PL3532238T3 - Jednostka załamująca z dwoma okienkami, jednym elementem optycznym i jednym urządzeniem załamującym xy - Google Patents

Jednostka załamująca z dwoma okienkami, jednym elementem optycznym i jednym urządzeniem załamującym xy

Info

Publication number
PL3532238T3
PL3532238T3 PL17793923T PL17793923T PL3532238T3 PL 3532238 T3 PL3532238 T3 PL 3532238T3 PL 17793923 T PL17793923 T PL 17793923T PL 17793923 T PL17793923 T PL 17793923T PL 3532238 T3 PL3532238 T3 PL 3532238T3
Authority
PL
Poland
Prior art keywords
deflection
windows
optical element
unit
deflection device
Prior art date
Application number
PL17793923T
Other languages
English (en)
Inventor
Carl BÖHMER
Wolfgang Lehmann
Christian SCHIEFEN
Philipp Schön
Original Assignee
Raylase Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Raylase Gmbh filed Critical Raylase Gmbh
Publication of PL3532238T3 publication Critical patent/PL3532238T3/pl

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/34—Laser welding for purposes other than joining
    • B23K26/342—Build-up welding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/20—Apparatus for additive manufacturing; Details thereof or accessories therefor
    • B29C64/264—Arrangements for irradiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y30/00—Apparatus for additive manufacturing; Details thereof or accessories therefor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B15/00—Optical objectives with means for varying the magnification
    • G02B15/14—Optical objectives with means for varying the magnification by axial movement of one or more lenses or groups of lenses relative to the image plane for continuously varying the equivalent focal length of the objective
    • G02B15/142—Optical objectives with means for varying the magnification by axial movement of one or more lenses or groups of lenses relative to the image plane for continuously varying the equivalent focal length of the objective having two groups only
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/108—Beam splitting or combining systems for sampling a portion of a beam or combining a small beam in a larger one, e.g. wherein the area ratio or power ratio of the divided beams significantly differs from unity, without spectral selectivity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
PL17793923T 2016-10-27 2017-10-27 Jednostka załamująca z dwoma okienkami, jednym elementem optycznym i jednym urządzeniem załamującym xy PL3532238T3 (pl)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102016120523.0A DE102016120523A1 (de) 2016-10-27 2016-10-27 Ablenkeinheit
EP17793923.8A EP3532238B1 (de) 2016-10-27 2017-10-27 Ablenkeinheit mit zwei fenstern, einem optischen element und einer xy-ablenkvorrichtung
PCT/EP2017/077686 WO2018078137A1 (de) 2016-10-27 2017-10-27 Ablenkeinheit mit zwei fenstern, einem optischen element und einer xy-ablenkvorrichtung

Publications (1)

Publication Number Publication Date
PL3532238T3 true PL3532238T3 (pl) 2021-11-15

Family

ID=60245083

Family Applications (2)

Application Number Title Priority Date Filing Date
PL17793923T PL3532238T3 (pl) 2016-10-27 2017-10-27 Jednostka załamująca z dwoma okienkami, jednym elementem optycznym i jednym urządzeniem załamującym xy
PL21155408.4T PL3838472T3 (pl) 2016-10-27 2017-10-27 Jednostka załamująca z dwoma okienkami, jednym elementem optycznym i jednym urządzeniem załamującym xy

Family Applications After (1)

Application Number Title Priority Date Filing Date
PL21155408.4T PL3838472T3 (pl) 2016-10-27 2017-10-27 Jednostka załamująca z dwoma okienkami, jednym elementem optycznym i jednym urządzeniem załamującym xy

Country Status (9)

Country Link
US (1) US11402626B2 (pl)
EP (3) EP3838472B1 (pl)
CN (1) CN110062678B (pl)
DE (1) DE102016120523A1 (pl)
ES (2) ES2868799T3 (pl)
HR (1) HRP20210827T1 (pl)
HU (1) HUE053928T2 (pl)
PL (2) PL3532238T3 (pl)
WO (1) WO2018078137A1 (pl)

