PL353673A1 - Method of anisoptropic wet etching of silicone - Google Patents

Method of anisoptropic wet etching of silicone

Info

Publication number
PL353673A1
PL353673A1 PL02353673A PL35367302A PL353673A1 PL 353673 A1 PL353673 A1 PL 353673A1 PL 02353673 A PL02353673 A PL 02353673A PL 35367302 A PL35367302 A PL 35367302A PL 353673 A1 PL353673 A1 PL 353673A1
Authority
PL
Poland
Prior art keywords
anisoptropic
silicone
wet etching
etching
wet
Prior art date
Application number
PL02353673A
Other languages
Polish (pl)
Other versions
PL197618B1 (en
Inventor
Helena Teterycz
Jan Dziuban
Rafał Walczak
Original Assignee
Politechnika Wrocławska
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Politechnika Wrocławska filed Critical Politechnika Wrocławska
Priority to PL353673A priority Critical patent/PL197618B1/en
Publication of PL353673A1 publication Critical patent/PL353673A1/en
Publication of PL197618B1 publication Critical patent/PL197618B1/en

Links

PL353673A 2002-04-29 2002-04-29 Method of anisoptropic wet etching of silicone PL197618B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PL353673A PL197618B1 (en) 2002-04-29 2002-04-29 Method of anisoptropic wet etching of silicone

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PL353673A PL197618B1 (en) 2002-04-29 2002-04-29 Method of anisoptropic wet etching of silicone

Publications (2)

Publication Number Publication Date
PL353673A1 true PL353673A1 (en) 2003-11-03
PL197618B1 PL197618B1 (en) 2008-04-30

Family

ID=29776316

Family Applications (1)

Application Number Title Priority Date Filing Date
PL353673A PL197618B1 (en) 2002-04-29 2002-04-29 Method of anisoptropic wet etching of silicone

Country Status (1)

Country Link
PL (1) PL197618B1 (en)

Also Published As

Publication number Publication date
PL197618B1 (en) 2008-04-30

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