PL2956743T3 - Sposób i urządzenie do ilościowego pomiaru dokładności powierzchni obszaru - Google Patents
Sposób i urządzenie do ilościowego pomiaru dokładności powierzchni obszaruInfo
- Publication number
- PL2956743T3 PL2956743T3 PL14751291T PL14751291T PL2956743T3 PL 2956743 T3 PL2956743 T3 PL 2956743T3 PL 14751291 T PL14751291 T PL 14751291T PL 14751291 T PL14751291 T PL 14751291T PL 2956743 T3 PL2956743 T3 PL 2956743T3
- Authority
- PL
- Poland
- Prior art keywords
- area
- quantitative measurement
- surface accuracy
- accuracy
- quantitative
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SE1330009 | 2013-02-14 | ||
| PCT/SE2014/050159 WO2014126526A1 (en) | 2013-02-14 | 2014-02-10 | A method and apparatus for quantitative measurement of surface accuracy of an area |
| EP14751291.7A EP2956743B1 (en) | 2013-02-14 | 2014-02-10 | A method and apparatus for quantitative measurement of surface accuracy of an area |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| PL2956743T3 true PL2956743T3 (pl) | 2018-07-31 |
Family
ID=51354417
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PL14751291T PL2956743T3 (pl) | 2013-02-14 | 2014-02-10 | Sposób i urządzenie do ilościowego pomiaru dokładności powierzchni obszaru |
Country Status (11)
| Country | Link |
|---|---|
| US (1) | US9453725B2 (pl) |
| EP (1) | EP2956743B1 (pl) |
| JP (1) | JP2016511829A (pl) |
| KR (1) | KR101883748B1 (pl) |
| CN (1) | CN105008853B (pl) |
| AU (1) | AU2014216740B2 (pl) |
| BR (1) | BR112015019480A2 (pl) |
| CA (1) | CA2897751C (pl) |
| ES (1) | ES2664738T3 (pl) |
| PL (1) | PL2956743T3 (pl) |
| WO (1) | WO2014126526A1 (pl) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6842061B2 (ja) * | 2017-02-10 | 2021-03-17 | 国立大学法人神戸大学 | 物体表面の評価方法、評価装置および該評価方法を用いたワークの加工方法および工作機械 |
| US10852125B2 (en) | 2017-11-28 | 2020-12-01 | Koh Young Technology Inc. | Apparatus for inspecting film on substrate by using optical interference and method thereof |
| US10859371B2 (en) * | 2017-11-28 | 2020-12-08 | Koh Young Technology Inc. | Apparatus for inspecting substrate and method thereof |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4754282A (en) * | 1970-03-25 | 1988-06-28 | The United States Of America As Represented By The Secretary Of The Navy | Improved data analysis system |
| US4334780A (en) * | 1979-06-29 | 1982-06-15 | Grumman Aerospace Corporation | Optical surface roughness detection method and apparatus |
| JPS5897608A (ja) | 1981-12-05 | 1983-06-10 | Nippon Paint Co Ltd | 表面性状測定方法および装置 |
| GB8617570D0 (en) | 1986-07-18 | 1986-08-28 | See C W | Microscopes |
| US5369286A (en) | 1989-05-26 | 1994-11-29 | Ann F. Koo | Method and apparatus for measuring stress in a film applied to surface of a workpiece |
| GB2242976A (en) | 1990-04-12 | 1991-10-16 | Rank Taylor Hobson Ltd | Measuring surface characteristics |
| DE69635816T2 (de) | 1995-03-28 | 2006-10-12 | Applied Materials, Inc., Santa Clara | Verfahren zum Herstellen einer Vorrichtung zur In-Situ-Kontrolle und Bestimmung des Endes von chemisch-mechanischen Planiervorgängen |
| US5781436A (en) * | 1996-07-26 | 1998-07-14 | Western Atlas International, Inc. | Method and apparatus for transverse electromagnetic induction well logging |
| WO1998050779A1 (en) * | 1997-05-06 | 1998-11-12 | Holcomb Matthew J | Surface analysis using gaussian beam profiles |
| JP4518789B2 (ja) * | 2001-06-08 | 2010-08-04 | ユニバーシティ・オブ・メイン | 広帯域変調および統計的推定手法を用いる分光計 |
| DE10339227B4 (de) * | 2003-08-26 | 2014-05-28 | Byk Gardner Gmbh | Verfahren und Vorrichtung zur Charakterisierung von Oberflächen |
| JP4520794B2 (ja) * | 2004-08-20 | 2010-08-11 | セーレン株式会社 | 線条検査方法および装置 |
| US7417722B2 (en) * | 2004-12-19 | 2008-08-26 | Kla-Tencor Technologies Corporation | System and method for controlling light scattered from a workpiece surface in a surface inspection system |
| JP4646035B2 (ja) | 2006-04-07 | 2011-03-09 | 株式会社 日立ディスプレイズ | ラビング角度測定装置、及び液晶表示装置並びに光学フィルムの製造方法 |
| US8446640B2 (en) * | 2009-07-15 | 2013-05-21 | Eastman Kodak Company | Setting of imaging parameters using a scanner |