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DE102017219184B4 (de) 2017-10-26 2023-02-02 Trumpf Laser- Und Systemtechnik Gmbh Bestrahlungseinrichtung und Bearbeitungsmaschine zum Bestrahlen eines ebenen Bearbeitungsfeldes
CN110673321A (zh) * 2018-04-20 2020-01-10 美国奈维特公司 用于高光学扩展量模块化变焦镜头的镜头连接件
CN108919480B (zh) * 2018-06-25 2020-07-21 中国科学院长春光学精密机械与物理研究所 一种用于同一波段多路激光合束的自动对准装置
EP3650206A1 (en) 2018-11-12 2020-05-13 Raylase GmbH Automatic calibration of a laser processing system using an integrated telecentric optical detector with limited degrees of freedom
CN114302782B (zh) * 2019-08-27 2024-04-26 尼康Slm方案股份公司 使用增材制造技术制造三维工件的设备和系统
DE102019127323B4 (de) * 2019-10-10 2021-05-12 Precitec Gmbh & Co. Kg Laserbearbeitungssystem zum Durchführen eines Bearbeitungsprozesses an einem Werkstück mittels eines Laserstrahls und Verfahren zur Überwachung eines Bearbeitungsprozesses an einem Werkstück mittels eines Laserstrahls
CN111624725A (zh) * 2020-04-22 2020-09-04 大族激光科技产业集团股份有限公司 一种实现变焦及光路整形的系统
EP3904946A1 (en) 2020-04-30 2021-11-03 Raylase GmbH Modular deflection units in mirror symmetrical arrangement
DE102020112472A1 (de) 2020-05-07 2021-11-11 Jenoptik Optical Systems Gmbh Objektiv für eine Materialbearbeitungsvorrichtung, Materialbearbeitungsvorrichtung und Verfahren zum Betreiben einer Materialbearbeitungsvorrichtung
CN111761203B (zh) * 2020-07-10 2022-02-15 中国航空制造技术研究院 一种用于激光加工的高放大倍率在线实时成像装置
RU2754202C1 (ru) * 2020-12-17 2021-08-30 Российская Федерация, от имени которой выступает Государственная корпорация по атомной энергии "Росатом" (Госкорпорация "Росатом") Многоканальный узел отбора излучения
DE102021101658B4 (de) 2021-01-26 2022-10-06 Precitec Gmbh & Co. Kg Laserbearbeitungskopf mit chromatischer Kompensationsvorrichtung
US20220283416A1 (en) * 2021-03-04 2022-09-08 Ii-Vi Delaware, Inc. Dynamic Focus For Laser Processing Head
DE102022102298A1 (de) 2022-01-28 2023-08-03 Laser Zentrum Hannover E.V. Lenksystem für einen Laserstrahl
EP4227036A1 (en) 2022-02-09 2023-08-16 Raylase GmbH Laser calibration system for, laser processing system for and method of automatic calibration of a laser processing system using a non-integrated telecentric optical detector with limited degrees of freedom
DE102022104416A1 (de) * 2022-02-24 2023-08-24 Precitec Optronik Gmbh Vorrichtung und Verfahren zum Vermessen von Wafern
DE102022107324B4 (de) 2022-03-29 2024-03-28 Precitec Gmbh & Co. Kg Laserbearbeitungskopf mit Auslenkvorrichtungen
DE102022109848A1 (de) 2022-04-25 2023-10-26 TRUMPF Werkzeugmaschinen SE + Co. KG Laserbearbeitungskopf und Verfahren zum Bearbeiten eines Werkstücks
EP4296612B1 (en) 2022-06-24 2024-05-01 Raylase GmbH Laser processing apparatus with measuring module with adjustable path length difference

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Also Published As

Publication number Publication date
US11402626B2 (en) 2022-08-02
PL3838472T3 (pl) 2023-10-23
CN110062678B (zh) 2021-10-08
ES2868799T3 (es) 2021-10-22
HUE053928T2 (hu) 2021-07-28
ES2956042T3 (es) 2023-12-12
CN110062678A (zh) 2019-07-26
EP3838472B1 (de) 2023-06-07
HRP20210827T1 (hr) 2021-07-09
WO2018078137A1 (de) 2018-05-03
EP3532238B1 (de) 2021-03-03
EP3838472A1 (de) 2021-06-23
EP3532238A1 (de) 2019-09-04
EP4151354A1 (de) 2023-03-22
US20190310463A1 (en) 2019-10-10
DE102016120523A1 (de) 2018-05-03
EP3838472C0 (de) 2023-06-07

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