PL290072A2 - Plasma source - Google Patents

Plasma source

Info

Publication number
PL290072A2
PL290072A2 PL29007291A PL29007291A PL290072A2 PL 290072 A2 PL290072 A2 PL 290072A2 PL 29007291 A PL29007291 A PL 29007291A PL 29007291 A PL29007291 A PL 29007291A PL 290072 A2 PL290072 A2 PL 290072A2
Authority
PL
Poland
Prior art keywords
plasma source
plasma
source
Prior art date
Application number
PL29007291A
Other versions
PL164663B1 (en
Inventor
Krzysztof Miernik
Jan Walkowicz
Jerzy Smolik
Jan Bujak
Original Assignee
Miedzyresortowe Ct Naukowe Eks
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Miedzyresortowe Ct Naukowe Eks filed Critical Miedzyresortowe Ct Naukowe Eks
Priority to PL29007291A priority Critical patent/PL164663B1/en
Publication of PL290072A2 publication Critical patent/PL290072A2/en
Publication of PL164663B1 publication Critical patent/PL164663B1/en

Links

PL29007291A 1991-04-26 1991-04-26 Plasma source PL164663B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PL29007291A PL164663B1 (en) 1991-04-26 1991-04-26 Plasma source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PL29007291A PL164663B1 (en) 1991-04-26 1991-04-26 Plasma source

Publications (2)

Publication Number Publication Date
PL290072A2 true PL290072A2 (en) 1992-01-27
PL164663B1 PL164663B1 (en) 1994-09-30

Family

ID=20054476

Family Applications (1)

Application Number Title Priority Date Filing Date
PL29007291A PL164663B1 (en) 1991-04-26 1991-04-26 Plasma source

Country Status (1)

Country Link
PL (1) PL164663B1 (en)

Also Published As

Publication number Publication date
PL164663B1 (en) 1994-09-30

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