PL3087213T3 - Instalacja przelotowa - Google Patents

Instalacja przelotowa

Info

Publication number
PL3087213T3
PL3087213T3 PL15821030T PL15821030T PL3087213T3 PL 3087213 T3 PL3087213 T3 PL 3087213T3 PL 15821030 T PL15821030 T PL 15821030T PL 15821030 T PL15821030 T PL 15821030T PL 3087213 T3 PL3087213 T3 PL 3087213T3
Authority
PL
Poland
Prior art keywords
continuous system
continuous
Prior art date
Application number
PL15821030T
Other languages
English (en)
Inventor
Stefan Kempf
Holger Schramm
Original Assignee
Singulus Technologies Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE102014226780.3A external-priority patent/DE102014226780A1/de
Application filed by Singulus Technologies Ag filed Critical Singulus Technologies Ag
Publication of PL3087213T3 publication Critical patent/PL3087213T3/pl

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • C23C14/566—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases using a load-lock chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G35/00—Mechanical conveyors not otherwise provided for
    • B65G35/06—Mechanical conveyors not otherwise provided for comprising a load-carrier moving along a path, e.g. a closed path, and adapted to be engaged by any one of a series of traction elements spaced along the path
    • B65G35/063—Mechanical conveyors not otherwise provided for comprising a load-carrier moving along a path, e.g. a closed path, and adapted to be engaged by any one of a series of traction elements spaced along the path the traction element being a rotating bar or tube
    • B65G35/066—Mechanical conveyors not otherwise provided for comprising a load-carrier moving along a path, e.g. a closed path, and adapted to be engaged by any one of a series of traction elements spaced along the path the traction element being a rotating bar or tube the bar or the tube being provided with a helical or annular channel
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physical Vapour Deposition (AREA)
PL15821030T 2014-12-22 2015-12-11 Instalacja przelotowa PL3087213T3 (pl)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE102014226780.3A DE102014226780A1 (de) 2014-12-22 2014-12-22 Vorrichtung und Verfahren für eine getaktete Durchlaufanlage
DE102015219668 2015-10-12
EP15821030.2A EP3087213B1 (de) 2014-12-22 2015-12-11 Durchlaufanlage
PCT/EP2015/079416 WO2016102212A1 (de) 2014-12-22 2015-12-11 Durchlaufanlage

Publications (1)

Publication Number Publication Date
PL3087213T3 true PL3087213T3 (pl) 2018-08-31

Family

ID=55077475

Family Applications (1)

Application Number Title Priority Date Filing Date
PL15821030T PL3087213T3 (pl) 2014-12-22 2015-12-11 Instalacja przelotowa

Country Status (4)

Country Link
US (1) US10167548B2 (pl)
EP (1) EP3087213B1 (pl)
PL (1) PL3087213T3 (pl)
WO (1) WO2016102212A1 (pl)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016102212A1 (de) * 2014-12-22 2016-06-30 Singulus Technologies Ag Durchlaufanlage
CN117467969B (zh) * 2023-12-28 2024-04-16 湖南振添光学玻璃科技有限公司 一种光学玻璃镜片ito镀膜设备及使用方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5705044A (en) * 1995-08-07 1998-01-06 Akashic Memories Corporation Modular sputtering machine having batch processing and serial thin film sputtering
DE19806282C1 (de) 1998-02-16 1999-03-25 Singulus Technologies Ag Vorrichtung und Verfahren von zum Belüften einer Vakuum-Bearbeitungskammer mit einer Transportkammer
IT1304212B1 (it) 1998-10-21 2001-03-13 Isap Omv Group Spa Impianto di termoformatura con trasportatore a maschere.
ATE280436T1 (de) 2000-06-22 2004-11-15 Unaxis Balzers Ag Beschichtungsanlage für scheibenförmige werkstücke
US7296673B2 (en) 2005-06-10 2007-11-20 Applied Materials, Inc. Substrate conveyor system
SE530110C2 (sv) 2006-07-10 2008-03-04 Gepro Ab Anordning för behandling av artiklar innefattande överlappande drivanordning samt palett för uppbärande av artiklar avsedd att föras fram på transportbana vid sådan anordning
DE102007013637B4 (de) 2007-03-19 2018-12-20 Ewald Dörken Ag Verfahren zum Beschichten von metallischen Werkstücken
DE102008019023B4 (de) 2007-10-22 2009-09-24 Centrotherm Photovoltaics Ag Vakuum-Durchlaufanlage zur Prozessierung von Substraten
DE102007054091A1 (de) 2007-11-13 2009-05-28 Rena Sondermaschinen Gmbh Vorrichtung und Verfahren zum gleichmäßigen Transport von Substraten
JP5552393B2 (ja) * 2010-08-05 2014-07-16 株式会社ダイフク 搬送用走行体利用の搬送装置
JP5641438B2 (ja) 2011-08-01 2014-12-17 株式会社ダイフク スクリュー駆動エリアへの搬送台車送込み装置
DE102011114593B4 (de) 2011-09-30 2016-11-03 Manz Ag Transporteinrichtung zum Transportieren mehrerer Substrate in den Bereich einer Substrat-Behandlungseinrichtung sowie eine derart ausgestaltete Vakuumbehandlungseinrichtung
JP5811357B2 (ja) 2012-05-15 2015-11-11 株式会社ダイフク スクリュー駆動の搬送装置
WO2016102212A1 (de) * 2014-12-22 2016-06-30 Singulus Technologies Ag Durchlaufanlage

Also Published As

Publication number Publication date
US10167548B2 (en) 2019-01-01
EP3087213A1 (de) 2016-11-02
US20180195166A1 (en) 2018-07-12
WO2016102212A1 (de) 2016-06-30
EP3087213B1 (de) 2018-03-14

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