are being received using electromagnetic waves other than radio waves
    • G01S3/782—Systems for determining direction or deviation from predetermined direction
    • G01S3/783—Systems for determining direction or deviation from predetermined direction using amplitude comparison of signals derived from static detectors or detector systems
    • G01S3/784—Systems for determining direction or deviation from predetermined direction using amplitude comparison of signals derived from static detectors or detector systems using a mosaic of detectors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/12—Beam splitting or combining systems operating by refraction only
    • G02B27/126—The splitting element being a prism or prismatic array, including systems based on total internal reflection
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/64—Imaging systems using optical elements for stabilisation of the lateral and angular position of the image
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/28—Systems for automatic generation of focusing signals
    • G02B7/287—Systems for automatic generation of focusing signals including a sight line detecting device
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70033—Production of exposure light, i.e. light sources by plasma extreme ultraviolet [EUV] sources

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • X-Ray Techniques (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
PL19759516.8T 2018-10-02 2019-08-14 System i sposób pomiaru kąta wiązki światła kierowanej przez układ optyczny kierujący wiązką PL3861401T3 (pl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102018124342.1A DE102018124342A1 (de) 2018-10-02 2018-10-02 Vorrichtung und Verfahren zur Strahlwinkelmessung eines von einer Strahlführungsoptik geführten Lichtstrahls
PCT/EP2019/071811 WO2020069793A1 (de) 2018-10-02 2019-08-14 Vorrichtung und verfahren zur strahlwinkelmessung eines von einer strahlführungsoptik geführten lichtstrahls

Publications (1)

Publication Number Publication Date
PL3861401T3 true PL3861401T3 (pl) 2026-03-09

Family

ID=67777283

Family Applications (1)

Application Number Title Priority Date Filing Date
PL19759516.8T PL3861401T3 (pl) 2018-10-02 2019-08-14 System i sposób pomiaru kąta wiązki światła kierowanej przez układ optyczny kierujący wiązką

Country Status (6)

Country Link
US (1) US11737199B2 (pl)
EP (1) EP3861401B9 (pl)
JP (1) JP7765967B2 (pl)
DE (1) DE102018124342A1 (pl)
PL (1) PL3861401T3 (pl)
WO (1) WO2020069793A1 (pl)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6421311A (en) * 1987-07-16 1989-01-24 Fujitsu Ltd Fine angle displacement measuring apparatus
JPH01189504A (ja) * 1988-01-25 1989-07-28 Hitachi Zosen Corp ２次元変位計測方法
JP2007006118A (ja) 2005-06-23 2007-01-11 Victor Co Of Japan Ltd 光信号伝送装置
DE102010050947B4 (de) 2010-11-10 2017-07-13 Ushio Denki Kabushiki Kaisha Verfahren und Anordnung zur Stabilisierung des Quellortes der Erzeugung extrem ultravioletter (EUV-)Strahlung auf Basis eines Entladungsplasmas
JP2012178534A (ja) 2011-02-02 2012-09-13 Gigaphoton Inc 光学システムおよびそれを用いた極端紫外光生成システム
DE102012212354B4 (de) * 2012-07-13 2024-05-16 Asml Netherlands B.V. Messvorrichtung zur Vermessung und Überwachung mindestens eines Laserstrahls, Strahlführungssystem zur Führung mindestens eines Laserstrahls mit einer derartigen Messvorrichtung sowie Verwendung einer derartigen Messvorrichtung
DE102014203141A1 (de) * 2014-02-21 2015-08-27 Carl Zeiss Smt Gmbh Erfassung einer Ausbreitungsrichtung eines optischen Strahls
DE102014208792A1 (de) 2014-05-09 2015-11-12 Carl Zeiss Smt Gmbh System und Verfahren zur Analyse eines von einer Strahlführungsoptik geführten Lichtstrahls

Also Published As

Publication number Publication date
EP3861401C0 (de) 2025-10-01
WO2020069793A1 (de) 2020-04-09
EP3861401B1 (de) 2025-10-01
US20210219409A1 (en) 2021-07-15
JP2022504295A (ja) 2022-01-13
EP3861401A1 (de) 2021-08-11
US11737199B2 (en) 2023-08-22
DE102018124342A1 (de) 2020-04-02
JP7765967B2 (ja) 2025-11-07
EP3861401B9 (de) 2025-12-17

Similar Documents

Publication Publication Date Title
GB2587042B (en) Method for optical measurement
PL3909552T3 (pl) Optyczny układ ogniskujący urządzenia do cięcia zawierający przestrzenny modulator światła
EP3155058A4 (en) Monochromatic actinic radiation curable coatings for optical fiber
IL284058A (en) A device for activating a light source for optical time-of-flight measurement
LT3827304T (lt) Įrenginys, skirtas šviesos pluošto laukui kolimuoti
IL269745A (en) Method and device for measuring optical distance
EP3864445C0 (en) OPTICAL DEVICE PROVIDED WITH A LIGHT RAY DEFLECTOR
PL3140628T3 (pl) System i sposób analizy wiązki światła kierowanej przez układ optyczny kierujący wiązką
IL278357A (en) Method and device for measuring optical distances
IL268230A (en) Method and device for optical distance measurement
SG11202011787WA (en) Device and method for detecting the position of a laser beam
PL3578878T3 (pl) Urządzenie prowadzące światło
GB2620312B (en) Optical measurement device
GB201814159D0 (en) Fibre optic apparatus
PL3792549T3 (pl) Urządzenie optyczne do modyfikacji rozkładu światła
HUE068531T2 (hu) Optikai sugárzást biztosító készülék
EP3149527C0 (en) DEVICE FOR THE SPHERICAL ORIENTATION OF AN OPTICAL ELEMENT, IN PARTICULAR IN ORDER TO DIRECT A LIGHT BEAM, SUCH AS A LASER BEAM
LT3754404T (lt) Projektorius ir šviesos spindulių pluošto nukreipimo į taikinį būdas
GB2562832B (en) Optical device able to change the direction of propagation of a light beam
IL268695A (en) Method and device for measuring optical distance
IL264948B (en) Method and device for optical measurement of distance
IL264947A (en) Method and device for optical measurement of distance
ZA202200720B (en) Device for detecting optical pulses
IL273036A (en) Method and device for measuring optical distance
PL3861401T3 (pl) System i sposób pomiaru kąta wiązki światła kierowanej przez układ optyczny kierujący wiązką