| US20120269958A1 (en) * | 2009-10-27 | 2012-10-25 | Ramesh Subramanian | Material buildup simulations by application of powder jet mass conservation priciples |
| JP2012093200A (ja) | 2010-10-26 | 2012-05-17 | Toyota Motor Corp | 表面評価装置 |
| JP2012093316A (ja) | 2010-10-28 | 2012-05-17 | Toyota Motor Corp | 表面評価装置 |
| JP5892591B2 (ja) | 2010-12-09 | 2016-03-23 | 国立大学法人九州工業大学 | 三次元表面の計測装置及び方法 |
-
2014
- 2014-02-10 WO PCT/SE2014/050159 patent/WO2014126526A1/en active Application Filing
- 2014-02-10 US US14/765,353 patent/US9453725B2/en active Active
- 2014-02-10 EP EP14751291.7A patent/EP2956743B1/en active Active
- 2014-02-10 JP JP2015557972A patent/JP2016511829A/ja active Pending
- 2014-02-10 KR KR1020157022386A patent/KR101883748B1/ko active IP Right Grant
- 2014-02-10 AU AU2014216740A patent/AU2014216740B2/en not_active Ceased
- 2014-02-10 BR BR112015019480A patent/BR112015019480A2/pt not_active Application Discontinuation
- 2014-02-10 PL PL14751291T patent/PL2956743T3/pl unknown
- 2014-02-10 CN CN201480008843.4A patent/CN105008853B/zh active Active
- 2014-02-10 CA CA2897751A patent/CA2897751C/en not_active Expired - Fee Related
- 2014-02-10 ES ES14751291.7T patent/ES2664738T3/es active Active
Also Published As
| Publication number | Publication date |
|---|---|
| WO2014126526A1 (en) | 2014-08-21 |
| BR112015019480A2 (pt) | 2017-07-18 |
| KR101883748B1 (ko) | 2018-07-31 |
| CA2897751C (en) | 2017-09-26 |
| CN105008853A (zh) | 2015-10-28 |
| KR20150117669A (ko) | 2015-10-20 |
| EP2956743B1 (en) | 2018-01-10 |
| US9453725B2 (en) | 2016-09-27 |
| CN105008853B (zh) | 2017-12-01 |
| CA2897751A1 (en) | 2014-08-21 |
| US20160003614A1 (en) | 2016-01-07 |
| AU2014216740A1 (en) | 2015-07-23 |
| EP2956743A4 (en) | 2016-10-26 |
| JP2016511829A (ja) | 2016-04-21 |
| AU2014216740B2 (en) | 2017-07-06 |
| ES2664738T3 (es) | 2018-04-23 |
| EP2956743A1 (en) | 2015-12-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| GB2534808B (en) | Method and apparatus for measurement of material condition | |
| EP3087351C0 (en) | SENSOR DEVICE AND METHOD FOR FLOW MEASURING | |
| TWI561938B (en) | Method and apparatus for design of a metrology target | |
| PT2851681T (pt) | Aparelho para inspeção não destrutiva de longarinas | |
| EP2946199A4 (en) | METHOD AND DEVICE FOR ANALYTIC MEASUREMENTS | |
| HK1201922A1 (en) | Method and measuring apparatus for determining physical properties of gas | |
| PL3228237T3 (pl) | Urządzenie oraz sposób pomiaru odległości | |
| SG11201505990QA (en) | Method and apparatus for measuring anesthetic depth | |
| PL3108205T3 (pl) | Urządzenie fotoakustyczne i sposób bezdotykowego pomiaru cienkich warstw | |
| SG11201604739RA (en) | Method and apparatus for design of a metrology target | |
| EP3962168C0 (en) | SIGNAL MEASURING METHOD AND DEVICE | |
| IL226984A0 (en) | Device and method for measuring resistance of an object | |
| EP2935615A4 (en) | METHOD FOR IMPROVING MEASUREMENT ACCURACY AND RELATED DEVICES AND SYSTEMS | |
| GB2544935B (en) | Method for optically measuring three-dimensional coordinates and calibration of a three-dimensional measuring device | |
| GB2516916B (en) | Method and apparatus for determining the mass of a body | |
| EP3022521A4 (en) | Positioning apparatus and method for distance measurement | |
| EP3004831A4 (en) | APPARATUS AND METHODS FOR MEASURING PRESSURE | |
| EP3052906A4 (en) | METHOD AND DEVICE FOR MEASURING INDIVIDUAL COMPONENTS OF A MULTIPHASE LIQUID | |
| IL257484A (en) | A system for and a method of measuring using a handheld electronic device | |
| PL3080548T3 (pl) | Urządzenie pomiarowe oraz odpowiadający sposób | |
| EP3052905A4 (en) | METHOD AND DEVICE FOR MEASURING INDIVIDUAL COMPONENTS OF A MULTIPHASE LIQUID | |
| EP2956743A4 (en) | METHOD AND APPARATUS FOR QUANTITATIVE MEASUREMENT OF SURFACE PRECISION OF A ZONE | |
| EP2807451A4 (en) | METHOD AND APPARATUS FOR MEASURING SHAPE AND THICKNESS VARIATION OF WAFER | |
| GB201300990D0 (en) | A test apparatus and a method of testing | |
| IL244303A0 (en) | Device and method for measuring breath analyte |