PL284963A2 - Reactive ionic sputtering process - Google Patents
Reactive ionic sputtering processInfo
- Publication number
- PL284963A2 PL284963A2 PL28496390A PL28496390A PL284963A2 PL 284963 A2 PL284963 A2 PL 284963A2 PL 28496390 A PL28496390 A PL 28496390A PL 28496390 A PL28496390 A PL 28496390A PL 284963 A2 PL284963 A2 PL 284963A2
- Authority
- PL
- Poland
- Prior art keywords
- sputtering process
- reactive ionic
- ionic sputtering
- reactive
- sputtering
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PL28496390A PL161596B2 (en) | 1990-04-26 | 1990-04-26 | Reactive ionic sputtering process |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PL28496390A PL161596B2 (en) | 1990-04-26 | 1990-04-26 | Reactive ionic sputtering process |
Publications (2)
Publication Number | Publication Date |
---|---|
PL284963A2 true PL284963A2 (en) | 1991-01-28 |
PL161596B2 PL161596B2 (en) | 1993-07-30 |
Family
ID=20051080
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PL28496390A PL161596B2 (en) | 1990-04-26 | 1990-04-26 | Reactive ionic sputtering process |
Country Status (1)
Country | Link |
---|---|
PL (1) | PL161596B2 (en) |
-
1990
- 1990-04-26 PL PL28496390A patent/PL161596B2/en unknown
Also Published As
Publication number | Publication date |
---|---|
PL161596B2 (en) | 1993-07-30 |
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