PL284963A2 - Reactive ionic sputtering process - Google Patents

Reactive ionic sputtering process

Info

Publication number
PL284963A2
PL284963A2 PL28496390A PL28496390A PL284963A2 PL 284963 A2 PL284963 A2 PL 284963A2 PL 28496390 A PL28496390 A PL 28496390A PL 28496390 A PL28496390 A PL 28496390A PL 284963 A2 PL284963 A2 PL 284963A2
Authority
PL
Poland
Prior art keywords
sputtering process
reactive ionic
ionic sputtering
reactive
sputtering
Prior art date
Application number
PL28496390A
Other versions
PL161596B2 (en
Inventor
Krzysztof Miernik
Wladimir Barczenko
Siergiej Zagraniczny
Igor Balikojew
Original Assignee
Miedzyresortowe Ct Naukowe Eks
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Miedzyresortowe Ct Naukowe Eks filed Critical Miedzyresortowe Ct Naukowe Eks
Priority to PL28496390A priority Critical patent/PL161596B2/en
Publication of PL284963A2 publication Critical patent/PL284963A2/en
Publication of PL161596B2 publication Critical patent/PL161596B2/en

Links

PL28496390A 1990-04-26 1990-04-26 Reactive ionic sputtering process PL161596B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PL28496390A PL161596B2 (en) 1990-04-26 1990-04-26 Reactive ionic sputtering process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PL28496390A PL161596B2 (en) 1990-04-26 1990-04-26 Reactive ionic sputtering process

Publications (2)

Publication Number Publication Date
PL284963A2 true PL284963A2 (en) 1991-01-28
PL161596B2 PL161596B2 (en) 1993-07-30

Family

ID=20051080

Family Applications (1)

Application Number Title Priority Date Filing Date
PL28496390A PL161596B2 (en) 1990-04-26 1990-04-26 Reactive ionic sputtering process

Country Status (1)

Country Link
PL (1) PL161596B2 (en)

Also Published As

Publication number Publication date
PL161596B2 (en) 1993-07-30

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